A dual-range Janus-structure pressure sensor with broad detection range and high resolution combining triboelectricity and piezoelectricity

Abstract

Enabling pressure sensors with high resolution and a broad detection range is of paramount importance yet challenging due to the limitations of each known sensing method. Overlying different sensing mechanisms to achieve complementary functions is a promising approach, but it often leads to increased device thickness, crosstalk signals and complex signal channel management. Herein, we present a dual-functional conformable pressure sensor that adopts a Janus thin film layout, enabling simultaneous piezoelectric and triboelectric signal detection capabilities between just one electrode pair, showing a most compact device configuration. Notably, despite its thin thickness (∼80 µm for a packaged device), it exhibits a broad-range detection capability with high signal resolution and fast response time, demonstrating a distinct signal-relay characteristic corresponding to piezoelectricity and triboelectricity. Despite the slimness and simple structure, it shows an impressive signal resolution of 0.93 V·kPa^–1 in the range of 0.1–140 kPa and 0.05 V·kPa^–1 in the range of 140–380 kPa. Moreover, the device fabrication can be combined with the kirigami method to improve fitting to joint surfaces. This work introduces an innovative paradigm for designing advanced pressure sensing mechanisms, enabling a single device that can meet diverse application scenarios through its simplicity, slim layout, conformable, and self-powered characteristics to adapt to multiple scenarios.

Keywords

large detection range / triboelectric and piezoelectric effect / ultrathin pressure sensor

References

[1] Libanori A, Chen G, Zhao X, Zhou Y, Chen J. Smart textiles for personalized healthcare. Nat Electron. 2022; 5(3): 142-156.

[2] Liu Z, Ma Y, Ouyang H, et al. Transcatheter self-powered ultrasensitive endocardial pressure sensor. Adv Funct Mater. 2019; 29(3): 1807560.

[3] Wang L, Fu XM, He JQ, et al. Application challenges in fiber and textile electronics. Adv Mater. 2020; 32(5): 1901971.

[4] Chun S, Kim JS, Yoo Y, et al. An artificial neural tactile sensing system. Nat Electron. 2021; 4(6): 429.

[5] Zhu MM, Lou MN, Yu JY, Li ZL, Ding B. Energy autonomous hybrid electronic skin with multi-modal sensing capabilities. Nano Energy. 2020; 78: 105208.

[6] Lin MZ, Zheng ZJ, Yang L, et al. A high-performance, sensitive, wearable multifunctional sensor based on rubber/CNT for human motion and skin temperature detection. Adv Mater. 2022; 34(1): 2107309.

[7] Zhu MM, Li JL, Yu JY, Li ZL, Ding B. Superstable and intrinsically self-healing fibrous membrane with bionic confined protective structure for breathable electronic skin. Angew Chem Int Ed. 2022; 61(22): e202200226.

[8] Lee S, Franklin S, Hassani FA, et al. Nanomesh pressure sensor for monitoring finger manipulation without sensory interference. Science. 2020; 370(6519): 966, abc9735.

[9] Choong CL, Shim MB, Lee BS, et al. Highly stretchable resistive pressure sensors using a conductive elastomeric composite on a micropyramid array. Adv Mater. 2014; 26(21): 3451-3458.

[10] Pan LJ, Chortos A, Yu GH, et al. An ultra-sensitive resistive pressure sensor based on hollow-sphere microstructure induced elasticity in conducting polymer film. Nat Commun. 2014; 5(1): 3002.

[11] Hammock ML, Chortos A, Tee BCK, Tok JBH, Bao ZA. 25th anniversary article: the evolution of electronic skin (E-skin): a brief history, design considerations, and recent progress. Adv Mater. 2013; 25(42): 5997-6037.

[12] Mannsfeld SCB, Tee BCK, Stoltenberg RM, et al. Highly sensitive flexible pressure sensors with microstructured rubber dielectric layers. Nat Mater. 2010; 9(10): 859-864.

[13] Lipomi DJ, Vosgueritchian M, Tee BCK, et al. Skin-like pressure and strain sensors based on transparent elastic films of carbon nanotubes. Nat Nanotechnol. 2011; 6(12): 788-792.

[14] Ham J, Huh TM, Kim J, et al. Porous dielectric elastomer based flexible multiaxial tactile sensor for dexterous robotic or prosthetic hands. Adv Mater Technol. 2023; 8(3): 2200903.

[15] Fan FR, Tang W, Wang ZL. Flexible nanogenerators for energy harvesting and self-powered electronics. Adv Mater. 2016; 28(22): 4283-4305.

[16] Tian JW, Chen XY, Wang ZL. Environmental energy harvesting based on triboelectric nanogenerators. Nanotechnology. 2020; 31(24): 242001.

[17] Wang ZL, Song JH. Piezoelectric nanogenerators based on zinc oxide nanowire arrays. Science. 2006; 312(5771): 242-246.

[18] Zhang J, He Y, Boyer C, et al. Recent developments of hybrid piezo–triboelectric nanogenerators for flexible sensors and energy harvesters. Nanoscale Adv. 2021; 3(19): 5465-5486.

[19] Yu J, Zhang K, Deng Y. Recent progress in pressure and temperature tactile sensors: principle, classification, integration and outlook. Soft Sci. 2021; 1(1): 6.

[20] Duan Y, He S, Wu J, Su B, Wang Y. Recent progress in flexible pressure sensor arrays. Nanomaterials. 2022; 12(14): 2495.

[21] Dong K, Peng X, Wang ZL. Fiber/fabric-based piezoelectric and triboelectric nanogenerators for flexible/stretchable and wearable electronics and artificial intelligence. Adv Mater. 2020; 32(5): 1902549.

[22] Park KI, Son JH, Hwang GT, et al. Highly-efficient, flexible piezoelectric PZT thin film nanogenerator on plastic substrates. Adv Mater. 2014; 26(16): 2514-2520.

[23] Wegener M, Wirges W, Gerhard-Multhaupt R. Piezoelectric polyethylene terephthalate (PETP) foams—specifically designed and prepared ferroelectret films. Adv Eng Mater. 2005; 7(12): 1128-1131.

[24] Shi KM, Zou HY, Sun B, Jiang PK, He JL, Huang XY. Dielectric modulated cellulose paper/PDMS-based triboelectric nanogenerators for wireless transmission and electropolymerization applications. Adv Funct Mater. 2020; 30(4): 1904536.

[25] Wang ZL. Triboelectric nanogenerators as new energy technology for self-powered systems and as active mechanical and chemical sensors. ACS Nano. 2013; 7(11): 9533-9557.

[26] Song YH, Bao JK, Hu Y, et al. Ultra-porous cellulose nanofibril aerogel films as excellent triboelectric positive materials via direct freeze-drying of dispersion. Nano Energy. 2022; 103: 107832.

[27] Chen CJ, Zhao SL, Pan CF, et al. A method for quantitatively separating the piezoelectric component from the as-received “piezoelectric” signal. Nat Commun. 2022; 13(1): 1391.

[28] Su YJ, Chen CX, Pan H, et al. Muscle fibers inspired high-performance piezoelectric textiles for wearable physiological monitoring. Adv Funct Mater. 2021; 31(19): 2010962.

[29] Persano L, Dagdeviren C, Su YW, et al. High performance piezoelectric devices based on aligned arrays of nanofibers of poly(vinylidenefluoride-co-trifluoroethylene). Nat Commun. 2013; 4(1): 1633.

[30] Li T, Qu MH, Carlos OR, et al. High-performance poly(vinylidene difluoride)/dopamine core/shell piezoelectric nanofiber and its application for biomedical sensors. Adv Mater. 2021; 33(3): 2006093.

[31] Pi ZY, Zhang JW, Wen CY, Zhang ZB, Wu DP. Flexible piezoelectric nanogenerator made of poly(vinylidenefluoride-co-trifluoroethylene) (PVDF-TrFE) thin film. Nano Energy. 2014; 7(1): 33-41.

[32] Meng KY, Xiao X, Wei WX, et al. Wearable pressure sensors for pulse wave monitoring. Adv Mater. 2022; 34(21): 2109357.

[33] Yi ZR, Liu ZX, Li WB, et al. Piezoelectric dynamics of arterial pulse for wearable continuous blood pressure monitoring. Adv Mater. 2022; 34(16): 2110291.

[34] Choi S, Han SI, Jung D, et al. Highly conductive, stretchable and biocompatible Ag–Au core-sheath nanowire composite for wearable and implantable bioelectronics. Nat Nanotechnol. 2018; 13(11): 1048.

[35] Wang XM, Sun FZ, Yin GC, Wang YT, Liu B, Dong MD. Tactile-sensing based on flexible PVDF nanofibers via electrospinning: a review. Sensors. 2018; 18(2): 330.

[36] Kumar P, Mishra P, Sonia S. Synthesis and characterization of lead-free ferroelectric 0.5Ba(Zr_0.2Ti_0.8)O-3-0.5(Ba_0.7Ca_0.3)TiO₃—polyvinylidene difluoride 0–3 composites. J Inorg Organomet Polym Mater. 2013; 23(3): 539-545.

[37] Chortos A, Liu J, Bao ZA. Pursuing prosthetic electronic skin. Nat Mater. 2016; 15(9): 937-950.

[38] Sim HJ, Choi C, Kim SH, et al. Stretchable triboelectric fiber for self-powered kinematic sensing textile. Sci Rep. 2016; 6(1): 35153.

[39] Fang B, Yan JM, Chang D, et al. Scalable production of ultrafine polyaniline fibres for tactile organic electrochemical transistors. Nat Commun. 2022; 13(1): 2101.

[40] Lin MF, Xiong JQ, Wang JX, Parida K, Lee PS. Core–shell nanofiber mats for tactile pressure sensor and nanogenerator applications. Nano Energy. 2018; 44(1): 248-255.

[41] Wang ZY, Guan X, Huang HY, Wang HF, Lin WE, Peng ZC. Full 3D printing of stretchable piezoresistive sensor with hierarchical porosity and multimodulus architecture. Adv Funct Mater. 2019; 29(11): 1807569.

[42] Ma YA, Cheng YF, Wang J, et al. Flexible and highly-sensitive pressure sensor based on controllably oxidized MXene. Inf Dent. 2022; 4(9): e12328.

[43] Yang M, Cheng YF, Yue Y, et al. High-performance flexible pressure sensor with a self-healing function for tactile feedback. Adv Sci. 2022; 9(20): 2200507.

[44] Yan JF, Ma YA, Jia G, et al. Bionic MXene based hybrid film design for an ultrasensitive piezoresistive pressure sensor. Chem Eng J. 2022; 431: 133458.

[45] Huang YC, Liu Y, Ma C, et al. Sensitive pressure sensors based on conductive microstructured air-gap gates and two-dimensional semiconductor transistors. Nat Electron. 2020; 3(1): 59-69.

[46] Liu QX, Liu ZG, Li CG, et al. Highly transparent and flexible iontronic pressure sensors based on an opaque to transparent transition. Adv Sci. 2020; 7(10): 2000348.

[47] Bai NN, Wang L, Wang Q, et al. Graded intrafillable architecture-based iontronic pressure sensor with ultra-broad-range high sensitivity. Nat Commun. 2020; 11(1): 209.

[48] Fu M, Zhang JM, Jin YM, Zhao Y, Huang SY, Guo CF. A highly sensitive, reliable, and high-temperature-resistant flexible pressure sensor based on ceramic nanofibers. Adv Sci. 2020; 7(17): 2000258.

[49] Qiu ZG, Wan YB, Zhou WH, et al. Ionic skin with biomimetic dielectric layer templated from calathea zebrine leaf. Adv Funct Mater. 2018; 28(37): 1802343.

[50] Mu CH, Song YQ, Huang WT, et al. Flexible normal-tangential force sensor with opposite resistance responding for highly sensitive artificial skin. Adv Funct Mater. 2018; 28(18): 1707503.

[51] Park DY, Joe DJ, Kim DH, et al. Self-powered real-time arterial pulse monitoring using ultrathin epidermal piezoelectric sensors. Adv Mater. 2017; 29(37): 1702308.

[52] Deng WL, Yang T, Jin L, et al. Cowpea-structured PVDF/ZnO nanofibers based flexible self-powered piezoelectric bending motion sensor towards remote control of gestures. Nano Energy. 2019; 55(1): 516-525.

[53] Yang Y, Pan H, Xie GZ, et al. Flexible piezoelectric pressure sensor based on polydopamine-modified BaTiO3/PVDF composite film for human motion monitoring. Sens Actuators A Phys. 2020; 301: 111789.

[54] Kar E, Bose N, Dutta B, Mukherjee N, Mukherjee S. Ultraviolet-and microwave-protecting, self-cleaning e-skin for efficient energy harvesting and tactile mechanosensing. ACS Appl Mater Interfaces. 2019; 11(19): 17501-17512.

[55] Wang XD, Zhang HL, Dong L, et al. Self-powered high-resolution and pressure-sensitive triboelectric sensor matrix for real-time tactile mapping. Adv Mater. 2016; 28(15): 2896-2903.

[56] Chun S, Son W, Kim H, Lim SK, Pang C, Choi C. Self-powered pressure-and vibration-sensitive tactile sensors for learning technique-based neural finger skin. Nano Lett. 2019; 19(5): 3305-3312.

[57] Yi P, Fu X, Liu Y, Zhang X, Zhang C, Li X. Triboelectric active pressure sensor with ultrabroad linearity range by femtosecond laser shaping based on electrons dynamics control. Nano Energy. 2023; 113: 108592.

[58] Bhatta T, Sharma S, Shrestha K, et al. Siloxene/PVDF composite nanofibrous membrane for high-performance triboelectric nanogenerator and self-powered static and dynamic pressure sensing applications. Adv Funct Mater. 2022; 32(25): 2202145.

[59] Chaabene H, Tabben M, Mkaouer B, et al. Amateur boxing: physical and physiological attributes. Sports Med. 2015; 45(3): 337-352.

[60] Lenetsky S, Harris N, Brughelli M. Assessment and contributors of punching forces in combat sports athletes. Strength Cond. J. 2013; 35: 1-7.

[61] Jandova S, Volf P, Nagy L. Pressure distribution under the feet on the treadmill walking with unstable shoes and regular running shoes in different conditions. Procedia Eng. 2015; 122(1): 302-307.

[62] Meng KY, Xiao X, Liu ZX, et al. Kirigami-inspired pressure sensors for wearable dynamic cardiovascular monitoring. Adv Mater. 2022; 34(36): 2202478.

[63] Kim YG, Song JH, Hong S, Ahn SH. Piezoelectric strain sensor with high sensitivity and high stretchability based on kirigami design cutting. Npj Flex Electron. 2022; 6(1): 52.

[64] Chen SS, Chen JF, Zhang XD, Li ZY, Li JF. Kirigami/origami: unfolding the new regime of advanced 3D microfabrication/nanofabrication with “folding”. Light Sci Appl. 2020; 9(1): 75.

[65] Yan Z, Wang L, Xia Y, et al. Flexible high-resolution triboelectric sensor array based on patterned laser-induced graphene for self-powered real-time tactile sensing. Adv Funct Mater. 2021; 31(23): 2100709.

[66] Ji X, Zhao T, Zhao X, Lu X, Li T. Triboelectric nanogenerator based smart electronics via machine learning. Adv Mater Technol. 2020; 5(2): 1900921.

RIGHTS & PERMISSIONS

2024 The Authors. InfoMat published by UESTC and John Wiley & Sons Australia, Ltd.