Preparation of V₂O₅ thin film and its optical characteristics

Abstract

A two-step method was proposed to synthesize V₂O₅ films on planar substrates, i.e., depositing a V₂O₃ thin film at ~160°C (by heating a pure sheet of vanadium in a rough vacuum) and then heat-treating it in air at ~600°C. The films, made up of nano crystal particles, had good photoluminescence (PL) properties, and the peak was in the position of about 700 nm. Further, photosensitivity characteristics of these V₂O₅ thin films were investigated at room temperature. The results show that this film is sensitive to ultraviolet rays, which indicates good potential application for an ultraviolet photo detector (UVPD).

Keywords

vanadium oxides / thin films / photoluminescence / photosensitive

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