Micromachining soda-lime glass by femtosecond laser pulses

Abstract

The physical process of forming a modified region in soda-lime glass was investigated using 1 kHz intense femtosecond laser pulses from a Ti: sapphire laser at 775 nm. Through the modifications induced by the femtosecond laser radiation using selective chemical etching techniques, we fabricated reproducible and defined microstructures and further studied their morphologies and etching properties. Moreover, a possible physical mechanism for the femtosecond laser modification in soda-lime glass was proposed.

Graphical abstract

Keywords

ultrafast processes / glass / laser ablation

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Higher Education Press and Springer-Verlag Berlin Heidelberg