Characteristics of single and dual radio-frequency (RF) plasma sheaths

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Front. Phys. ›› 2006, Vol. 1 ›› Issue (2) : 178-185. DOI: 10.1007/s11467-006-0001-4

Characteristics of single and dual radio-frequency (RF) plasma sheaths

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{{article.zuoZheEn_L}}. {{article.titleEn}}. Front. Phys., 2006, 1(2): 178‒185 https://doi.org/10.1007/s11467-006-0001-4

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