ZrO₂ enhanced dielectric barrier discharge with the frosted quartz dielectric for improved ozone synthesis

Abstract

Dielectric barrier discharge (DBD) has been extensively applied for industrial production of ozone. Improving the energy utilization of DBD synthesis of ozone is practically and fundamentally important. Here, ZrO₂ was deposited on a frosted quartz dielectric in order to enhance the discharge production. By this way, the discharge gap is not blocked. The flow resistance is thus not be increased. The un-frosted DBD reactor, the frosted DBD reactor, and the ZrO₂-coated frosted DBD reactor were compared in terms of surface structure, discharge behavior, electron-energy characteristics, and ozone formation performance. Compared to the un-frosted and frosted DBDs, the mean electron energy of the ZrO₂-coated frosted DBD increases at the same discharge power with the highest ozone concentration and ozone energy yield, while maintaining stable ozone output. In addition, both the ozone concentration and ozone energy yield increase with increasing ZrO₂ coating thickness within the range tested. These results highlight the use of the ZrO₂ coating on the frosted dielectric as a feasible non-packed dielectric surface-engineering strategy for ozone synthesis.

Keywords

dielectric barrier discharge / plasma, ozone / ZrO₂ / microdischarge

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Higher Education Press 2027

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