Recent research progress of master mold manufacturing by nanoimprint technique for the novel microoptics devices

Abstract

The consumer demand for emerging technologies such as augmented reality (AR), autopilot, and three-dimensional (3D) internet has rapidly promoted the application of novel optical display devices in innovative industries. However, the micro/nanomanufacturing of high-resolution optical display devices is the primary issue restricting their development. The manufacturing technology of micro/nanostructures, methods of display mechanisms, display materials, and mass production of display devices are major technical obstacles. To comprehensively understand the latest state-of-the-art and trigger new technological breakthroughs, this study reviews the recent research progress of master molds produced using nanoimprint technology for new optical devices, particularly AR glasses, new-generation light-emitting diode car lighting, and naked-eye 3D display mechanisms, and their manufacturing techniques of master molds. The focus is on the relationships among the manufacturing process, microstructure, and display of a new optical device. Nanoimprint master molds are reviewed for the manufacturing and application of new optical devices, and the challenges and prospects of the new optical device diffraction grating nanoimprint technology are discussed.

Graphical abstract

Keywords

master mold manufacturing / nanoimprint technique / augmented reality / automotive lighting / naked-eye 3D display

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Authors’ contributions

D.G. conceived of the main conceptual ideas and proof outline. X.W. supervised the project. Y.L. & J.L. drafted the manuscript and figures with input from Z.H., G.G., B.W., L.W., Z.P., J.J. and Q.Y. All authors approved the final version of the manuscript.

Acknowledgements

This work was supported by the Fundamental Key Research Project of Shenzhen (Grant No. JCYJ20210324115806017), the Innovation and Entrepreneurship Project for Overseas High-Level Talents of Shenzhen (Grant No. KQJSCX20180328095603847), the National Natural Science Foundation of China (Grant No. 51805331), and the National Key R&D Program of China (Grant No. 6142005180401).

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