Influence of deposition temperature on the structure and optical properties of HfO thin films

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Front. Mater. Sci. ›› 2008, Vol. 2 ›› Issue (4) : 381-385. DOI: 10.1007/s11706-008-0066-9

Influence of deposition temperature on the structure and optical properties of HfO thin films

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{{article.zuoZheEn_L}}. {{article.titleEn}}. Front. Mater. Sci., 2008, 2(4): 381‒385 https://doi.org/10.1007/s11706-008-0066-9

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