Fabrication of Porous SiC Coatings on Quartz Substrates by Laser Chemical Vapor Deposition

Abstract

Laser etching and laser chemical vapor deposition (LCVD) techniques were proposed for the rapid preparation of high-purity, strongly bonded SiC porous micro-nano-coatings on quartz substrates. The laser serves as an external driving force for the vertical growth of SiC whiskers, facilitating the formation of a porous nanostructure that resembles coral models found in the macroscopic biological world. The porous nanostructures are beneficial for reducing thermal expansion mismatch and relieving residual stress. It is capable of eliminating the cracks on the surface of SiC coatings as well as enhancing the bonding of SiC coatings with quartz substrates to avoid coating detachment.

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Wuhan University of Technology and Springer-Verlag GmbH Germany, Part of Springer Nature