Effect of electrochemical etching current on prepared perforated silicon structures for neutron detectors

Abstract

Neutron detector based on perforated silicon structures backfilled with neutron converting materials could be operated at a low voltage and improves the detection efficiency of thermal neutron. It is found that the intrinsic detection efficiency of thermal neutron is affected by a lot of factors such as the geometry, size, and depth of the perforation and so on. In this study, the perforated silicon was prepared by electrochemical etching. Effect of etching current on geometry, size, and depth of the perforated silicon structures for neutron detectors was also reported.

Keywords

neutron detector / silicon / electrochemical etching / current