DFB LD manufactured by nanoimprint lithography

doi:10.1007/s12200-010-0005-0

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Front. Optoelectron. ›› 2010, Vol. 3 ›› Issue (2) : 194-197. DOI: 10.1007/s12200-010-0005-0

Research articles

DFB LD manufactured by nanoimprint lithography

Lei WANG¹,Yiwen ZHANG¹,Fei QIU¹,Zhimou XU¹,Yanli ZHAO¹,Yonglin YU¹,Ning ZHOU²,Dingli WANG²,Wen LIU³,

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Abstract

Gratings of distributed feedback laser diodes (DFB LDs) have been successfully manufactured by nanoimprint lithography (NIL). Uniform gratings with periods of about 240 nm and phase-shifted in the center have been fabricated by a soft press NIL employing a polymer stamp technology. Moreover, the shape of the grating is rectangle, rather than sinusoidal by holography. The test results show good characteristics of the electrical and spectral output. The results of this study indicate that NIL has high potential for the manufacture of DFB LDs.

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Lei WANG, Yiwen ZHANG, Fei QIU, Zhimou XU, Yanli ZHAO, Yonglin YU, Ning ZHOU, Dingli WANG, Wen LIU,. DFB LD manufactured by nanoimprint lithography. Front. Optoelectron., 2010, 3(2): 194‒197 https://doi.org/10.1007/s12200-010-0005-0