Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line

Abstract

In this paper, we report on polarization combining two-dimensional grating couplers (2D GCs) on amorphous Si:H, fabricated in the backend of line of a photonic BiCMOS platform. The 2D GCs can be used as an interface of a hybrid silicon photonic coherent transmitter, which can be implemented on bulk Si wafers. The fabricated 2D GCs operate in the telecom C-band and show an experimental coupling efficiency of − 5 dB with a wafer variation of ± 1.2 dB. Possibilities for efficiency enhancement and improved performance stability in future design generations are outlined and extension toward O-band devices is also investigated.

Graphical abstract

Keywords

Hybrid integration / Photonic BiCMOS / Amorphous silicon / Two-dimensional grating coupler (2D GC) / Dual-polarization coherent communication / Silicon photonics

References

[1] Zhou, X. , Urata, R. , Liu, H. : Beyond 1 Tb/s intra-data center interconnect technology: IM-DD or coherent? J. Lightwave Technol. 38 (2), 475- 484 (2020)

[2] NeoPhotonics . White Paper—Photonic IC Enabled Coherent Optical Systems

[3] Zhou, J. , Wang, J. , Zhu, L. , Zhang, Q. : Silicon photonics for 100 Gbaud. J. Lightwave Technol. 39 (4), 857- 867 (2021)

[4] Mekis, A. , Gloeckner, S. , Masini, G. , Narasimha, A. , Pinguet, T. , Sahni, S. , Dobbelaere, P.D. : A grating-coupler-enabled CMOS photonics platform. IEEE J. Sel. Top. Quantum Electron. 17 (3), 597- 608 (2011)

[5] Zimmermann, L. , Knoll, D. , Kroh, M. , Lischke, S. , Petousi, D. , Winzer, G. , Yamamoto, Y. : BiCMOS silicon photonics platform. In: Optical Fiber Communication Conference (OFC) 2015, Los Angeles, CA, USA (2015)

[6] Rakowski, M. , Meagher, C. , Nummy, K. , Aboketaf, A. , Ayala, J. , Bian, Y. , Harris, B. , Mclean, K. , McStay, K. , Sahin, A. , Medina, L. , Peng, B. , Sowinski, Z. , Stricker, A. , Houghton, T. , Hedges, C. , Giewont, K. , Jacob, A. , Letavic, T. , Riggs, D. , Yu, A. , Pellerin, J. : 45 nm CMOS-silicon photonics monolithic technology (45CLO) for next-generation, low power and high speed optical interconnects. In: Optical Fiber Communication Conference (OFC) 2020, San Diego, CA, USA (2020)

[7] Zhou, X. , Urata, R. , Liu, H. : Beyond 1 Tb/s datacenter interconnect technology: challenges and solutions. In: Optical Fiber Communication Conference (OFC) 2019, San Diego, CA, USA (2019)

[8] Petousi, D. , Zimmermann, L. , Voigt, K. , Petermann, K. : Performance limits of depletion-type silicon Mach-Zehnder modulators for telecom applications. J. Lightwave Technol. 31 (22), 3556- 3562 (2013)

[9] Petousi, D. , Zimmermann, L. , Gajda, A. , Kroh, M. , Voigt, K. , Winzer, G. , Tillack, B. , Petermann, K. : Analysis of optical and electrical tradeoffs of traveling-wave depletion-type Si Mach-Zehnder modulators for high-speed operation. IEEE J. Sel. Top. Quantum Electron. 21 (4), 199- 206 (2015)

[10] Alexander, K. , George, J.P. , Verbist, J. , Neyts, K. , Kuyken, B. , Van Thourhout, D. , Beeckman, J. : Nanophotonic Pockels modulators on a silicon nitride platform. Nat. Commun. 9 (1), 3444 (2018)

[11] Eltes, F. , Mai, C. , Caimi, D. , Kroh, M. , Popoff, Y. , Winzer, G. , Petousi, D. , Lischke, S. , Ortmann, J.E. , Czornomaz, L. , Zimmermann, L. , Fompeyrine, J. , Abel, S. : A BaTiO₃-based electro-optic Pockels modulator monolithically integrated on an advanced silicon photonics platform. J. Lightwave Technol. 37 (5), 1456- 1462 (2019)

[12] Rao, A. , Patil, A. , Rabiei, P. , Honardoost, A. , DeSalvo, R. , Paolella, A. , Fathpour, S. : High-performance and linear thinfilm lithium niobate Mach-Zehnder modulators on silicon up to 50 GHz. Opt. Lett. 41 (24), 5700- 5703 (2016)

[13] Weigel, P.O. , Zhao, J. , Fang, K. , Al-Rubaye, H. , Trotter, D. , Hood, D. , Mudrick, J. , Dallo, C. , Pomerene, A.T. , Starbuck, A.L. , DeRose, C.T. , Lentine, A.L. , Rebeiz, G. , Mookherjea, S. : Bonded thin film lithium niobate modulator on a silicon photonics platform exceeding 100 GHz 3-dB electrical modulation bandwidth. Opt. Express 26 (18), 23728- 23739 (2018)

[14] Boynton, N. , Cai, H. , Gehl, M. , Arterburn, S. , Dallo, C. , Pomerene, A. , Starbuck, A. , Hood, D. , Trotter, D.C. , Friedmann, T. , DeRose, C.T. , Lentine, A. : A heterogeneously integrated silicon photonic/lithium niobate travelling wave electro-optic modulator. Opt. Express 28 (2), 1868- 1884 (2020)

[15] Takei, R. , Maegami, Y. , Omoda, E. , Sakakibara, Y. , Mori, M. , Kamei, T. : Low-loss and low wavelength-dependence vertical interlayer transition for 3D silicon photonics. Opt. Express 23 (14), 18602- 18610 (2015)

[16] Takei, R. , Manako, S. , Omoda, E. , Sakakibara, Y. , Mori, M. , Kamei, T. : Sub-1 dB/cm submicrometer-scale amorphous silicon waveguide for backend on-chip optical interconnect. Opt. Express 22 (4), 4779- 4788 (2014)

[17] Sherwood-Droz, N. , Lipson, M. : Scalable 3D dense integration of photonics on bulk silicon. Opt. Express 19 (18), 17758- 17765 (2011)

[18] Ong, E.W. , Fahrenkopf, N.M. , Coolbaugh, D.D. : SiNx bilayer grating coupler for photonic systems. OSA Continuum 1 (1), 13- 25 (2018)

[19] Zhu, S. , Lo, G.Q. : Vertically stacked multilayer photonics on Bulk silicon toward three-dimensional integration. J. Lightwave Technol. 34 (2), 386- 392 (2016)

[20] Kang, J.H. , Atsumi, Y. , Hayashi, Y. , Suzuki, J. , Kuno, Y. , Amemiya, T. , Nishiyama, N. , Arai, S. : Amorphous-silicon interlayer grating couplers with metal mirrors toward 3-D interconnection. IEEE J. Sel. Top. Quantum Electron. 20 (4), 317- 322 (2014)

[21] Takei, R. : Amorphous silicon photonics. In: Crystalline and noncrystalline solids, InTech, 2016. https://doi.org/10.5772/63374

[22] Knoll, D. , Lischke, S. , Barth, R. , Zimmermann, L. , Heinemann, B. , Rucker, H. , Mai, C. , Kroh, M. , Peczek, A. , Awny, A. , Ulusoy, C. , Trusch, A. , Kruger, A. , Drews, J. , Fraschke, M. , Schmidt, D. , Lisker, M. , Voigt, K. , Krune, E. , Mai, A. : High-performance photonic BiCMOS process for the fabrication of high-bandwidth electronic-photonic integrated circuits. In: 2015 IEEE International Electron Devices Meeting (IEDM), Washington, DC, USA (2015)

[23] Knoll, D. , Lischke, S. , Awny, A. , Kroh, M. , Krune, E. , Mai, C. , Peczek, A. , Petousi, D. , Simon, S. , Voigt, K. , Winzer, G. , Zimmermann, L. : BiCMOS silicon photonics platform for fabrication of high-bandwidth electronic-photonic integrated circuits. In: 2016 IEEE 16th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF), Austin, TX, USA (2016)

[24] Marchetti, R. , Lacava, C. , Carroll, L. , Gradkowski, K. , Minzioni, P. : Coupling strategies for silicon photonics integrated chips. Photon. Res. 7 (2), 201- 239 (2019)

[25] Mitze, T. , Schnarrenberger, M. , Zimmermann, L. , Bruns, J. , Fidorra, F. , Janiak, K. , Kreissl, J. , Fidorra, S. , Heidrich, H. , Petermann, K. : CWDM transmitter module based on hybrid integration. IEEE J. Sel. Top. Quantum Electron. 12 (5), 983- 987 (2006)

[26] Duprez, H. , Descos, A. , Ferrotti, T. , Sciancalepore, C. , Jany, C. , Hassan, K. , Seassal, C. , Menezo, S. , Ben, B.B. : 1310 nm hybrid InP/InGaAsP on silicon distributed feedback laser with high sidemode suppression ratio. Opt. Express 23 (7), 8489- 8497 (2015)

[27] Shin, D. , Cha, J. , Kim, S. , Shin, Y. , Cho, K. , Ha, K. , Jeong, G. , Hong, H. , Lee, K. , Kang, H.K. : O-band DFB laser heterogeneously integrated on a bulk-silicon platform. Opt. Express 26 (11), 14768- 14774 (2018)

[28] Georgieva, G. , Petermann, K. : Analytical and numerical investigation of silicon photonic 2D grating couplers with a waveguidetograting shear angle. In: 2018 Progress in Electromagnetics Research Symposium (PIERS), Toyama, Japan (2018)

[29] Georgieva, G. , Voigt, K. , Mai, C. , Seiler, P.M. , Petermann, K. , Zimmermann, L. : Cross-polarization effects in sheared 2D grating couplers in a photonic BiCMOS technology. Jpn. J. Appl. Phys. 59, SOOB03 (2020)

[30] Georgieva, G. , Voigt, K. , Seiler, P.M. , Mai, C. , Petermann, K. , Zimmermann, L. : A physical origin of cross-polarization and higher-order modes in two-dimensional (2D) grating couplers and the related device performance limitations. J. Phys. 3 (3), 035002 (2021)

[31] Georgieva, G. , Seiler, P. M. , Mai, C. , Petermann, K. , Zimmermann, L. : 2D grating coupler induced polarization crosstalk in coherent transceivers for next generation data center interconnects. In: The Optical Fiber Communication Conference (OFC) (2021)

[32] Seiler, P.M. , Georgieva, G. , Winzer, G. , Peczek, A. , Voigt, K. , Lischke, S. , Fatemi, A. , Zimmermann, L. : Toward coherent O-band data center interconnects. Frontiers of Optoelectronics 14 (4), 414- 425 (2021)

[33] Carroll, L. , Gerace, D. , Cristiani, I. , Menezo, S. , Andreani, L.C. : Broad parameter optimization of polarization-diversity 2D grating couplers for silicon photonics. Opt. Express 21 (18), 21556- 21568 (2013)

[34] Luo, Y. , Nong, Z. , Gao, S. , Huang, H. , Zhu, Y. , Liu, L. , Zhou, L. , Xu, J. , Liu, L. , Yu, S. , Cai, X. : Low-loss two-dimensional silicon photonic grating coupler with a backside metal mirror. Opt. Lett. 43 (3), 474- 477 (2018)

[35] Peczek, A. , Mai, C. , Winzer, G. , Zimmermann, L. : Comparison of cut-back method and optical backscatter reflectometry for wafer level waveguide characterization. In: 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS), Edinburgh, UK (2020)

RIGHTS & PERMISSIONS

2022 The Author(s)