Recent research progress of master mold manufacturing by nanoimprint technique for the novel microoptics devices
Yuhang LIU , Jianjun LIN , Zuohuan HU , Guoli GAO , Bingyang WANG , Liuyi WANG , Zhiyuan PAN , Jianfei JIA , Qinwei YIN , Dengji GUO , Xujin WANG
Front. Mater. Sci. ›› 2022, Vol. 16 ›› Issue (3) : 220596
Recent research progress of master mold manufacturing by nanoimprint technique for the novel microoptics devices
The consumer demand for emerging technologies such as augmented reality (AR), autopilot, and three-dimensional (3D) internet has rapidly promoted the application of novel optical display devices in innovative industries. However, the micro/nanomanufacturing of high-resolution optical display devices is the primary issue restricting their development. The manufacturing technology of micro/nanostructures, methods of display mechanisms, display materials, and mass production of display devices are major technical obstacles. To comprehensively understand the latest state-of-the-art and trigger new technological breakthroughs, this study reviews the recent research progress of master molds produced using nanoimprint technology for new optical devices, particularly AR glasses, new-generation light-emitting diode car lighting, and naked-eye 3D display mechanisms, and their manufacturing techniques of master molds. The focus is on the relationships among the manufacturing process, microstructure, and display of a new optical device. Nanoimprint master molds are reviewed for the manufacturing and application of new optical devices, and the challenges and prospects of the new optical device diffraction grating nanoimprint technology are discussed.
master mold manufacturing / nanoimprint technique / augmented reality / automotive lighting / naked-eye 3D display
| [1] |
|
| [2] |
|
| [3] |
|
| [4] |
|
| [5] |
|
| [6] |
|
| [7] |
|
| [8] |
|
| [9] |
|
| [10] |
|
| [11] |
|
| [12] |
|
| [13] |
|
| [14] |
|
| [15] |
|
| [16] |
|
| [17] |
|
| [18] |
|
| [19] |
|
| [20] |
|
| [21] |
|
| [22] |
|
| [23] |
|
| [24] |
|
| [25] |
|
| [26] |
|
| [27] |
|
| [28] |
|
| [29] |
|
| [30] |
|
| [31] |
|
| [32] |
|
| [33] |
|
| [34] |
|
| [35] |
|
| [36] |
|
| [37] |
|
| [38] |
|
| [39] |
|
| [40] |
|
| [41] |
|
| [42] |
|
| [43] |
|
| [44] |
|
| [45] |
|
| [46] |
|
| [47] |
|
| [48] |
|
| [49] |
|
| [50] |
|
| [51] |
|
| [52] |
|
| [53] |
|
| [54] |
|
| [55] |
|
| [56] |
|
| [57] |
|
| [58] |
|
| [59] |
|
| [60] |
|
| [61] |
|
| [62] |
|
| [63] |
|
| [64] |
|
| [65] |
|
| [66] |
|
| [67] |
|
| [68] |
|
| [69] |
Gatabi J R. Exposure tool for lithography on tilted and curved surfaces using spatial light modulator, 2013 |
| [70] |
|
| [71] |
|
| [72] |
|
| [73] |
|
| [74] |
|
| [75] |
|
| [76] |
|
| [77] |
|
| [78] |
|
| [79] |
|
| [80] |
|
| [81] |
|
| [82] |
|
| [83] |
|
| [84] |
|
| [85] |
|
| [86] |
|
| [87] |
|
| [88] |
|
| [89] |
|
| [90] |
|
| [91] |
|
| [92] |
|
| [93] |
|
| [94] |
|
| [95] |
|
| [96] |
|
| [97] |
|
| [98] |
|
| [99] |
|
| [100] |
|
| [101] |
|
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