Formation and characterization of Pd, Pt and Pd-Pt alloy films on polyimide by catalyst-enhanced chemical vapor deposition

Abstract

Platinum, palladium and their alloy films on polyimide were formed by catalyst-enhanced chemical vapor deposition (CVD) in the carrier gas (N₂, O₂) at 220–300 °C under reduced pressure and normal pressure. The deposition of palladium complexes [ Pd((η³-allyl)(hfac) and Pd(hfac)₂] gives pure palladium film, while the deposition of platinum needs the enhancement of palladium complex by mixing precursor platinum complex Pt(COD)Me₂ and palladium complex in the same chamber. The co-deposition of Pd and Pt metals was used for the deposition of alloy films. During the CVD of palladium-platinum alloy, the Pd/Pt atomic ratios vary under different co-deposition conditions. These metal films were characterized by XPS and SEM, and show a good adhesive property.

Keywords

polyimide (PI) / catalyst-enhanced chemical vapor deposition (CECVD) / platinum metal film / palladium-platinum alloy film

References

[1] Wilson A. M. Polyimide Insulators for Multilevel Interconnects[J]. Thin Solid Films, 1981, 83: 145-63.

[2] Sacher E, Pireaux J J, Kowalczyk S P. (edition).Metallization of polymers[M]. Washington D C ACS Symposium Series 440, Eds. Am Chem Soc, 1990

[3] Tromp R. M., Legoues F., Ho P. S. Interdiffusion at the Polyamide-copper Interface [J]. J.Vac.Sci.Technol A, 1985, 3(3): 782-785.

[4] Zhang Y., Choi S. W.-K., Puddephatt R. J. Catalyst Enhanced Chemical Vapor Deposition: Effects on Chemical Vapor Deposition Temperature and Film Purity [J]. J.Am.Chem. Soc., 1997, 119: 9 295-9 296.

[5] Zhang Y., Yuan Z., Puddephatt R. J. Allyl (β-diketononate) Palladium(II) Complexes, Including Liquid Precursors, for Chemical Deposition of Palladium [J]. Chem. Mater., 1998, 10: 2 293-2 300.

[6] Bhaskaran V., Atanasova P., Hampden-Smith M. J., . Low-pressure Chemical Vapor Deposition of Cu-Pd Films: Ally Growth Kinetics [J]. Chem. Mater., 1997, 9: 2 822-2 829.

[7] Otto K., Haack L. P., De Vries J. E. Identification of Two Types of Oxidized Palladium on γ-alumina by x-ray Photoelectron Spectroscopy[J]. Appl. Catal. B, 1992, 1: 1-12.