Sintering Behavior and Microwave Dielectric Properties of BBSZL Glass-doped ZnTiO₃ Ceramics for LTCC Applications

Abstract

A novel low temperature co-fired ceramic (LTCC) material was fabricated by zinc titanate (ZnTiO₃) ceramics doped with B₂O₃-BaO-SiO₂-ZnO-Li₂O (BBSZL) glass. The influences of BBSZL glass on wetting behavior, sintering activation energy, phase composition, microstructure and microwave dielectric properties were investigated. The experimental results show that the sintering temperature of ZnTiO₃ ceramics can be reduced from 1 100 to 925 °C, meanwhile the sintering activation energy is decreased from 465.32 to 390.54 kJ·mol^-1 by BBSZL glass aid, respectively. Moreover, BBSZL glass can inhibit the high Q×f ZnTiO₃ phase decompose into the low Q×f value Zn₂TiO₄ phase, which is propitious to obtain high Q×f value LTCC material. The ZnTiO₃-BBSZL composite sintered at 925 °C displays the excellent microwave dielectric properties with ε_r of 21.8, Q×f value of 42000 GHz, and τ_f of -75 ppm·°C^-1.

Keywords

ZnTiO₃ ceramics / BBSZL glass / sintering behavior / dielectric properties