AFM analysis of TiN, TiAlN, and TiAlSiN coatings prepared by cathodic arc ion plating

Abstract

The TiN, TiAlN, and TiAlSiN coatings were prepared on YT14 cutting tool surface with CAIP (cathode arc ion plating), the surface morphologies and phases were analyzed with FESEM (field emission scanning electron microscopy), and XRD (X-ray diffraction), respectively, and the coating parameters such as 3D surface micro-topography, grain size, surface height, hierarchy, profile height, and power spectral density, etc, were measured with AFM (atomic force microscope). The results show that the phases of TiN, TiAlN, and TiAlSiN coatings are TiN, TiN+TiAlN, TiN+Si₃N₄+TiAlN, respectively, while the surface roughness S _a of TiN, TiAlN, and TiAlSiN coatings is 75.3, 98.9, and 42.1 nm, respectively, and the roughness depth S _k is 209, 389, and 54 nm, respectively, the sequence of average grain sizes is TiAlN>TiN>TiAlSiN. The surface bearing index S _bi of TiN, TiAlN, and TiAlSiN coatings is 0.884, 1.01, and 0.37, respectively, and the sequence of surface bearing capability is TiAlN>TiN>TiAlSiN. At the lower wavelength (10²-10³ nm), the power spectral densities have a certain correlation, and the sequence of TiN>TiAlN>TiAlSiN, while the correlation is low at the higher wavelength (>10³ nm).

Keywords

TiN / TiAlN / and TiAlSiN coatings / AFM / 3D surface micro-topography / height analysis / power spectral density

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