Chemical vapor deposited diamond with versatile grades: from gemstone to quantum electronics

Yuting ZHENG, Chengming LI, Jinlong LIU, Junjun WEI, Xiaotong ZHANG, Haitao YE, Xiaoping OUYANG

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Front. Mater. Sci. ›› 2022, Vol. 16 ›› Issue (1) : 220590. DOI: 10.1007/s11706-022-0590-z
REVIEW ARTICLE

Chemical vapor deposited diamond with versatile grades: from gemstone to quantum electronics

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Abstract

Chemical vapor deposited (CVD) diamond as a burgeoning multi-functional material with tailored quality and characteristics can be artificially synthesized and controlled for various applications. Correspondingly, the application-related “grade” concept associated with materials choice and design was gradually formulated, of which the availability and the performance are optimally suited. In this review, the explicit diversity of CVD diamond and the clarification of typical grades for applications, i.e., from resplendent gem-grade to promising quantum-grade, were systematically summarized and discussed, according to the crystal quality and main consideration of ubiquitous nitrogen impurity content as well as major applications. Realizations of those, from quantum-grade with near-ideal crystal to electronic-grade having extremely low imperfections and then to optical, thermal as well as mechanical-grade needing controlled flaws and allowable impurities, would competently fulfill the multi-field application prospects with appropriate choice in terms of cost and quality. Exceptionally, wide range defects and impurities in the gem-grade diamond (only indicating single crystal), which are detrimental for technology applications, endows CVD crystals with fancy colors to challenge their natural counterparts.

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Keywords

CVD diamond / synthesis and characterization / quality and impurity / grading / application

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Yuting ZHENG, Chengming LI, Jinlong LIU, Junjun WEI, Xiaotong ZHANG, Haitao YE, Xiaoping OUYANG. Chemical vapor deposited diamond with versatile grades: from gemstone to quantum electronics. Front. Mater. Sci., 2022, 16(1): 220590 https://doi.org/10.1007/s11706-022-0590-z

References

[1]
Ogden J. Diamonds: An Early History of the King of Gems. New Haven, USA: Yale University Press, 2018
[2]
Breeding C M. Colored diamonds: the rarity and beauty of imperfection. Gems & Gemology, 2018, 54: 275
[3]
Butler J E, Woodin R L. Thin film diamond growth mechanisms. Philosophical Transactions of the Royal Society of London Series A: Mathematical Physical and Engineering Sciences, 1993, 342(1664): 209–224
CrossRef Google scholar
[4]
Renfro N, Koivula J I, Wang W Y, . Synthetic gem materials in the 2000s: a decade in review. Gems & Gemology, 2010, 46(4): 260–273
CrossRef Google scholar
[5]
Amaratunga G A J. A dawn for carbon electronics? Science, 2002, 297(5587): 1657–1658
CrossRef Google scholar
[6]
Liu T, Raabe D, Mao W M. A review of crystallographic textures in chemical vapor-deposited diamond films. Frontiers of Materials Science, 2010, 4(1): 1–16
CrossRef Google scholar
[7]
Cumont A, Pitt A R, Lambert P A, . Properties, mechanism and applications of diamond as an antibacterial material. Functional Diamond, 2021, 1(1): 1–28
CrossRef Google scholar
[8]
Zheng Y T, Wei J J, Liu J L, . Carbon materials: the burgeoning promise in electronics. International Journal of Minerals, Metallurgy and Materials, 2022, doi:10.1007/s12613-021-2358-3 (in press)
CrossRef Google scholar
[9]
Yang H C, Ma Y D, Dai Y. Progress of structural and electronic properties of diamond: a mini review. Functional Diamond, 2021, 1(1): 150–159
CrossRef Google scholar
[10]
Mildren R P, Rabeau J R, eds. Optical Engineering of Diamond. 1st ed. Weinheim, Germany: Wiley-VCH, 2013
[11]
Liu K, Zhang S, Ralchenko V, . Tailoring of typical color centers in diamond for photonics. Advanced Materials, 2021, 33(6): 2000891
CrossRef Google scholar
[12]
Bland S. Diamond circuits are forever: carbon. Materials Today, 2011, 14(10): 460
[13]
Graebner J E, Reiss M E, Seibles L, . Phonon scattering in chemical-vapor-deposited diamond. Physical Review B, 1994, 50(6): 3702–3713
CrossRef Google scholar
[14]
Worner E, Wild C, Muller-Sebert W, . Thermal conductivity of CVD diamond films: high-precision, temperature-resolved measurements. Diamond and Related Materials, 1996, 5(6–8): 688–692
CrossRef Google scholar
[15]
Wang W H, Dai B, Wang Y, . Recent progress of diamond optical window-related components. Materials Science and Technology, 2020, 28: 42–57
[16]
Kasugai A, Sakamoto K, Takahashi K, . Chemical vapor deposition diamond window for high-power and long pulse millimeter wave transmission. Review of Scientific Instruments, 1998, 69(5): 2160–2165
CrossRef Google scholar
[17]
Coe S E, Sussmann R S. Optical, thermal and mechanical properties of CVD diamond. Diamond and Related Materials, 2000, 9(9–10): 1726–1729
CrossRef Google scholar
[18]
Heidinger R, Dammertz G, Meier A, . CVD diamond windows studied with low-and high-power millimeter waves. IEEE Transactions on Plasma Science, 2002, 30(3): 800–807
CrossRef Google scholar
[19]
Mildren R P. Intrinsic optical properties of diamond. In: Mildren R P, Rabeau J R, eds. Optical Engineering of Diamond. 1st ed. Weinheim, Germany: Wiley-VCH, 2013, 1–34
[20]
Marinelli M, Milani E, Paoletti A, . Growth of detector grade CVD diamond films and microscopic interpretation of their efficiency and charge collection distance in the normal and pumped states. Diamond and Related Materials, 2001, 10(9–10): 1783–1787
CrossRef Google scholar
[21]
Bergonzo P, Barrett R, Hainaut O, . Imaging of the sensitivity in detector grade polycrystalline diamonds using micro-focused X-ray beams. Diamond and Related Materials, 2002, 11(3–6): 418–422
CrossRef Google scholar
[22]
Okushi H, Watanabe H, Ri S, . Device-grade homoepitaxial diamond film growth. Journal of Crystal Growth, 2002, 237–239: 1269–1276
CrossRef Google scholar
[23]
Takeuchi D, Watanabe H, Yamanaka S, . Defects in device grade homoepitaxial diamond thin films grown with ultra-low CH4/H2 conditions by microwave-plasma chemical vapor deposition. Physica Status Solidi A: Applied Research, 1999, 174(1): 101–115
CrossRef Google scholar
[24]
Takeuchi D, Yamanaka S, Watanabe H, . Device grade B-doped homoepitaxial diamond thin films. Physica Status Solidi A: Applied Research, 2001, 186(2): 269–280
CrossRef Google scholar
[25]
Wort C J H, Balmer R S. Diamond as an electronic material. Materials Today, 2008, 11(1–2): 22–28
CrossRef Google scholar
[26]
Isberg J, Hammersberg J, Johansson E, . High carrier mobility in single-crystal plasma-deposited diamond. Science, 2002, 297(5587): 1670–1672
CrossRef Google scholar
[27]
Lee S T, Lifshitz Y. The road to diamond wafers. Nature, 2003, 424(6948): 500–501
CrossRef Google scholar
[28]
Prawer S, Greentree A D. Applied physics: diamond for quantum computing. Science, 2008, 320(5883): 1601–1602
CrossRef Google scholar
[29]
Field J E. The mechanical and strength properties of diamond. Reports on Progress in Physics, 2012, 75(12): 126505
CrossRef Google scholar
[30]
Garifo S, Stanicki D, Ayata G, . Nanodiamonds as nanomaterial for biomedical field. Frontiers of Materials Science, 2021, 15(3): 334–351
CrossRef Google scholar
[31]
Simakov S K. On the origin of large type IIa gem diamonds. Ore Geology Reviews, 2018, 102: 195–203
CrossRef Google scholar
[32]
Ke J, Lu T J, Lan Y, . Recent developments in detection and gemology in China, particularly for Chinese synthetic diamonds. Gems & Gemology, 2018, 54(3): 268
[33]
Kasu M. Diamond epitaxy: basics and applications. Progress in Crystal Growth and Characterization of Materials, 2016, 62(2): 317–328
CrossRef Google scholar
[34]
Eaton-Magaña S, Breeding C M. Features of synthetic diamonds. Gems & Gemology, 2018, 54(2): 202–204
CrossRef Google scholar
[35]
Wang W Y, Moses T, Linares R C, . Gem-quality synthetic diamonds grown by a chemical vapor deposition (CVD) method. Gems & Gemology, 2003, 39(4): 268–283
CrossRef Google scholar
[36]
Schwander M, Partes K. A review of diamond synthesis by CVD processes. Diamond and Related Materials, 2011, 20(9): 1287–1301
CrossRef Google scholar
[37]
Balmer R S, Brandon J R, Clewes S L, . Chemical vapour deposition synthetic diamond: materials, technology and applications. Journal of Physics: Condensed Matter, 2009, 21(36): 364221
CrossRef Google scholar
[38]
Thoms B D, Russell J N, Pehrsson P E, . Adsorption and abstraction of hydrogen on polycrystalline diamond. The Journal of Chemical Physics, 1994, 100(11): 8425–8431
CrossRef Google scholar
[39]
Diggle P L, Haenens-Johansson U F S, Wang W Y, . Diamond at the diffraction limit: optical characterization of synthetic diamond. Gems & Gemology, 2018, 54: 265
[40]
Shigley J E, Breeding C M. Optical defects in diamond: a quick reference chart. Gems & Gemology, 2013, 49(2): 107–111
CrossRef Google scholar
[41]
Fairchild B A, Rubanov S, Lau D W M, . Mechanism for the amorphisation of diamond. Advanced Materials, 2012, 24(15): 2024–2029
CrossRef Google scholar
[42]
Fairchild B A, Olivero P, Rubanov S, . Fabrication of ultrathin single-crystal diamond membranes. Advanced Materials, 2008, 20(24): 4793–4798
CrossRef Google scholar
[43]
Breeding C M, Shen A H, Eaton-Magaña S, . Developments in gemstone analysis techniques and instrumentation during the 2000s. Gems & Gemology, 2010, 46(3): 241–257
CrossRef Google scholar
[44]
Koenka I Y, Kauffmann Y, Hoffman A. Direct visualization and characterization of chemical bonding and phase composition of grain boundaries in polycrystalline diamond films by transmission electron microscopy and high-resolution electron energy loss spectroscopy. Applied Physics Letters, 2011, 99(20): 201907
CrossRef Google scholar
[45]
Ohmagari S, Yamada H, Tsubouchi N, . Toward high-performance diamond electronics: control and annihilation of dislocation propagation by metal-assisted termination. Physica Status Solidi A: Applications and Materials Science, 2019, 216(21): 1900498
CrossRef Google scholar
[46]
Teraji T, Yamamoto T, Watanabe K, . Homoepitaxial diamond film growth: high purity, high crystalline quality, isotopic enrichment, and single-color center formation. Physica Status Solidi A: Applications and Materials Science, 2015, 212(11): 2365–2384
CrossRef Google scholar
[47]
Shikata S, Yamaguchi K, Fujiwara A, . X-ray absorption fine structure study of heavily P doped (1€1€1) and (0€0€1) diamond. Applied Physics Letters, 2017, 110(7): 072106
CrossRef Google scholar
[48]
Breeding C M, Shigley J E. The “type” classification system of diamonds and its importance in gemology. Gems & Gemology, 2009, 45(2): 96–111
CrossRef Google scholar
[49]
Ashfold M N R, Goss J P, Green B L, . Nitrogen in diamond. Chemical Reviews, 2020, 120(12): 5745–5794
CrossRef Google scholar
[50]
Nebel C E. Nitrogen-vacancy doped CVD diamond for quantum applications: a review. Semiconductors and Semimetals, 2020, 103: 73–136
CrossRef Google scholar
[51]
Howell D. Strain-induced birefringence in natural diamond: a review. European Journal of Mineralogy, 2012, 24(4): 575–585
CrossRef Google scholar
[52]
Groat L. Scientific study of colored gem deposits and modern fingerprinting methods. Gems & Gemology, 2018, 54(3): 277–278
[53]
Pan L S, Kania D R, Pianetta P, . Temperature dependent mobility in single-crystal and chemical vapor-deposited diamond. Journal of Applied Physics, 1993, 73(6): 2888–2894
CrossRef Google scholar
[54]
Hartl A, Garrido J A, Nowy S, . The ion sensitivity of surface conductive single crystalline diamond. Journal of the American Chemical Society, 2007, 129(5): 1287–1292
CrossRef Google scholar
[55]
Onstad E, Clarke D. How man-made diamonds have grown to threaten natural gems. Reuters Business News, 2018
[56]
Kitawaki H. Undisclosed samples of large CVD synthetic diamond. Gems & Gemology, 2013, 49(1): 60–61
[57]
Renfro N D, Koivula J I, Muyal J, . Inclusion in natural, synthetic, and treated diamond. Gems & Gemology, 2018, 54(4): 428–429
[58]
Cohen H, Ruthstein S. Evaluating the color and nature of diamonds via EPR spectroscopy. Gems & Gemology, 2018, 54(3): 276
[59]
Magaña S E, Ardon T, Smit K V, . Natural-color pink, purple, red, and brown diamonds: band of many colors. Gems & Gemology, 2018, 54(4): 352–377
[60]
Eaton-Magana S E, Ardon T, Zaitsev A M. LPHT annealing of brown-to-yellow type Ia diamonds. Diamond and Related Materials, 2017, 77: 159–170
CrossRef Google scholar
[61]
Gu T T, Wang W Y. Optical defects in milky type IaB diamonds. Diamond and Related Materials, 2018, 89: 322–329
CrossRef Google scholar
[62]
Collins A T. The detection of colour-enhanced and synthetic gem diamonds by optical spectroscopy. Diamond and Related Materials, 2003, 12(10–11): 1976–1983
CrossRef Google scholar
[63]
Fritsch E, Shigley J E, Moses T, . A green diamond a study of chameleonism. In: Content D J, ed. Leeds, UK: Maney and Sons Ltd., 1995
[64]
Goss J P, Ewels C P, Briddon P R, . Bistable N2–H complexes: the first proposed structure of a H-related colour-causing defect in diamond. Diamond and Related Materials, 2011, 20(7): 896–901
CrossRef Google scholar
[65]
Fujita N, Jones R, Öberg S, . Large spherical vacancy clusters in diamond — origin of the brown colouration? Diamond and Related Materials, 2009, 18(5–8): 843–845
CrossRef Google scholar
[66]
Eaton-Magana S, McElhenny G, Breeding C M, . Comparison of gemological and spectroscopic features in type IIa and Ia natural pink diamonds. Diamond and Related Materials, 2020, 105: 107784
CrossRef Google scholar
[67]
Hainschwang T, Notari F, Fritsch E, . Natural, untreated diamonds showing the A, B and C infrared absorptions (“ABC diamonds”), and the H2 absorption. Diamond and Related Materials, 2006, 15(10): 1555–1564
CrossRef Google scholar
[68]
Zaitsev A M, Kazuchits N M, Kazuchits V N, . Nitrogen-doped CVD diamond: nitrogen concentration, color and internal stress. Diamond and Related Materials, 2020, 105: 107794
CrossRef Google scholar
[69]
De Weerdt F, Van Royen J. Defects in coloured natural diamonds. Diamond and Related Materials, 2001, 10(3–7): 474–479
CrossRef Google scholar
[70]
Jones R. Dislocations, vacancies and the brown colour of CVD and natural diamond. Diamond and Related Materials, 2009, 18(5–8): 820–826
CrossRef Google scholar
[71]
Wang W Y, Moe K S. CVD Synthetic diamond with fancy vivid orange color. Gems & Gemology, 2014, 50(4): 299
[72]
Wang W Y, Moses T. Large pinkish orange CVD synthetic diamond. Gems & Gemology, 2018, 54(2): 216–217
[73]
Moe K S, Wang W Y, D’Haenens-Johansson U. Yellow CVD synthetic diamond. Gems & Gemology, 2014, 50(2): 154–155
[74]
Law B P L, Wang W Y. CVD synthetic diamond over 5 carats identified. Gems & Gemology, 2016, 52(4): 414–416
[75]
Poon T, Lo C, Law B. Ring with a CVD synthetic melee. Gems & Gemology, 2016, 52(1): 75–76
[76]
Magaña S. CVD synthetic diamond with unusual DiamondView image. Gems & Gemology, 2014, 50(1): 67–68
[77]
Tang S, Su J, Lu T, . A melee-size CVD synthetic diamond in pearl and diamond jewelry. Gems & Gemology, 2017, 53(3): 382–383
[78]
Willems B, Tallaire A, Achard J. Optical study of defects in thick undoped CVD synthetic diamond layers. Diamond and Related Materials, 2014, 41: 25–33
CrossRef Google scholar
[79]
Eaton-Magaña S, Shigley J E. Observations on CVD-grown synthetic diamonds: a review. Gems & Gemology, 2016, 52(3): 222–245
CrossRef Google scholar
[80]
Butler J E. Chemical vapor deposited diamond: maturity and diversity. Electrochemical Society Interface, 2003, 12(1): 22–26
CrossRef Google scholar
[81]
Fritsch E, Phelps A W. Type IIb diamond thin films deposited onto near-colorless natural gem diamonds. Diamond and Related Materials, 1993, 2(2–4): 70–74
CrossRef Google scholar
[82]
Ardon T, McElhenny G. Synthetic diamond CVD layer grown on natural diamond. Gems & Gemology, 2019, 55(1): 97–99
[83]
Wang W Y, D’Haenens-Johansson U F S, Johnson P, . CVD synthetic diamonds from gemesis corp. Gems & Gemology, 2012, 48(2): 80–97
CrossRef Google scholar
[84]
Zaitsev A M, Moe K S, Wang W Y. Defect transformations in nitrogen-doped CVD diamond during irradiation and annealing. Diamond and Related Materials, 2018, 88: 237–255
CrossRef Google scholar
[85]
Vins V G, Yelisseyev A P, Smovzh D V, . Optical properties of CVD single crystal diamonds before and after different post-growth treatments. Diamond and Related Materials, 2018, 86: 79–86
CrossRef Google scholar
[86]
Lim H, Park S, Cheong H, . Discrimination between natural and HPHT-treated type IIa diamonds using photoluminescence spectroscopy. Diamond and Related Materials, 2010, 19(10): 1254–1258
CrossRef Google scholar
[87]
Polyakov S N, Denisov V N, Kuzmin N V, . Characterization of top-quality type IIa synthetic diamonds for new X-ray optics. Diamond and Related Materials, 2011, 20(5–6): 726–728
CrossRef Google scholar
[88]
Han Q G, Li M Z, Jia X P, . Modeling of effective design of high pressure anvils used for large scale commercial production of gem quality large single crystal diamond. Diamond and Related Materials, 2011, 20(7): 969–973
CrossRef Google scholar
[89]
Wang Z K, Ma H A, Fang S, . Synthesis and characterization of gem diamond single crystals in Fe–C system under high temperature and high pressure. Journal of Crystal Growth, 2020, 531: 125371
CrossRef Google scholar
[90]
Stoupin S. Novel diamond X-ray crystal optics for synchrotrons and X-ray free-electron lasers. Diamond and Related Materials, 2014, 49: 39–47
CrossRef Google scholar
[91]
De Sio A, Bocci A, Pace E, . Diamond solid state ionization chambers for x-ray absorption spectroscopy applications. Applied Physics Letters, 2008, 93(8): 083503
CrossRef Google scholar
[92]
Song Y, Peng B D, Song G Z, . Investigating non-equilibrium carrier lifetimes in nitrogen-doped and boron-doped single crystal HPHT diamonds with an optical method. Applied Physics Letters, 2018, 112(2): 022103
CrossRef Google scholar
[93]
Tallaire A, Mille V, Brinza O, . Thick CVD diamond films grown on high-quality type IIa HPHT diamond substrates from new diamond technology. Diamond and Related Materials, 2017, 77: 146–152
CrossRef Google scholar
[94]
Achard J, Silva F, Brinza O, . Identification of etch-pit crystallographic faces induced on diamond surface by H2/O2 etching plasma treatment. Physica Status Solidi A: Applications and Materials Science, 2009, 206(9): 1949–1954
CrossRef Google scholar
[95]
Silva F, Achard J, Brinza O, . High quality, large surface area, homo epitaxial MPACVD diamond growth. Diamond and Related Materials, 2009, 18(5–8): 683–697
CrossRef Google scholar
[96]
Tallaire A, Achard J, Brinza O, . Growth strategy for controlling dislocation densities and crystal morphologies of single crystal diamond by using pyramidal-shape substrates. Diamond and Related Materials, 2013, 33: 71–77
CrossRef Google scholar
[97]
Vikharev A L, Lobaev M A, Gorbachev A M, . Investigation of homoepitaxial growth by microwave plasma CVD providing high growth rate and high quality of diamond simultaneously. Materials Today: Communications, 2020, 22: 100816
CrossRef Google scholar
[98]
Lab-grown and Mined Sectors. “Call a truce”. International Diamond Exchange (IDEX), 2020
[99]
Zhao Z S, Xu B, Tian Y J. Recent advances in superhard materials. Annual Review of Materials Research, 2016, 46(1): 383–406
CrossRef Google scholar
[100]
Blank V, Popov M, Pivovarov G, . Ultrahard and superhard phases of fullerite C60: comparison with diamond on hardness and wear. Diamond and Related Materials, 1998, 7(2–5): 427–431
CrossRef Google scholar
[101]
Zhang L J, Wang Y C, Lv J, . Materials discovery at high pressures. Nature Reviews Materials, 2017, 2(4): 17005
CrossRef Google scholar
[102]
Liang Q, Yan C S, Meng Y F, . Recent advances in high-growth rate single-crystal CVD diamond. Diamond and Related Materials, 2009, 18(5–8): 698–703
CrossRef Google scholar
[103]
Scott D E. The history of and impact of synthetic diamond cutters and diamond enhanced inserts on the oil and gas industry. Industrial Diamond Review, 2006, 66(1): 48–55
[104]
Ge Y F, Xu J H, Yang H. Diamond tools wear and their applicability when ultra-precision turning of SiCp/2009Al matrix composite. Wear, 2010, 269(11–12): 699–708
CrossRef Google scholar
[105]
Ding X, Jarfors A E W, Lim G C, . A study of the cutting performance of poly-crystalline oxygen free copper with single crystalline diamond micro-tools. Precision Engineering, 2012, 36(1): 141–152
CrossRef Google scholar
[106]
Kawasegi N, Kawashima T, Morita N, . Effect of texture shape on machining performance of textured diamond cutting tool. Precision Engineering, 2019, 60: 21–27
CrossRef Google scholar
[107]
Chrenko R M, Strong H M. Physical Properties of Diamond Report No. 75CRDO89. Schenectady, NY: General Electric, 1975
[108]
Niu H Y, Niu S W, Oganov A R. Simple and accurate model of fracture toughness of solids. Journal of Applied Physics, 2019, 125(6): 065105
CrossRef Google scholar
[109]
Hess P. The mechanical properties of various chemical vapor deposition diamond structures compared to the ideal single crystal. Journal of Applied Physics, 2012, 111(5): 051101
CrossRef Google scholar
[110]
Yan C S, Mao H K, Li W, . Ultrahard diamond single crystals from chemical vapor deposition. Physica Status Solidi A: Applied Research, 2004, 201(4): R25–R27
CrossRef Google scholar
[111]
Zong W J, Sun T, Li D, . Design criterion for crystal orientation of diamond cutting tool. Diamond and Related Materials, 2009, 18(4): 642–650
CrossRef Google scholar
[112]
Sumiya H. Superhard diamond indenter prepared from high-purity synthetic diamond crystal. Review of Scientific Instruments, 2005, 76(2): 026112
CrossRef Google scholar
[113]
Irifune T, Kurio A, Sakamoto S, . Ultrahard polycrystalline diamond from graphite. Nature, 2003, 421(6923): 599–600
CrossRef Google scholar
[114]
G’Hern M E, McHargue C J, Clausing R E, . Extended Abstracts No. 19, Technology Update on Diamond Films. Pittsburg, USA: Materials Research Society, 1989
[115]
Novikov N V, Dub S N. Hardness and fracture toughness of CVD diamond film. Diamond and Related Materials, 1996, 5(9): 1026–1030
CrossRef Google scholar
[116]
Liang Y F, Zheng Y T, Wei J J, . Effect of grain boundary on polycrystalline diamond polishing by high-speed dynamic friction. Diamond and Related Materials, 2021, 117: 108461
CrossRef Google scholar
[117]
Zheng Y T, Ye H T, Thornton R, . Subsurface cleavage of diamond after high-speed three-dimensional dynamic friction polishing. Diamond and Related Materials, 2020, 101: 107600
CrossRef Google scholar
[118]
Zhao G L, Li Z Y, Hu M S, . Fabrication and performance of CVD diamond cutting tool in micro milling of oxygen-free copper. Diamond and Related Materials, 2019, 100: 107589
CrossRef Google scholar
[119]
Pickles C S J. The fracture stress of chemical vapour deposited diamond. Diamond and Related Materials, 2002, 11(12): 1913–1922
CrossRef Google scholar
[120]
CVD Diamond Handbook. Element Six, De Beers Group, 2020
[121]
An K, Chen L X, Yan X B, . Fracture behavior of diamond films deposited by DC arc plasma jet CVD. Ceramics International, 2018, 44(11): 13402–13408
CrossRef Google scholar
[122]
Paci J T, Belytschko T, Schatz G C. Mechanical properties of ultrananocrystalline diamond prepared in a nitrogen-rich plasma: a theoretical study. Physical Review B, 2006, 74(18): 184112
CrossRef Google scholar
[123]
Yang J X, Zhang H D, Li C M, . Effects of nitrogen addition on morphology and mechanical property of DC arc plasma jet CVD diamond films. Diamond and Related Materials, 2004, 13(1): 139–144
CrossRef Google scholar
[124]
Denkena B, Grove T, Gartzke T. Wear mechanisms of CVD diamond tools for patterning vitrified corundum grinding wheels. Wear, 2019, 436-437: 203007
CrossRef Google scholar
[125]
Qian J, McMurray C E, Mukhopadhyay D K, . Polycrystalline diamond cutters sintered with magnesium carbonate in cubic anvil press. International Journal of Refractory Metals & Hard Materials, 2012, 31: 71–75
CrossRef Google scholar
[126]
Li G X, Rahim M Z, Pan W C, . The manufacturing and the application of polycrystalline diamond tools — a comprehensive review. Journal of Manufacturing Processes, 2020, 56: 400–416
CrossRef Google scholar
[127]
Hu M, Ming W W, An Q L, . Experimental study on milling performance of 2D C/SiC composites using polycrystalline diamond tools. Ceramics International, 2019, 45(8): 10581–10588
CrossRef Google scholar
[128]
Erasmus R M, Comins J D, Mofokeng V, . Application of Raman spectroscopy to determine stress in polycrystalline diamond tools as a function of tool geometry and temperature. Diamond and Related Materials, 2011, 20(7): 907–911
CrossRef Google scholar
[129]
Belmonte M, Ferro P, Fernandes A J S, . Wear resistant CVD diamond tools for turning of sintered hardmetals. Diamond and Related Materials, 2003, 12(3–7): 738–743
CrossRef Google scholar
[130]
Almeida F A, Fernandes A J S, Oliveira F J, . Semi-orthogonal turning of hard metal with CVD diamond and PCD inserts at different cutting angles. Vacuum, 2009, 83(10): 1218–1223
CrossRef Google scholar
[131]
Guo B, Wu M, Zhao Q, . Improvement of precision grinding performance of CVD diamond wheels by micro-structured surfaces. Ceramics International, 2018, 44(14): 17333–17339
CrossRef Google scholar
[132]
Sumiya H, Ishida Y. Real hardness of high-purity ultra-fine nano-polycrystalline diamond synthesized by direct conversion sintering under HPHT. Diamond and Related Materials, 2019, 100: 107560
CrossRef Google scholar
[133]
Huang Q, Yu D L, Xu B, . Nanotwinned diamond with unprecedented hardness and stability. Nature, 2014, 510(7504): 250–253
CrossRef Google scholar
[134]
Regan B, Aghajamali A, Froech J, . Plastic deformation of single-crystal diamond nanopillars. Advanced Materials, 2020, 32(9): 1906458
CrossRef Google scholar
[135]
Nie A M, Bu Y Q, Huang J Q, . Direct observation of room-temperature dislocation plasticity in diamond. Matter, 2020, 2(5): 1222–1232
CrossRef Google scholar
[136]
Liao M Y. Progress in semiconductor diamond photodetectors and MEMS sensors. Functional Diamond, 2021, 1(1): 29–46
CrossRef Google scholar
[137]
Sepulveda N, Lu J, Aslam D M, . High-performance polycrystalline diamond micro- and nanoresonators. Journal of Microelectromechanical Systems, 2008, 17(2): 473–482
CrossRef Google scholar
[138]
Castelletto S, Rosa L, Blackledge J, . Advances in diamond nanofabrication for ultrasensitive devices. Microsystems & Nanoengineering, 2017, 3(1): 17061
CrossRef Google scholar
[139]
Tao Y, Boss J M, Moores B A, . Single-crystal diamond nanomechanical resonators with quality factors exceeding one million. Nature Communications, 2014, 5(1): 3638
CrossRef Google scholar
[140]
Palko J W, Lee H, Zhang C, . Extreme two-phase cooling from laser-etched diamond and conformal, template-fabricated microporous copper. Advanced Functional Materials, 2017, 27(45): 1703265
CrossRef Google scholar
[141]
Tsao J Y, Chowdhury S, Hollis M A, . Ultrawide-bandgap semiconductors: research opportunities and challenges. Advanced Electronic Materials, 2018, 4(1): 1600501
CrossRef Google scholar
[142]
Kasu M, Ueda K, Ye H, . High RF output power for H-terminated diamond FETs. Diamond and Related Materials, 2006, 15(4–8): 783–786
CrossRef Google scholar
[143]
Pomeroya J, Bernardonia M, Saruaa A, . Achieving the best thermal performance for GaN-on-diamond. IEEE Compound Semiconductor Integrated Circuit Symposium, 2013
[144]
Qi Z N, Zheng Y T, Wei J J, . Surface treatment of an applied novel all-diamond microchannel heat sink for heat transfer performance enhancement. Applied Thermal Engineering, 2020, 177: 115489
CrossRef Google scholar
[145]
Morelli D T, Beetz C P, Perry T A. Thermal conductivity of synthetic diamond films. Journal of Applied Physics, 1988, 64(6): 3063–3066
CrossRef Google scholar
[146]
Wilks J, Wilks E. Properties and Applications of Diamond. Oxford, UK: Butterworth-Heinemann, 1991
[147]
Sood A, Cho J, Hobart K D, . Anisotropic and inhomogeneous thermal conduction in suspended thin-film polycrystalline diamond. Journal of Applied Physics, 2016, 119(17): 175103
CrossRef Google scholar
[148]
Anaya J, Bai T, Wang Y, . Simultaneous determination of the lattice thermal conductivity and grain/grain thermal resistance in polycrystalline diamond. Acta Materialia, 2017, 139: 215–225
CrossRef Google scholar
[149]
Faili F, Huang W, Calvo J, . Disturbed and scattered: the path of thermal conduction through diamond lattice. IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, 2016, 7: 7517675
[150]
Slack G A. Thermal conductivity of pure and impure silicon, silicon carbide, and diamond. Journal of Applied Physics, 1964, 35(12): 3460–3466
CrossRef Google scholar
[151]
Yue D H, Gao Y, Zhao L, . In situ thermal conductivity measurement in diamond anvil cell. Japanese Journal of Applied Physics, 2019, 58(4): 040906
CrossRef Google scholar
[152]
Katcho N A, Carrete J, Li W, . Effect of nitrogen and vacancy defects on the thermal conductivity of diamond: an ab initio Green’s function approach. Physical Review B, 2014, 90(9): 094117
CrossRef Google scholar
[153]
Inyushkin A V, Taldenkov A N, Ralchenko V G, . Thermal conductivity of high purity synthetic single crystal diamonds. Physical Review B, 2018, 97(14): 144305
CrossRef Google scholar
[154]
Sukhadolau A V, Ivakin E V, Ralchenko V G, . Thermal conductivity of CVD diamond at elevated temperatures. Diamond and Related Materials, 2005, 14(3–7): 589–593
CrossRef Google scholar
[155]
Worner E, Pleuler E, Wild C, . Thermal and optical properties of high purity CVD diamond discs doped with boron and nitrogen. Diamond and Related Materials, 2003, 12(3–7): 744–748
CrossRef Google scholar
[156]
Verhoeven H, Flöter A, Reiß H, . Influence of the microstructure on the thermal properties of thin polycrystalline diamond films. Applied Physics Letters, 1997, 71(10): 1329–1331
CrossRef Google scholar
[157]
Morelli D T, Hartnett T M, Robinson C J. Phonon-defect scattering in high thermal conductivity diamond films. Applied Physics Letters, 1991, 59(17): 2112–2114
CrossRef Google scholar
[158]
Faili F, Palmer N, Oh S, . Physical and thermal characterization of CVD diamond: a bottoms-up review. IEEE ITHERM Conference, 2017, 9: 1–7
[159]
Graebner J E, Jin S, Kammlott G W, . Large anisotropic thermal conductivity in synthetic diamond films. Nature, 1992, 359(6394): 401–403
CrossRef Google scholar
[160]
Simon R B, Anaya J, Faili F, . Effect of grain size of polycrystalline diamond on its heat spreading properties. Applied Physics Express, 2016, 9(6): 061302
CrossRef Google scholar
[161]
Sood A, Cheaito R, Bai T, . Direct visualization of thermal conductivity suppression due to enhanced phonon scattering near individual grain boundaries. Nano Letters, 2018, 18(6): 3466–3472
CrossRef Google scholar
[162]
Twitchen D J, Pickles C S J, Coe S E, . Thermal conductivity measurements on CVD diamond. Diamond and Related Materials, 2001, 10(3–7): 731–735
CrossRef Google scholar
[163]
Khomich A V, Ralchenko V G, Vlasov A V, . Effect of high temperature annealing on optical and thermal properties of CVD diamond. Diamond and Related Materials, 2001, 10(3–7): 546–551
CrossRef Google scholar
[164]
Friel I, Geoghegan S L, Twitchen D J, . Development of high quality single crystal diamond for novel laser applications. Proceedings of SPIE, 2010, 7838: 783819
CrossRef Google scholar
[165]
Huszka G, Malpiece N, Naamoun M, . Single crystal diamond gain mirrors for high performance vertical external cavity surface emitting lasers. Diamond and Related Materials, 2020, 104: 107744
CrossRef Google scholar
[166]
Friel I. Optical quality diamond grown by chemical vapor deposition. In: Mildren R, Rabeau J, eds. Optical Engineering of Diamond. Wiley-VCH, 2013
[167]
Dodson J M, Brandon J R, Dhillon H K, . Single crystal and polycrystalline CVD diamond for demanding optical applications. Proceedings of the Society for Photo-Instrumentation Engineers, 2011, 8016: 80160L
CrossRef Google scholar
[168]
Bennett A M, Wickham B J, Dhillon H K, . Development of high-purity optical grade single-crystal CVD diamond for intracavity cooling. Proceedings of the Society for Photo-Instrumentation Engineers, 2014, 8959: 89590R
CrossRef Google scholar
[169]
Liu H Y, Reilly S, Herrnsdorf J, . Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers. Diamond and Related Materials, 2016, 65: 37–41
CrossRef Google scholar
[170]
Parrotta D C, Kemp A J, Dawson M D, . Multiwatt, continuous-wave, tunable diamond Raman laser with intracavity frequency-doubling to the visible region. IEEE Journal of Selected Topics in Quantum Electronics, 2013, 19(4): 1400108
CrossRef Google scholar
[171]
McKay A, Kitzler O, Mildren R P. Simultaneous brightness enhancement and wavelength conversion to the eye-safe region in a high-power diamond Raman laser. Laser & Photonics Reviews, 2014, 8(3): L37–L41
CrossRef Google scholar
[172]
Desjardins K, Pomorski M, Morse J. Ultra-thin optical grade scCVD diamond as X-ray beam position monitor. Journal of Synchrotron Radiation, 2014, 21(6): 1217–1223
CrossRef Google scholar
[173]
Lang A R, Makepeace A P W, Moore M, . On the variation of X-ray diffraction contrast with wavelength: a study with synchrotron radiation. Journal of Applied Crystallography, 1983, 16(1): 113–125
CrossRef Google scholar
[174]
Bennett A. Diamond — a laser engineer’s best friend. Optik & Photonik, 2014, 9(4): 49–52
CrossRef Google scholar
[175]
Pickles C S J, Madgwick T D, Sussmann R S, . Optical performance of chemically vapour-deposited diamond at infrared wavelengths. Diamond and Related Materials, 2000, 9(3–6): 916–920
CrossRef Google scholar
[176]
Woerner E, Wild C, Mueller-Sebert W, . CVD-diamond optical lenses. Diamond and Related Materials, 2001, 10(3–7): 557–560
CrossRef Google scholar
[177]
Yang J X, Duan X F, Lu F X, . The influence of dark feature on optical and thermal property of DC Arc Plasma Jet CVD diamond films. Diamond and Related Materials, 2005, 14(10): 1583–1587
CrossRef Google scholar
[178]
Meykens K, Haenen K, Nesla’dek M, . Measurement and mapping of very low optical absorption of CVD diamond. Diamond and Related Materials, 2000, 9(3–6): 1021–1025
CrossRef Google scholar
[179]
Karlsson M, Nikolajeff F. Diamond micro-optics: microlenses and antireflection structured surfaces for the infrared spectral region. Optics Express, 2003, 11(5): 502–507
CrossRef Google scholar
[180]
Yurov V Y, Bushuev E V, Popovich A F, . Near-infrared refractive index of synthetic single crystal and polycrystalline diamonds at high temperatures. Journal of Applied Physics, 2017, 122(24): 243106
CrossRef Google scholar
[181]
Yamamoto K, Iwasaki H, Tsuji S, . Terahertz time-domain spectroscopy of CVD diamond. IEEE 37th International Conference on Infrared Millimeter and Terahertz Waves, 2012, 9: 6380244
[182]
Zheng Y T, Zhang R, Chen X D, . Doomed couple of diamond with terahertz frequency: hyperfine quality discrimination and complex dielectric responses of diamond in the terahertz waveband. ACS Applied Electronic Materials, 2020, 2(5): 1459–1469
CrossRef Google scholar
[183]
Garin B M, Parshin V V, Myasnikova S E, . Nature of millimeter wave losses in low loss CVD diamonds. Diamond and Related Materials, 2003, 12(10–11): 1755–1759
CrossRef Google scholar
[184]
Yamada H, Meier A, Mazzocchi F, . Dielectric properties of single crystalline diamond wafers with large area at microwave wavelengths. Diamond and Related Materials, 2015, 58: 1–4
CrossRef Google scholar
[185]
Liu Y, Ding M, Su J, . Dielectric properties of nitrogen-doped polycrystalline diamond films in Ka band. Diamond and Related Materials, 2017, 76: 68–73
CrossRef Google scholar
[186]
Lin C N, Lu Y J, Yang X, . Diamond-based all-carbon photodetectors for solar-blind imaging. Advanced Optical Materials, 2018, 6(15): 1800068
CrossRef Google scholar
[187]
Lu Y J, Lin C N, Shan C X. Optoelectronic diamond: growth, properties, and photodetection applications. Advanced Optical Materials, 2018, 6(20): 1800359
CrossRef Google scholar
[188]
Mamin R F, Inushima T. Conductivity in boron-doped diamond. Physical Review B, 2001, 63(3): 033201
CrossRef Google scholar
[189]
Geis M W, Wade T C, Wuorio C H, . Progress toward diamond power field-effect transistors. Physica Status Solidi A: Applications and Materials Science, 2018, 215(22): 1800681
CrossRef Google scholar
[190]
Bogdanov S A, Gorbachev A M, Radishev D B, . Nanometric diamond delta doping with boron. Physica Status Solidi: Rapid Research Letters, 2017, 1: 1600329
[191]
Kawarada H. Hydrogen-terminated diamond surfaces and interfaces. Surface Science Reports, 1996, 26(7): 205–259
CrossRef Google scholar
[192]
Pakes C I, Garrido J A, Kawarada H. Diamond surface conductivity: properties, devices, and sensors. MRS Bulletin, 2014, 39(6): 542–548
CrossRef Google scholar
[193]
Prins J F. n-Type semiconducting diamond by means of oxygen-ion implantation. Physical Review B, 2000, 61(11): 7191–7194
CrossRef Google scholar
[194]
Stenger I, Pinault-Thaury M A, Kociniewski T, . Impurity-to-band activation energy in phosphorus doped diamond. Journal of Applied Physics, 2013, 114(7): 073711
CrossRef Google scholar
[195]
Pinault-Thaury M A, Stenger I, Gillet R, . Attractive electron mobility in (1€1€3) n-type phosphorus-doped homoepitaxial diamond. Carbon, 2021, 175: 254–258
CrossRef Google scholar
[196]
Goss J P, Briddon P R, Jones R, . Donor and acceptor states in diamond. Diamond and Related Materials, 2004, 13(4–8): 684–690
CrossRef Google scholar
[197]
Sakaguchi I, Gamo M N, Kikuchi Y, . Sulfur: a donor dopant for n-type diamond semiconductors. Physical Review B, 1999, 60(4): R2139–R2141
CrossRef Google scholar
[198]
Tang L, Yue R, Wang Y. N-type B–S co-doping and S doping in diamond from first principles. Carbon, 2018, 130: 458–465
CrossRef Google scholar
[199]
Lombardi E B, Mainwood A, Osuch K. Interaction of hydrogen with boron, phosphorus, and sulfur in diamond. Physical Review B, 2004, 70(20): 205201
CrossRef Google scholar
[200]
Goss J P, Briddon P R, Shaw M J. Density functional simulations of silicon-containing point defects in diamond. Physical Review B, 2007, 76(7): 075204
CrossRef Google scholar
[201]
Chernyshev V A, Meijer J, Grambole D, . n-Type diamond produced by MeV lithium implantation in channeling direction. Diamond and Related Materials, 2008, 17(11): 1933–1935
CrossRef Google scholar
[202]
Lombardi E B, Mainwood A, Osuch K. Ab initio study of lithium and sodium in diamond. Physical Review B, 2007, 76(15): 155203
CrossRef Google scholar
[203]
Sque S J, Jones R, Goss J P, . Shallow donors in diamond: chalcogens, pnictogens, and their hydrogen complexes. Physical Review Letters, 2004, 92(1): 017402
CrossRef Google scholar
[204]
Masante C, Pernot J, Marechal A, . High temperature operation of a monolithic bidirectional diamond switch. Diamond and Related Materials, 2021, 111: 108185
CrossRef Google scholar
[205]
Lloret F, Eon D, Bustarret E, . Selectively boron doped homoepitaxial diamond growth for power device applications. Applied Physics Letters, 2021, 118(2): 023504
CrossRef Google scholar
[206]
Achard J, Tallaire A. Diamond wafer technologies for semiconductor device applications. In: Koizumi S, Umezawa H, Pernot J, ., eds. Power Electronics Device Applications of Diamond Semiconductors. Cambridge, UK: Woodhead Publishing, 2018, 1–97
[207]
Pinault-Thaury M A, Temgoua S, Gillet R, . Phosphorus-doped (1€1€3) CVD diamond: A breakthrough towards bipolar diamond devices. Applied Physics Letters, 2019, 114(11): 112106
CrossRef Google scholar
[208]
Khramtsov I A, Fedyanin D Y. Superinjection in diamond p-i-n diodes: bright single-photon electroluminescence of color centers beyond the doping limit. Physical Review Applied, 2019, 12(2): 024013
CrossRef Google scholar
[209]
Udvarhelyi P, Shkolnikov V O, Gali A, . Spin–strain interaction in nitrogen-vacancy centers in diamond. Physical Review B, 2018, 98(7): 075201
CrossRef Google scholar
[210]
Pernot J, Volpe P N, Omnès F, . Hall hole mobility in boron-doped homoepitaxial diamond. Physical Review B, 2010, 81(20): 205203
CrossRef Google scholar
[211]
Yamasaki S, Gheeraert E, Koide Y. Doping and interface of homoepitaxial diamond for electronic applications. MRS Bulletin, 2014, 39(6): 499–503
CrossRef Google scholar
[212]
Jena D, Mishra U K. Effect of scattering by strain fields surrounding edge dislocations on electron transport in two-dimensional electron gases. Applied Physics Letters, 2002, 80(1): 64–66
CrossRef Google scholar
[213]
Klein O, Mayr M, Fischer M, . Propagation and annihilation of threading dislocations during off-axis growth of heteroepitaxial diamond films. Diamond and Related Materials, 2016, 65: 53–58
CrossRef Google scholar
[214]
Schreck M, Ščajev P, Träger M, . Charge carrier trapping by dislocations in single crystal diamond. Journal of Applied Physics, 2020, 127(12): 125102
CrossRef Google scholar
[215]
Nebel C E, Munz J, Stutzmann M, . Electronic properties of CVD and synthetic diamond. Physical Review B, 1997, 55(15): 9786–9791
CrossRef Google scholar
[216]
Secroun A, Brinza O, Tardieu A, . Dislocation imaging for electronics application crystal selection. Physica Status Solidi A: Applications and Materials Science, 2007, 204(12): 4298–4304
CrossRef Google scholar
[217]
Reznik A, Uzan-Saguy C, Kalish R. Effects of point defects on the electrical properties of doped diamond. Diamond and Related Materials, 2000, 9(3–6): 1051–1056
CrossRef Google scholar
[218]
Kalish R, Uzan-Saguy C, Philosoph B, . Loss of electrical conductivity in boron-doped diamond due to ion-induced damage. Applied Physics Letters, 1997, 70(8): 999–1001
CrossRef Google scholar
[219]
Lohstroh A, Sellin P J, Wang S G, . Effect of dislocations on charge carrier mobility–lifetime product in synthetic single crystal diamond. Applied Physics Letters, 2007, 90(10): 102111
CrossRef Google scholar
[220]
Umezawa H. Recent advances in diamond power semiconductor devices. Materials Science in Semiconductor Processing, 2018, 78: 147–156
CrossRef Google scholar
[221]
Umezawa H, Saito T, Tokuda N, . Leakage current analysis of diamond Schottky barrier diode. Applied Physics Letters, 2007, 90(7): 073506
CrossRef Google scholar
[222]
Kasu M, Kubovic M, Aleksov A, . Influence of epitaxy on the surface conduction of diamond film. Diamond and Related Materials, 2004, 13(2): 226–232
CrossRef Google scholar
[223]
Ristein J, Riedel M, Maier F, . Surface conductivity of diamond as a function of nitrogen doping. Physica Status Solidi A: Applied Research, 2001, 186(2): 249–256
CrossRef Google scholar
[224]
Pan L S, Kania D R, Han S, . Electrical transport-properties of undoped CVD diamond films. Science, 1992, 255(5046): 830–833
CrossRef Google scholar
[225]
Mokuno Y, Kato Y, Tsubouchi N, . A nitrogen doped low-dislocation density free-standing single crystal diamond plate fabricated by a lift-off process. Applied Physics Letters, 2014, 104(25): 252109
CrossRef Google scholar
[226]
Boussadi A, Tallaire A, Kasu M, . Reduction of dislocation densities in single crystal CVD diamond by confinement in the lateral sector. Diamond and Related Materials, 2018, 83: 162–169
CrossRef Google scholar
[227]
Martineau P M, Gaukroger M P, Guy K B, . High crystalline quality single crystal chemical vapour deposition diamond. Journal of Physics: Condensed Matter, 2009, 21(36): 364205
CrossRef Google scholar
[228]
Tallaire A, Brinza O, Mille V, . Reduction of dislocations in single crystal diamond by lateral growth over a macroscopic hole. Advanced Materials, 2017, 29(16): 1604823
CrossRef Google scholar
[229]
Markham M L, Dodson J M, Scarsbrook G A, . CVD diamond for spintronics. Diamond and Related Materials, 2011, 20(2): 134–139
CrossRef Google scholar
[230]
Balducci A, Marinelli M, Milani E, . Distribution of electrically active defects in chemical vapor deposition diamond: model and measurement. Applied Physics Letters, 2005, 86(2): 022108
CrossRef Google scholar
[231]
Schreck M, Gsell S, Brescia R, . Ion bombardment induced buried lateral growth: the key mechanism for the synthesis of single crystal diamond wafers. Scientific Reports, 2017, 7(1): 44462
CrossRef Google scholar
[232]
Yamada H, Chayahara A, Mokuno Y, . Uniform growth and repeatable fabrication of inch-sized wafers of a single-crystal diamond. Diamond and Related Materials, 2013, 33: 27–31
CrossRef Google scholar
[233]
Naamoun M, Tallaire A, Doppelt P, . Reduction of dislocation densities in single crystal CVD diamond by using self-assembled metallic masks. Diamond and Related Materials, 2015, 58: 62–68
CrossRef Google scholar
[234]
Ichikawa K, Kurone K, Kodama H, . High crystalline quality heteroepitaxial diamond using grid-patterned nucleation and growth on Ir. Diamond and Related Materials, 2019, 94: 92–100
CrossRef Google scholar
[235]
Aida H, Ikejiri K, Kim S, . Overgrowth of diamond layers on diamond microneedles: new concept for freestanding diamond substrate by heteroepitaxy. Diamond and Related Materials, 2016, 66: 77–82
CrossRef Google scholar
[236]
Service R F. Diamond feats give quantum computing a solid boost. Science, 2010, 329(5992): 616–617
CrossRef Google scholar
[237]
Dong Y, Xu J Y, Zhang S C, . Composite-pulse enhanced room-temperature diamond magnetometry. Functional Diamond, 2021, 1(1): 125–134
CrossRef Google scholar
[238]
Orwa J O, Santori C, Fu K M C, . Engineering of nitrogen-vacancy color centers in high purity diamond by ion implantation and annealing. Journal of Applied Physics, 2011, 109(8): 083530
CrossRef Google scholar
[239]
Smits J, Damron J T, Kehayias P, . Two-dimensional nuclear magnetic resonance spectroscopy with a microfluidic diamond quantum sensor. Science Advances, 2019, 5(7): eaaw7895
CrossRef Google scholar
[240]
Hamlin J J, Zhou B B. Extreme diamond-based quantum sensors. Science, 2019, 366(6471): 1312–1313
CrossRef Google scholar
[241]
Bucher D B, Craik D P L A, Backlund M P, . Quantum diamond spectrometer for nanoscale NMR and ESR spectroscopy. Nature Protocols, 2019, 14(9): 2707–2747
CrossRef Google scholar
[242]
Sangtawesin S, Brundage T O, Atkins Z J, . Highly tunable formation of nitrogen-vacancy centers via ion implantation. Applied Physics Letters, 2014, 105(6): 063107
CrossRef Google scholar
[243]
Doherty M W, Manson N B, Delaney P, . The nitrogen-vacancy colour centre in diamond. Physics Reports, 2013, 528(1): 1–45
CrossRef Google scholar
[244]
Razinkovas L, Doherty M W, Manson N B, . Vibrational and vibronic structure of isolated point defects: the nitrogen-vacancy center in diamond. Physical Review B, 2021, 104(4): 045303
CrossRef Google scholar
[245]
Siyushev P, Nesladek M, Bourgeois E, . Photoelectrical imaging and coherent spin-state readout of single nitrogen-vacancy centers in diamond. Science, 2019, 363(6428): 728–731
CrossRef Google scholar
[246]
Hensen B, Bernien H, Dre’au A E, . Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres. Nature, 2015, 526(7575): 682–686
CrossRef Google scholar
[247]
Shi F Z, Zhang Q, Wang P F, . Single-protein spin resonance spectroscopy under ambient conditions. Science, 2015, 347(6226): 1135–1138
CrossRef Google scholar
[248]
Bradley C E, Randall J, Abobeih M H, . A ten-qubit solid-state spin register with quantum memory up to one minute. Physical Review X, 2019, 9(3): 031045
CrossRef Google scholar
[249]
Li R, Kong F, Zhao P J, . Nanoscale electrometry based on a magnetic-field-resistant spin sensor. Physical Review Letters, 2020, 124(24): 247701
CrossRef Google scholar
[250]
Atatüre M, Englund D, Vamivakas N, . Material platforms for spin-based photonic quantum technologies. Nature Reviews: Materials, 2018, 3(5): 38–51
CrossRef Google scholar
[251]
Bradac C, Gao W B, Forneris J, . Quantum nanophotonics with group IV defects in diamond. Nature Communications, 2019, 10: 5625
CrossRef Google scholar
[252]
Zaitsev A M. Vibronic spectra of impurity-related optical centers in diamond. Physical Review B, 2000, 61(19): 12909–12922
CrossRef Google scholar
[253]
Kennedy T A, Colton J S, Butler J E, . Long coherence times at 300 K for nitrogen-vacancy center spins in diamond grown by chemical vapor deposition. Applied Physics Letters, 2003, 83(20): 4190–4192
CrossRef Google scholar
[254]
Gaebel T, Domhan M, Popa I, . Room-temperature coherent coupling of single spins in diamond. Nature Physics, 2006, 2(6): 408–413
CrossRef Google scholar
[255]
Balasubramanian G, Neumann P, Twitchen D, . Ultralong spin coherence time in isotopically engineered diamond. Nature Materials, 2009, 8(5): 383–387
CrossRef Google scholar
[256]
Dolde F, Jakobi I, Naydenov B, . Room-temperature entanglement between single defect spins in diamond. Nature Physics, 2013, 9(3): 139–143
CrossRef Google scholar
[257]
Aharonovich I, Greentree A D, Prawer S. Diamond photonics. Nature Photonics, 2011, 5(7): 397–405
CrossRef Google scholar
[258]
Teraji T. Ultrapure homoepitaxial diamond films grown by chemical vapor deposition for quantum device application. Semiconductors and Semimetals, 2020, 103: 37–55
CrossRef Google scholar
[259]
Achard J, Jacques V, Tallaire A. Chemical vapour deposition diamond single crystals with nitrogen-vacancy centres: a review of material synthesis and technology for quantum sensing applications. Journal of Physics D: Applied Physics, 2020, 53(31): 313001
CrossRef Google scholar
[260]
Lenzini F, Gruhler N, Walter N, . Diamond as a platform for integrated quantum photonics. Advanced Quantum Technologies, 2018, 1(3): 1800061
CrossRef Google scholar
[261]
Faraon A, Barclay P E, Santori C, . Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity. Nature Photonics, 2011, 5(5): 301–305
CrossRef Google scholar
[262]
Hausmann B J M, Shields B J, Quan Q, . Coupling of NV centers to photonic crystal nanobeams in diamond. Nano Letters, 2013, 13(12): 5791–5796
CrossRef Google scholar
[263]
Riedel D, Söllner I, Shields B J, . Deterministic enhancement of coherent photon generation from a nitrogen-vacancy center in ultrapure diamond. Physical Review X, 2017, 7(3): 031040
CrossRef Google scholar
[264]
Hoinkis M, Weber E R, Landstrass M I, . Paramagnetic nitrogen in chemical vapor deposition diamond thin films. Applied Physics Letters, 1991, 59(15): 1870–1871
CrossRef Google scholar
[265]
Lühmann T, Raatz N, John R, . Screening and engineering of colour centres in diamond. Journal of Physics D: Applied Physics, 2018, 51(48): 483002
CrossRef Google scholar
[266]
Yamamoto T, Umeda T, Watanabe K, . Extending spin coherence times of diamond qubits by high-temperature annealing. Physical Review B, 2013, 88(7): 075206
CrossRef Google scholar
[267]
Lobaev M A, Gorbachev A M, Bogdanov S A, . Influence of CVD diamond growth conditions on nitrogen incorporation. Diamond and Related Materials, 2017, 72: 1–6
CrossRef Google scholar
[268]
Mi S, Kiss M, Graziosi T, . Integrated photonic devices in single crystal diamond. Journal of Physics: Photonics, 2020, 2(4): 042001
CrossRef Google scholar
[269]
Bogdanov S A, Gorbachev A M, Radishev D B, . Investigation of high-density nitrogen vacancy center ensembles created in electron-irradiated and vacuum-annealed delta-doped layers. Physica Status Solidi: Rapid Research Letters, 2021, 15(2): 2000550
CrossRef Google scholar
[270]
Stephen C J, Green B L, Lekhai Y N D, . Deep three-dimensional solid-state qubit arrays with long-lived spin coherence. Physical Review Applied, 2019, 12(6): 064005
CrossRef Google scholar
[271]
Achard J, Silva F, Brinza O, . Coupled effect of nitrogen addition and surface temperature on the morphology and the kinetics of thick CVD diamond single crystals. Diamond and Related Materials, 2007, 16(4–7): 685–689
CrossRef Google scholar
[272]
Kalish R. Ion implantation in diamond for quantum information processing (QIP): doping and damaging. In: Prawer S, Aharonovich I, eds. Quantum Information Processing with Diamond: Principles and Applications. 1st ed. Cambridge, UK: Woodhead Publishing, 2014, 36–67
[273]
Rabeau J R, Reichart P, Tamanyan G, . Implantation of labeled single nitrogen vacancy centers in diamond using 15N. Applied Physics Letters, 2006, 88(2): 023113
CrossRef Google scholar
[274]
Meijer J, Burchard B, Domhan M, . Generation of single color centers by focused nitrogen implantation. Applied Physics Letters, 2005, 87(26): 261909
CrossRef Google scholar
[275]
Lühmann T, John R, Wunderlich R, . Coulomb-driven single defect engineering for scalable qubits and spin sensors in diamond. Nature Communications, 2019, 10(1): 4956
CrossRef Google scholar
[276]
de Oliveira F F, Antonov D, Wang Y, . Tailoring spin defects in diamond by lattice charging. Nature Communications, 2017, 8: 15409
CrossRef Google scholar
[277]
Osterkamp C, Scharpf J, Pezzagna S, . Increasing the creation yield of shallow single defects in diamond by surface plasma treatment. Applied Physics Letters, 2013, 103(19): 193118
CrossRef Google scholar
[278]
Reichart P, Datzmann G, Hauptner A, . Three-dimensional hydrogen microscopy in diamond. Science, 2004, 306(5701): 1537–1540
CrossRef Google scholar
[279]
Czelej K, Zemła M R, Spiewak P, . Quantum behavior of hydrogen-vacancy complexes in diamond. Physical Review B, 2018, 98(23): 235111
CrossRef Google scholar
[280]
Herbschleb E D, Kato H, Maruyama Y, . Ultra-long coherence times amongst room-temperature solid-state spins. Nature Communications, 2019, 10(1): 3766
CrossRef Google scholar
[281]
Dreau A, Maze J R, Lesik M, . High-resolution spectroscopy of single NV defects coupled with nearby 13C nuclear spins in diamond. Physical Review B, 2012, 85(13): 134107
CrossRef Google scholar
[282]
Mizuochi N, Neumann P, Rempp F, . Coherence of single spins coupled to a nuclear spin bath of varying density. Physical Review B, 2009, 80(4): 041201
CrossRef Google scholar
[283]
Zheng Y T, Li C M, Liu J L, . Diamond with nitrogen: states, control, and applications. Functional Diamond, 2021, 1(1): 63–82
CrossRef Google scholar
[284]
Markham M, Twitchen D. The diamond quantum revolution. Physics World, 2020, 33(4): 39–43
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Acknowledgements

This work was supported by the National Key Research and Development Program of China (Grant No. 2016YFE0133200), the European Union’s Horizon 2020 Research and Innovation Staff Exchange Scheme (Grant No. 734578), the Post-doctor Research Foundation of Shunde Graduate School of University of Science and Technology Beijing (Grant No. 2021BH006), the National Natural Science Foundation of China (Grant No. 52172037), the Beijing Municipal Natural Science Foundation (Grant Nos. 2212036 and 4192038), the Fundamental Research Funds for the Central Universities (FRF-MP-20-49Z), and the Science and Technology Innovation Special Project of Foshan Government (Grant Nos. BK20BE021 and BK21BE004). Special thanks to the Guangdong Basic and Applied Basic Research Foundation (Grant No. 2021A1515110631) and the national high-level-university sponsored graduate program of China Scholarship Council (CSC No. 201806460089), USTB-Monte Biance Joint R&D Center.

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