Oxidation phase growth diagram of vanadium oxides film fabricated by rapid thermal annealing

Abstract

Thermal evaporation deposited vanadium oxide films were annealed in air by rapid thermal annealing (RTP). By adjusting the annealing temperature and time, a series of vanadium oxide films with various oxidation phases and surface morphologies were fabricated, and an oxidation phase growth diagram was established. It was observed that different oxidation phases appear at a limited and continuous annealing condition range, and the morphologic changes are related to the oxidation process.

Keywords

vanadium oxides (VO_x) / rapid thermal annealing (RTA) / phase growth diagram

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Acknowledgements

The authors are grateful to the financial support from the National Natural Science Foundation of China (Grant Nos. 10675070, 10575061 and 50701026), and the National Basic Research Program of China (973 Program, 2007CB936601).

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2014 Higher Education Press and Springer-Verlag Berlin Heidelberg