Electroforming characteristics of SED emitter in Al-AlN granular films

Abstract

The Al-AlN granular film was proposed as a cathode emitter of surface-conduction electron-emission display (SED) and the effect of Al-AlN granular films’ resistivity on electroforming in experiment and simulation methods was studied. Electroforming could be successfully completed with appropriate Al-AlN granular film resistivity between 1.98 and 15.10 mΩ·cm, and the corresponding turn-on voltage of electroforming increased from 6.2 to 10.5 V with the resistivity increasing. In addition, a temperature profile on Al-AlN emitter was simulated and the temperature decreased from middle to two sides, which were corresponding to surface morphology of Al-AlN emitter after electroforming.

Keywords

electroforming / Al-AlN granular films / surface-conduction electron-emission display (SED) / resistivity

References

[1] Dittmer G. Electrical conduction and electron emission of discontinuous thin films. Thin Solid Films, 1972, 9(3): 317–328

[2] Borziak P, Kulyupin Y, Tomchuk P. Electron processes in discontinuous metal films. Thin Solid Films, 1975, 30(1): 47–53

[3] Araki H, Hanawa T. Electron emission from electroformed carbon films. Vacuum, 1988, 38(1): 31–35

[4] Araki H, Hanawa T. The temperature dependence of electron emission from a discontinuous carbon film device between silver film electrodes. Thin Solid Films, 1988, 158(2): 207–216

[5] Nalin K, Canyon L. Tex. Methode of making a field emitter. United States Patent: 5679043, 1997-<month>10</month>-<day>21</day>

[6] Nalin K, Canyon L.Tex. Field emission display device. United States Patent: <patent>5763997</patent>, 1998-<month>06</month>-<day>09</day>

[7] Wang Z M, Li D J, Yao B L, Wang J. Electron emission from discontinuous gold-carbon compound film on etched porous aluminum oxide. Applied Physics Letters, 2006, 89(9): 093503

[8] Zhu D, Li D J, Wang J. Electron emission from carbon film on island-like tin oxide layer. Chemical Physics Letters, 2007, 447(4-6): 320–323

[9] Yamamoto K, Oguchi T, Sasaki K, Nomura I, Uzawa S, Hatanaka K. Fabrication and characterization of surface-conduction electron emitters for SED application. Journal of the SID, 2006, 14(1): 73–79

[10] Tsai C H, Pan F M, Chen K J, Wei C Y, Liu M, Mo C N. Nanogap formation by palladium hydrogenation for surface conduction electron emitters fabrication. Applied Physics Letters, 2007, 90(16): 163115

[11] Liang H F, Liu C L, Liang Z H, Meng L G. Electron emission characteristics of Al-AlN granular films. Applied Surface Science, 2008, 254(21): 6922–6927

Acknowledgements

This work was supported by the National Natural Science Foundation of China (Grant Nos. 61007015 and 60978040).

RIGHTS & PERMISSIONS

2014 Higher Education Press and Springer-Verlag Berlin Heidelberg