Effects of substrate temperatures on the structure and UV-shielding properties of TiO₂−CeO₂ films deposited on glass by radio-frequency magnetron sputtering

Abstract

TiO₂−CeO₂ films were deposited on soda-lime glass substrates at varied substrate temperatures by rf magnetron sputtering using 40% molar TiO₂-60% molar CeO₂ ceramic target in Ar: O₂=95∶5 atmosphere. The structure, surface composition, UV-visible spectra of the films were measured by scanning electron microscopy and X-ray diffraction, and X-ray photoelectron spectroscopy, respectively. The experimental results show that the films are amorphous, there are only Ti⁴⁺ and Ce⁴⁺ on the surface of the films, the obtained TiO₂−CeO₂ films show a good uniformity and high densification, and the films deposited on the glass can shield ultraviolet light without significant absorption of visible light, the films deposited on substrates at room temperature and 220 °C absorb UV effectively.

Keywords

rf sputtering / TiO₂−CeO₂ films / ultraviolet-shielding coating glass / substrate temperatures

References

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