Cryogenic atom probe tomography and its applications: a review

Ziyang Zhou , Zhengquan Wang , Ranming Niu , Pang-Yu Liu , Chao Huang , Yi-Hsuan Sun , Xiutong Wang , Hung-Wei Yen , Julie M. Cairney , Yi-Sheng Chen

Microstructures ›› 2023, Vol. 3 ›› Issue (4) : 2023043

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Microstructures ›› 2023, Vol. 3 ›› Issue (4) :2023043 DOI: 10.20517/microstructures.2023.38
Review

Cryogenic atom probe tomography and its applications: a review

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Abstract

Cryogenic atom probe tomography (cryo-APT) is a new microstructure characterization technique with the potential to address challenges across various research fields. In this review, we provide an overview of the development of cryo-APT and the associated instrumentation that transforms conventional APT into cryo-APT. We start by introducing the APT principle and the instrumentation involved in the cryo-APT workflow, emphasizing the key techniques that enable cryo-APT specimen preparation. Furthermore, we shed light on the research made possible by cryo-APT, presenting several recent outcomes to demonstrate its capabilities effectively. Finally, we discuss the limitations of cryo-APT and summarize the potential research areas that can further benefit from this cutting-edge microstructural characterization technique.

Keywords

Atom probe tomography / cryogenic microscopy / microanalysis / materials characterization / hydrogen mapping

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Ziyang Zhou, Zhengquan Wang, Ranming Niu, Pang-Yu Liu, Chao Huang, Yi-Hsuan Sun, Xiutong Wang, Hung-Wei Yen, Julie M. Cairney, Yi-Sheng Chen. Cryogenic atom probe tomography and its applications: a review. Microstructures, 2023, 3(4): 2023043 DOI:10.20517/microstructures.2023.38

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