Semiconductor metal oxide compounds based gas sensors: A literature review
Sunil Jagannath PATIL, Arun Vithal PATIL, Chandrakant Govindrao DIGHAVKAR, Kashinath Shravan THAKARE, Ratan Yadav BORASE, Sachin Jayaram NANDRE, Nishad Gopal DESHPANDE, Rajendra Ramdas AHIRE
Semiconductor metal oxide compounds based gas sensors: A literature review
This paper gives a statistical view about important contributions and advances on semiconductor metal oxide (SMO) compounds based gas sensors developed to detect the air pollutants such as liquefied petroleum gas (LPG), H2S, NH3, CO2, acetone, ethanol, other volatile compounds and hazardous gases. Moreover, it is revealed that the alloy/composite made up of SMO gas sensors show better gas response than their counterpart single component gas sensors, i.e., they are found to enhance the 4S characteristics namely speed, sensitivity, selectivity and stability. Improvement of such types of sensors used for detection of various air pollutants, which are reported in last two decades, is highlighted herein.
gas sensor / semiconductor metal oxide (SMO) / sensitivity / air pollutant / gas response
[1] |
Kuwabara M, Ide T. CO gas sensitivity in porous semiconducting barium–titanate ceramics. American Ceramic Society Bulletin, 1987, 66(9): 1401–1405
|
[2] |
Chiu C M, Chang Y H. The structure, electrical and sensing properties for CO of the La0.8Sr0.2Co1-xNixO3-δ system. Materials Science and Engineering A, 1999, 266(1–2): 93–98
|
[3] |
Patil D R. Everyman’s Science, 2011, XLVI(3): 155
|
[4] |
Azad A M, Akbar S A, Mhaisalkar S G,
|
[5] |
Moseley P T. Material and Mechanism in Semiconducting Gas Sensor, Sensor Technology, System and Application. IOP Publishing, 1990
|
[6] |
Joseph B, Gopchandran K G, Manoj P K,
|
[7] |
Dayan N J, Sainkar S R, Karekar R N,
|
[8] |
Krishnan B, Nampoori V P N. Screen printed nanosized ZnO thick film. Bulletin of Materials Science, 2005, 28(3): 239–242
|
[9] |
Licari J J, Enlow L R. Hybrid Microcircuit Technology Handbook. 2nd ed. Park Ridge, NJ, USA: Noyes Publications, 1998
|
[10] |
Patil A V, Dighavkar C G, Borse R Y. NO2 gas sensing properties of screen printed ZnO thick films. Sensors & Transducers Journal, 2009, 101(2): 96–103
|
[11] |
Moseley P T, Williams D E, Norris J O W,
|
[12] |
Moseley P T, Williams D E. A selective ammonia sensor. Sensors and Actuators B: Chemical, 1990, 1(1–6): 113–115
|
[13] |
Moseley P T. Materials selection for semiconductor gas sensors. Sensors and Actuators B: Chemical, 1992, 6(1–3): 149–156
|
[14] |
Matsuura S. New developments and applications of gas sensors in Japan. Sensors and Actuators B: Chemical, 1993, 13(1–3): 7–11
|
[15] |
Bernasik A, Radecka M, Rekas M,
|
[16] |
Tang H, Prasad K, Sanjines R,
|
[17] |
Mizsei J. How can sensitive and selective semiconductor gas sensors be made? Sensors and Actuators B: Chemical, 1995, 23(2–3): 173–176
|
[18] |
Ferroni M, Guidi V, Martinelli G,
|
[19] |
Lin H M, Keng C H, Tung C Y. Gas-sensing properties of nanocrystalline TiO2. Nanostructured Materials, 1997, 9(1–8): 747–750
|
[20] |
Zakrzewska K, Radecka M, Rekas M. Effect of Nb, Cr, Sn additions on gas sensing properties of TiO2 thin films. Thin Solid Films, 1997, 310(1–2): 161–166
|
[21] |
Sharma R K, Bhatnagar M C, Sharma G L. Mechanism of highly sensitive and fast response Cr doped TiO2 oxygen gas sensor. Sensors and Actuators B: Chemical, 1997, 45(3): 209–215
|
[22] |
Sharma R K, Bhatnagar M C. Improvement of the oxygen gas sensitivity in doped TiO2 thick films. Sensors and Actuators B: Chemical, 1999, 56(3): 215–219
|
[23] |
Jayaraman V, Gnanasekar K I, Prabhu E,
|
[24] |
Carotta M C, Ferroni M, Gnani D,
|
[25] |
Yamada Y, Seno Y, Masuoka Y,
|
[26] |
Ferroni M, Carotta M C, Guidi V,
|
[27] |
Gao L, Li Q, Song Z,
|
[28] |
Rothschild A, Edelman F, Komem Y,
|
[29] |
Sberveglieri G, Comini E, Faglia G,
|
[30] |
Wang Y D, Chen Z X, Li Y F,
|
[31] |
Savage N O, Akbar S A, Dutta P K. Titanium dioxide based high temperature carbon monoxide selective sensor. Sensors and Actuators B: Chemical, 2001, 72(3): 239–248
|
[32] |
Savage N O, Chwieroth B, Ginwalla A,
|
[33] |
Jiao Z, Chen F, Su R,
|
[34] |
Guidi V, Butturi M A, Carotta M C,
|
[35] |
Li Y, Wlodarski W, Galatsis K,
|
[36] |
Karunagaran B, Kumar R T R, Mangalaraj D,
|
[37] |
Arbiol J, Cerda J, Dezanneau G,
|
[38] |
Ruiz A M, Sakai G, Cornet A,
|
[39] |
Shaw G A, Parkin I P, Williams D E. Atmospheric pressure chemical vapour deposition of Cr2-xTixO3 (CTO) thin films (≤ 3 mμm) on to gas sensing substrates. Journal of Materials Chemistry, 2003, 13(12): 2957–2962
|
[40] |
Fergus J W. Doping and defect association in oxides for use in oxygen sensors. Journal of Materials Science, 2003, 38(21): 4259–4270
|
[41] |
Li W, Ni C, Lin H,
|
[42] |
Baraton M I, Merhari L. Surface chemistry of TiO2 nanoparticles: influence on electrical and gas sensing properties. Journal of the European Ceramic Society, 2004, 24(6): 1399–1404
|
[43] |
Tamaki J, Miyaji A, Makinodan J,
|
[44] |
Obida M Z, Afify H H, Abou-Helal M O,
|
[45] |
San Andres E, Lique M T, Prado A D,
|
[46] |
Patil S A, Patil L A. Surface modified TTO thick film resistors for NH3 gas sensing. Sensors & Transducers Journal, 2006, 71(9): 721–728
|
[47] |
Patil D R, Patil L A, Jain G H,
|
[48] |
Kagata M, Abe Y. CARTS USA, 2006, 3
|
[49] |
Jain G H, Patil L A. Gas sensing properties of Cu and Cr activated BST thick films. Bulletin of Materials Science, 2006, 29(4): 403–411
|
[50] |
Chaudhari G N, Bambole D R, Bodade A B,
|
[51] |
Wagh M S, Jain G H, Patil D R,
|
[52] |
Viricelle J P, Pijolat C, Riviere B,
|
[53] |
Maso N, Beltran H, Cordoncillo E,
|
[54] |
Khadayate R S, Sali J V, Patil P P. Acetone vapor sensing properties of screen printed WO3 thick films. Talanta, 2007, 72(3): 1077–1081
|
[55] |
Khadayate R S, Waghulde R B, Wankhede M G,
|
[56] |
Jain G H, Patil L A, Patil P P,
|
[57] |
Al-Homoudi I A, Thakur J S, Naik R,
|
[58] |
Alessandri I, Comini E, Bontempi E,
|
[59] |
Kadu A V, Gedam N N, Chaudhari G N. Detection of hydrogen sulphide gas sensor based nanostructured Ba2CrMoO6 thick films. Sensors & Transducers Journal, 2007, 85(11): 1728–1738
|
[60] |
Fang X, Oh J T. Microstructure and electrical properties of Nb2O5 doped titanium dioxide. Materials Science and Engineering B, 2007, 136(1): 15–19
|
[61] |
Sonawane N B, Patil D R, Patil L A. CuO-modified WO3 sensor for the detection of a ppm level H2S gas at room temperature. Sensors & Transducers Journal, 2008, 93(6): 82–91
|
[62] |
Joshi A, Gangal S A, Padma N,
|
[63] |
Baviskar H M, Deo V V, Patil D R,
|
[64] |
More A M, Gunjakar J L, Lokhande C D. Liquefied petroleum gas (LPG) sensor properties of interconnected web-like structured sprayed TiO2 films. Sensors and Actuators B: Chemical, 2008, 129(2): 671–677
|
[65] |
Dighavkar C G, Patil A V, Borse R Y,
|
[66] |
Patil A V, Dighavkar C G, Sonawane S K,
|
[67] |
Dighavkar C G, Patil A V, Patil S J,
|
[68] |
Dighavkar C G, Patil A V, Patil S J,
|
[69] |
Patil A V, Dighavkar C G, Sonawane S K,
|
[70] |
Kumar V, Srivastava S K, Jain K. Cobalt doped SnO2 thick film gas sensors: conductance and gas response characteristics for LPG and CNG gas. Sensors & Transducers Journal, 2009, 101(2): 60–72
|
[71] |
Patil A V, Dighavkar C G, Borse R Y. NO2 gas sensing properties of screen printed ZnO thick films. Sensors & Transducers Journal, 2009, 101(2): 96–103
|
[72] |
Dighavkar C G, Patil A V, Patil S J,
|
[73] |
Patil A V, Dighavkar C G, Sonawane S K,
|
[74] |
Khadayate R S, Patil P P. Invertis Journal of Science & Technology, 2010, 3(3): 194
|
[75] |
Abadi M H S, Hamidon M N, Shaari A H,
|
[76] |
Khadayate R S, Patil P P. CO gas sensing properties of screen printed SnO2 thick films. Journal of Optoelectronics and Advanced Materials, 2010, 12(6): 1338–1342
|
[77] |
Dighavkar C G, Patil A V, Patil S J,
|
[78] |
Dighavkar C, Patil A, Patil S,
|
[79] |
Gaikwad V B, Patil R L, Deore M K,
|
[80] |
Patil A V, Dighavkar C G, Sonawane S K,
|
[81] |
Deore M K, Gaikwad V B, Pawar N K,
|
[82] |
Patil G E, Kajale D D, Shinde S D,
|
[83] |
Wang C, Yin L, Zhang L,
|
[84] |
Patil A V, Dighavkar C G, Sonawane S K,
|
[85] |
Chaudhari R M, Gaikwad V B, Hire P D,
|
[86] |
Chavan D N, Gaikwad V B, Patil G E,
|
[87] |
Shelke P N, Jadkar S R, Khollam Y B,
|
[88] |
Rao M C, Hussain O M. Research Journal of Chemical Sciences, 2011, 1(7): 76
|
[89] |
Ahire D V, Shinde S D, Patil G E,
|
[90] |
Deshmukh S B, Bari R H, Patil G E,
|
[91] |
Dunnill C W, Noimark S, Parkin I P. Silver loaded WO3-x/TiO2 composite multifunctional thin films. Thin Solid Films, 2012, 520(17): 5516–5520
|
[92] |
Pawar N K, Kajale D D, Patil G E,
|
[93] |
Iftimie N, Crisan M, Braileanu A,
|
[94] |
Sahay P P, Nath R K. Al-doped zinc oxide thin films for liquid petroleum gas (LPG) sensors. Sensors and Actuators B: Chemical, 2008, 133(1): 222–227
|
[95] |
Satyanarayana L, Reddy K M, Manorama S V. Synthesis of nanocrystalline Ni1-xCoxMnxFe2-xO4: a material for liquefied petroleum gas sensing. Sensors and Actuators B: Chemical, 2003, 89(1–2): 62–67
|
[96] |
Patil D R, Patil L A. Cr2O3-modified ZnO thick film resistors as LPG sensors. Talanta, 2009, 77(4): 1409–1414
|
[97] |
Chaudhari G N. LPG-sensing properties of perovskite BiFe0.6Mn0.4O3 nanomaterials. Journal of Optoelectronics and Advanced Materials, 2007, 9(7): 2270–2274
|
[98] |
Mitra P, Mondal S. Hydrogen and LPG sensing properties of SnO2 films obtained by direct oxidation of SILAR deposited SnS. Bulletin of the Polish Academy of Sciences-Technical Sciences, 2008, 56(3): 295–300
|
[99] |
Garje A D, Aiyer R C. Effect of decomposition temperature on electrical and gas sensing properties of nano SnO2 based thick film resistors. Sensors Letters, 2006, 4(4): 380–387
|
[100] |
Jain K, Pant R P, Lakshmikumar S T. Effect of Ni doping on thick film SnO2 gas sensor. Sensors and Actuators B: Chemical, 2006, 113(2): 823–829
|
[101] |
Srivastava A, Jain K, Rashmi,
|
[102] |
Shrivastava A, Rashmi, Jain K. Study on ZnO-doped tin oxide thick film gas sensors. Materials Chemistry and Physics, 2007, 105(2–3): 385–390
|
[103] |
Inamdar A D, Aiyer R C. Asian Journal of Physics, 2005, 9(1): 1
|
[104] |
Niranjan R S, Mulla I S, Vijayamohanan K. National Seminar on Physics and Technology of Sensors (NSPTS), Pune, India, 2004
|
[105] |
Tudorache F, Rezlescu E, Popa P D,
|
[106] |
Raju A R, Rao C N. Gas-sensing characteristics of ZnO and copper-impregnated ZnO. Sensors and Actuators B: Chemical, 1991, 3(4): 305–310
|
[107] |
Jain G H, Patil L A, Wagh M S,
|
[108] |
Kersen U. Gas sensing properties of nanocrystalline metal oxide powders produced by thermal decomposition and mechanochemical processing. Dissertation for the Doctoral Degree. Otaniemi, Espoo, Finland: Helsinki University of Technology, 2003
|
[109] |
Rumyantseva M, Labeau M, Delabouglise G,
|
[110] |
Saraladevi G, Rao S M V J. Journal of the Electrochemical Society, 1995, 142: 8
|
[111] |
Tamaki J, Maekawa T, Miura N,
|
[112] |
Patil L A, Patil D R. Heterocontact type CuO-modified SnO2 sensor for the detection of a ppm level H2S gas at room temperature. Sensors and Actuators B: Chemical, 2006, 120(1): 316–323
|
[113] |
Chowdhuri A, Gupta V, Sreenivas K,
|
[114] |
Wu Y, Tong M, He X,
|
[115] |
Katti V R, Debnath A K, Muthe K P,
|
[116] |
Patil L A, Pathan I G. Journal of Nano- and Electronic Physics, 2011, 3(1): 433
|
[117] |
Xu C N, Miura N, Ishida Y,
|
[118] |
Patil D R, Patil L A. Preparation and study of NH3 gas sensing behavior of Fe2O3 doped ZnO thick film resistors. Sensors & Transducers Journal, 2006, 70(8): 661–670
|
[119] |
Ishihara T, Kometani K, Mizuhara Y,
|
[120] |
Miura N, Yan Y, Sato M,
|
[121] |
Imanaka N, Murata T, Kawasato T,
|
[122] |
Telipan G, Ignat M, Vlad A,
|
[123] |
Chaudhari G N, Pawar M J. Ethanol sensing performances of modified CoFe2O4 nanocrystals prepared by polymerizable complex route. Journal of Optoelectronics and Advanced Materials, 2008, 10(10): 2574–2577
|
[124] |
Patil D R, Patil L A, Amalnerkar D P. Ethanol gas sensing properties of Al2O3-doped ZnO thick film resistors. Bulletin of Materials Science, 2007, 30(6): 553–559
|
[125] |
Ivanov P T. Design, fabrication and characterization of thick film gas sensors. Dissertation for the Doctoral Degree. Tarragona, Spain: Rovira i Virgili University, 2004
|
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