Application of piezoelectric materials in a novel linear ultrasonic motor based on shear-induced vibration mode

Abstract

A novel linear ultrasonic motor based on d ₁₅ effect of piezoelectric materials was presented. The design idea aimed at the direct utilization of the shear-induced vibration modes of piezoelectric material. Firstly, the inherent electromechanical coupling mechanism of piezoelectric material was investigated, and shear vibration modes of a piezoelectric shear block was specially designed. A driving point’s elliptical trajectory induced by shear vibration modes was discussed. Then a dynamic model for the piezoelectric shear stator was established with finite element (FE) method to conduct the parametric optimal design. Finally, a prototype based on d15 converse piezoelectric effect is manufactured, and the modal experiment of piezoelectric stator was conducted with laser doppler vibrometer. The experimental results show that the calculated shear-induced vibration modes can be excited completely, and the new linear ultrasonic motor reaches a speed 118 mm/s at noload, and maximal thrust 12.8 N.

Keywords

piezoelectric material / converse piezoelectric effect / shear vibration / linear ultrasonic

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