Design of objective lens with reflective spherical Fresnel zone plate

Abstract

An objective lens composed of a spherical Fresnel zone plate mirror and aspheric mirrors is designed. The Fresnel zone plate with a spherical shape is analyzed, and the method to approximately replace the aspherical mirror with spherical Fresnel zone plate is deduced. The objective lens is designed with a single spherical Fresnel zone plate mirror and three aspherical mirrors. Under the condition of 100 × magnification, 2.5 Fresnel number and 120° field angle, the modulation transfer function can reach above 40% at 0.6 line pairs/mm on the magnification side, and the distortion is less than 2.2%. This method can provide a reference for the application of Fresnel zone plate in visible light imaging, and has a bright future with the continuous development of the fabrication technique of Fresnel devices.

References

1. Schuster N, Schonheit T . Telecentric large field lensesusing Fresnel optics. Proceedings of SPIE, 2002, 4567: 190–198. doi:10.1117/12.455256
2. Korsch D . ReflectiveOptics. London: Academic Press, 1991, 5–12
3. Jin C S, Ma Y Y, Pei S, et al.. Study of the integration of EUVL experimentaltool. Acta Optica Sinica, 2002, 22(7): 852–857 (in Chinese)
4. Li Y Q . Optical performance of extreme-ultraviolet lithography for 50 nmgeneration. Acta Optica Sinica, 2004, 24(7): 865–868 (in Chinese)
5. Shikama S, et al.. Optical system of Ultra-thin rear projection equipped with refractivereflective projection optics. In: : SID. Boston . 2002, 46(2): 1250–1253. doi:10.1889/1.1830172
6. Ogawa J, Agata K, Sakamoto M, et al.. Super-short focus front projector with asphericmirror projection optical system. In: : SID Digest, San Diego . 2004, 170–173
7. Erismann F . Designof a plastic aspheric fresnel lens with a spherical shape. Optical Engineering, 1997, 36(4): 988–991. doi:10.1117/1.601292
8. Schmitz M, Bryngdahl O . Rigorous analysis and designof diffractive cylindrical lenses with high numerical and large geometricalapertures. Optics Communications, 1998, 153(1–3): 118–124. doi:10.1016/S0030-4018(98)00217-X
9. Roder H, Ehrke H J, Gerhard-Multhaupt R, et al.. Full-colour diffraction-basedoptical system for light-valve projection displays. Displays, 1995, 16(1): 27–33. doi:10.1016/0141-9382(95)91871-X
10. Fukuda H, Terasawa T . Design and analysis of diffractionmirror optics for EUV projection lithography. Microelectronic Engineering, 1995, 27(1–4): 239–242. doi:10.1016/0167-9317(94)00097-E