Micromachining soda-lime glass by femtosecond laser pulses
Wei Jia, Jian Yu, Lu Chai, Ching-Yue Wang
Micromachining soda-lime glass by femtosecond laser pulses
The physical process of forming a modified region in soda-lime glass was investigated using 1 kHz intense femtosecond laser pulses from a Ti: sapphire laser at 775 nm. Through the modifications induced by the femtosecond laser radiation using selective chemical etching techniques, we fabricated reproducible and defined microstructures and further studied their morphologies and etching properties. Moreover, a possible physical mechanism for the femtosecond laser modification in soda-lime glass was proposed.
ultrafast processes / glass / laser ablation
[1] |
Z. N. Peng, W. Jia, and Q. Y. Wang, Micromachining in glass with femtosecond laser, Nanotech. Precis. Eng. 6(2), 114 (2008)
|
[2] |
K. Miura, J. R. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, Photowritten optical waveguides in various glasses with ultrashort pulse laser, Appl. Phys. Lett. 71(23), 3329 (1997)
CrossRef
ADS
Google scholar
|
[3] |
R. R. Gattass and E. Mazur, Femtosecond laser micromachining in transparent materials, Nat. Photonics 2(4), 219 (2008)
CrossRef
ADS
Google scholar
|
[4] |
K. Sugioka and Y. Cheng, Ultrafast lasers — reliable tools for advanced materials processing, Light Sci. Appl. 3(4), e149 (2014)
CrossRef
ADS
Google scholar
|
[5] |
C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching, Appl. Phys. A 84(1—2), 47 (2006)
CrossRef
ADS
Google scholar
|
[6] |
K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, Photowritten optical waveguides in various glasses with ultrashort pulse laser, Appl. Phys. Lett. 71(23), 3329 (1997)
CrossRef
ADS
Google scholar
|
[7] |
C. B. Schaffer, A. Brodeur, J. F. García, and E. Mazur, Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy, Opt. Lett. 26(2), 93 (2001)
CrossRef
ADS
Google scholar
|
[8] |
C. B. Schaffer, J. F. García, and E. Mazur, Bulk heating of transparent materials using a high-repetition-rate femtosecond laser, Appl. Phys. A 76(3), 351 (2003)
CrossRef
ADS
Google scholar
|
[9] |
A. Saliminia, N. T. Nguyen, S. L. Chin, and R. Vallée, Densification of silica glass induced by 0.8 and 1.5 μm intense femtosecond laser pulses, J. Appl. Phys. 99(9), 093104 (2006)
CrossRef
ADS
Google scholar
|
[10] |
A. Marcinkevičius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, Femtosecond laserassisted three-dimensional microfabrication in silica, Opt. Lett. 26(5), 277 (2001)
CrossRef
ADS
Google scholar
|
[11] |
R. S. Taylor, C. Hnatovsky, E. Simova, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, Femtosecond laser fabrication of nanostructures in silica glass, Opt. Lett. 28(12), 1043 (2003)
CrossRef
ADS
Google scholar
|
[12] |
R. Taylor, C. Hnatovsky, E. Simova, D. Rayner, M. Mehandale, V. Bhardwaj, and P. Corkum, Ultra-high resolution index of refraction profiles of femtosecond laser modified silica structures, Opt. Express 11(7), 775 (2003)
CrossRef
ADS
Google scholar
|
[13] |
J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, Waveguide fabrication in phosphate glasses using femtosecond laser pulses, Appl. Phys. Lett. 82(15), 2371 (2003)
CrossRef
ADS
Google scholar
|
[14] |
W. Reichman, C. A. Click, and D. M. Krol, C. A. Click, and D. M. Krol, Femtosecond laser writing of waveguide structures in sodium calcium silicate glasses, Proc. SPIE 5714, 238 (2005)
CrossRef
ADS
Google scholar
|
[15] |
F. Vega, J. Armengol, V. Diez-Blanco, J. Siegel, J. Solis, B. Barcones, A. Pérez-Rodríguez, and P. Loza-Alvarez, Mechanisms of refractive index modification during femtosecond laser writing of waveguides in alkaline lead-oxide silicate glass, Appl. Phys. Lett. 87(2), 021109 (2005)
CrossRef
ADS
Google scholar
|
[16] |
V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, Optically produced arrays of planar nanostructures inside fused silica, Phys. Rev. Lett. 96(5), 057404 (2006)
CrossRef
ADS
Google scholar
|
[17] |
Y. Liao, B. Zeng, L. Qiao, L. Liu, K. Sugioka, and Y. Cheng, Threshold effect in femtosecond laser induced nanograting formation in glass: Influence of the pulse duration, Appl. Phys. A 114(1), 223 (2014)
CrossRef
ADS
Google scholar
|
[18] |
A. Saliminia, N. T. Nguyen, M. C. Nadeau, S. Petit, S. L. Chin, and R. Vallée, Writing optical waveguides in fused silica using 1 kHz femtosecond infrared pulses, J. Appl. Phys. 93(7), 3724 (2003)
CrossRef
ADS
Google scholar
|
[19] |
V. R. Bhardwaj, P. B. Corkum, D. M. Rayner, C. Hnatovsky, E. Simova, and R. S. Taylor, Stress in femtosecondlaser- written waveguides in fused silica, Opt. Lett. 29(12), 1312 (2004)
CrossRef
ADS
Google scholar
|
[20] |
E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T. H. Her, J. P. Callan, and E. Mazur, Three-dimensional optical storage inside transparent materials, Opt. Lett. 21(24), 2023 (1996)
CrossRef
ADS
Google scholar
|
[21] |
B. Henrist, N. Hilleret, M. Jimenez, C. Scheuerlein, M. Taborelli, and G. Vorlaufer, Secondary electron emission data for the simulation of electron cloud, Proceedings ECLOUD 2002, CERN, Geneva, <day>15</day>—<day>18</day><month>April</month>, 2002
|
[22] |
Y. Teng, J. Zhou, G. Lin, J. Hua, H. Zeng, S. Zhou, and J. Qiu, Ultrafast modification of elements distribution and local luminescence properties in glass, J. Non-Cryst. Solids 358(9), 1185 (2012)
CrossRef
ADS
Google scholar
|
[23] |
E. Axinte, Glasses as engineering materials: A review, Mater. Des. 32(4), 1717 (2011)
CrossRef
ADS
Google scholar
|
[24] |
K. Bourhis, A. Royon, M. Bellec, J. Choi, A. Fargues, M. Treguer, J. Videau, D. Talaga, M. Richardson, T. Cardinal, and L. Canioni, Femtosecond laser structuring and optical properties of a silver and zinc phosphate glass, J. Non-Cryst Solids 356(44), 2658 (2010)
CrossRef
ADS
Google scholar
|
[25] |
P. P. Rajeev, M. Gertsvolf, C. Hnatovsky, E. Simova, R. S. Taylor, P. B. Corkum, D. M. Rayner, and V. R. Bhardwaj, Transient nanoplasmonics inside dielectrics, J. Phys. B 40(11), S273 (2007)
CrossRef
ADS
Google scholar
|
[26] |
V. Oliveira, S. P. Sharma, P. Herrero, and R. Vilar, Transformations induced in bulk amorphous silica by ultrafast laser direct writing, Opt. Lett. 38(23), 4950 (2013)
CrossRef
ADS
Google scholar
|
/
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