Ultrasensitive, Highly Selective, Integrated Multidimensional Sensor Based on a Rigid-Flexible Synergistic Stretchable Substrate

Chao Ma; Meng Wang; Kai Wang; Pierre Claver Uzabakiriho; Xi Chen; Gang Zhao

doi:10.1007/s42765-023-00274-8

Advanced Fiber Materials ›› 2023, Vol. 5 ›› Issue (4) : 1392 -1403. DOI: 10.1007/s42765-023-00274-8

Research Article

Ultrasensitive, Highly Selective, Integrated Multidimensional Sensor Based on a Rigid-Flexible Synergistic Stretchable Substrate

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¹Department of Electronic Engineering and Information Sciences, University of Science and Technology of China, 230027, Hefei, People’s Republic of China

²Institute of Advanced Technology, University of Science and Technology of China, 230027, Hefei, People’s Republic of China

³College of Mathematics, Physics and Information Science and Engineering, Zhejiang Normal University, 321004, Jinhua, Republic of China

^f zhaog@ustc.edu.cn

Chao Ma

received his B. S. degree at Hefei University of Technology in 2018. He is a Ph. D candidate of University of Science and Technology of China. His research focuses on wearable device based on electrospinning.

Meng Wang

received his B. S. degree in China University of Mining and Technology in 2017 and Ph. D degree in University of Science and Technology of China in 2022. He is now conducting his postdoctoral training in Zhejiang Lab. His current research interests focus on electrospinning, flexible electronic systems, and flexible sensors.

Kai Wang

received his B. S. degree at Anhui University in 2020. He is currently pursuing his master’s degree at University of Science and Technology of China. His research interests in gesture recognition based on flexible sensor.

Pierre Claver Uzabakiriho

received his M. S. degree in Xi’an Jiaotong University, in 2016 and Ph. D degree in University of Science and Technology of China in 2021. Heconducted his postdoctoral training at University of Science and Technology of China. His current research interests focus on nanomaterials for wearable/flexible electronics and electronic skins.

Xi Chen

is a professor of Zhejiang Normal University. He received his Ph. D in University of Science and Technology of China in 2020. His research interests include signal detection and sensing, biomedical sensors.

Gang Zhao

obtained his Ph.D. in power engineering and engineering thermophysics from the University of Science and Technology of China (USTC, Hefei, China) in 2004. From 2008 to 2010, he was a Japan Society for the Promotion of Science research fellow (JSPS research fellow) in Dr. Hiroshi Takamatsu’s group at the Kyushu University. Now, he is a professor at USTC and an affiliate professor at the University of Washington (Seattle, USA). His current research focuses on cryobiology, micro- and nano-technologies, and biosensors.

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Abstract

High-performance wearable sensors that detect complex, multidimensional signals are indispensable in practical applications. Most existing sensors can only detect axial deformations or single stimuli, dramatically limiting their application fields. In this study, anisotropic strain and deformation-insensitive pressure sensors were effectively constructed based on a rigid-flexible synergistic stretchable substrate. Furthermore, we developed a three-dimensional integrated sensor with highly directional selective sensing through reasonable design and assembly. This integrated sensor recognizes the amplitude and direction of strain in the plane with a maximum gauge factor of 635 and an unprecedented selectivity of 13.99. Additionally, this device can also monitor the pressure outside the plane with a sensitivity of 0.277 kPa⁻¹. We further investigated the working mechanism of sensor anisotropy and confirmed the application of the sensor in detecting complex multifreedom human joint movements. This research discovery provides new ideas and methods for developing multidimensional sensors, which is essential for broadening the application field of wearable electronic products.

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Chao Ma, Meng Wang, Kai Wang, Pierre Claver Uzabakiriho, Xi Chen, Gang Zhao. Ultrasensitive, Highly Selective, Integrated Multidimensional Sensor Based on a Rigid-Flexible Synergistic Stretchable Substrate. Advanced Fiber Materials, 2023, 5(4): 1392-1403 DOI:10.1007/s42765-023-00274-8