Progress of Proximity Sensors for Potential Applications in Electronic Skins

Runnan Zou, Yanhong Tong, Jiayi Liu, Jing Sun, Da Xian, Qingxin Tang

Transactions of Tianjin University ›› 2024, Vol. 30 ›› Issue (1) : 40-62. DOI: 10.1007/s12209-023-00379-6
Review

Progress of Proximity Sensors for Potential Applications in Electronic Skins

Author information +
History +

Abstract

Recently, electronic skins and flexible wearable devices have been developed for widespread applications in medical monitoring, artificial intelligence, human–machine interaction, and artificial prosthetics. Flexible proximity sensors can accurately perceive external objects without contact, introducing a new way to achieve an ultrasensitive perception of objects. This article reviews the progress of flexible capacitive proximity sensors, flexible triboelectric proximity sensors, and flexible gate-enhanced proximity sensors, focusing on their applications in the electronic skin field. Herein, their working mechanism, materials, preparation methods, and research progress are discussed in detail. Finally, we summarize the future challenges in developing flexible proximity sensors.

Keywords

Capacitive proximity sensors / Triboelectric proximity sensors / Gate-enhanced proximity sensors / Flexible wearable devices / Electronic skins

Cite this article

Download citation ▾
Runnan Zou, Yanhong Tong, Jiayi Liu, Jing Sun, Da Xian, Qingxin Tang. Progress of Proximity Sensors for Potential Applications in Electronic Skins. Transactions of Tianjin University, 2024, 30(1): 40‒62 https://doi.org/10.1007/s12209-023-00379-6

References

[1]
Li S, Zhang Y, Wang Y, et al.. Physical sensors for skin-inspired electronics. InfoMat, 2020, 2(1): 184-211,
CrossRef Google scholar
[2]
Lee Y, Park J, Choe A, et al.. Mimicking human and biological skins for multifunctional skin electronics. Adv Funct Mater, 2020, 30(20): 1904523,
CrossRef Google scholar
[3]
Yang JC, Mun J, Kwon SY, et al.. Electronic skin: recent progress and future prospects for skin-attachable devices for health monitoring, robotics, and prosthetics. Adv Mater, 2019, 31(48): e1904765,
CrossRef Google scholar
[4]
Xu L, Gutbrod SR, Bonifas AP, et al.. 3D multifunctional integumentary membranes for spatiotemporal cardiac measurements and stimulation across the entire epicardium. Nat Commun, 2014, 5: 3329,
CrossRef Google scholar
[5]
Wu H, Gao W, Yin Z. Materials, devices and systems of soft bioelectronics for precision therapy. Adv Healthc Mater, 2017, 6(10): 1700017,
CrossRef Google scholar
[6]
Zhang S, Li S, Xia Z, et al.. A review of electronic skin: soft electronics and sensors for human health. J Mater Chem B, 2020, 8(5): 852-862,
CrossRef Google scholar
[7]
Guo W, Zheng P, Huang X, et al.. Matrix-independent highly conductive composites for electrodes and interconnects in stretchable electronics. ACS Appl Mater Interfaces, 2019, 11(8): 8567-8575,
CrossRef Google scholar
[8]
Guo Y, Guo Z, Zhong M, et al.. A flexible wearable pressure sensor with bioinspired microcrack and interlocking for full-range human-machine interfacing. Small, 2018, 14(44): e1803018,
CrossRef Google scholar
[9]
Kim J, Lee M, Shim HJ, et al.. Stretchable silicon nanoribbon electronics for skin prosthesis. Nat Commun, 2014, 5: 5747,
CrossRef Google scholar
[10]
Hammock ML, Chortos A, Tee BCK, et al.. 25th anniversary article: the evolution of electronic skin (e-skin): a brief history, design considerations, and recent progress. Adv Mater, 2013, 25(42): 5997-6038,
CrossRef Google scholar
[11]
Zhang B, Xiang Z, Zhu S, et al.. Dual functional transparent film for proximity and pressure sensing. Nano Res, 2014, 7(10): 1488-1496,
CrossRef Google scholar
[12]
Choi TY, Hwang BU, Kim BY, et al.. Stretchable, transparent, and stretch-unresponsive capacitive touch sensor array with selectively patterned silver nanowires/reduced graphene oxide electrodes. ACS Appl Mater Interfaces, 2017, 9(21): 18022-18030,
CrossRef Google scholar
[13]
Li Y, Zhou X, Chen J, et al.. Laser-patterned copper electrodes for proximity and tactile sensors. Adv Materials Inter, 2020, 7(4): 1901845,
CrossRef Google scholar
[14]
Moheimani R, Aliahmad N, Aliheidari N, et al.. Thermoplastic polyurethane flexible capacitive proximity sensor reinforced by CNTs for applications in the creative industries. Sci Rep, 2021, 11(1): 1104,
CrossRef Google scholar
[15]
Hu X, Yang W. Planar capacitive sensors–designs and applications. Sens Rev, 2010, 30(1): 24-39,
CrossRef Google scholar
[16]
Kulkarni MR, John RA, Rajput M, et al.. Transparent flexible multifunctional nanostructured architectures for non-optical readout, proximity, and pressure sensing. ACS Appl Mater Interfaces, 2017, 9(17): 15015-15021,
CrossRef Google scholar
[17]
Rim YS, Bae SH, Chen H, et al.. Recent progress in materials and devices toward printable and flexible sensors. Adv Mater, 2016, 28(22): 4415-4440,
CrossRef Google scholar
[18]
Gao W, Emaminejad S, Nyein HYY, et al.. Fully integrated wearable sensor arrays for multiplexed in situ perspiration analysis. Nature, 2016, 529(7587): 509-514,
CrossRef Google scholar
[19]
Nyein HYY, Gao W, Shahpar Z, et al.. A wearable electrochemical platform for noninvasive simultaneous monitoring of Ca2+ and pH. ACS Nano, 2016, 10(7): 7216-7224,
CrossRef Google scholar
[20]
Gao W, Nyein HYY, Shahpar Z, et al.. Wearable microsensor array for multiplexed heavy metal monitoring of body fluids. ACS Sens, 2016, 1(7): 866-874,
CrossRef Google scholar
[21]
Glennon T, O'Quigley C, McCaul M, et al.. ‘SWEATCH’: a wearable platform for harvesting and analysing sweat sodium content. Electroanalysis, 2016, 28(6): 1283-1289,
CrossRef Google scholar
[22]
Zhu S, Gao Y, Hu B, et al.. Transferable self-welding silver nanowire network as high performance transparent flexible electrode. Nanotechnology, 2013, 24(33): 335202,
CrossRef Google scholar
[23]
Lee J, Lee P, Lee H, et al.. Very long Ag nanowire synthesis and its application in a highly transparent, conductive and flexible metal electrode touch panel. Nanoscale, 2012, 4(20): 6408-6414,
CrossRef Google scholar
[24]
De S, Higgins TM, Lyons PE, et al.. Silver nanowire networks as flexible, transparent, conducting films: extremely high DC to optical conductivity ratios. ACS Nano, 2009, 3(7): 1767-1774,
CrossRef Google scholar
[25]
Kang M, Kim J, Jang B, et al.. Graphene-based three-dimensional capacitive touch sensor for wearable electronics. ACS Nano, 2017, 11(8): 7950-7957,
CrossRef Google scholar
[26]
Pang L, Zhao QL, Sheng TY, et al.. Enhanced pressure & proximity sensitivities of a flexible transparent capacitive sensor with PZT nanowires. IOP Conf Ser: Mater Sci Eng, 2019, 479: 012035,
CrossRef Google scholar
[27]
Qin Y, Xu H, Li S, et al.. Dual-mode flexible capacitive sensor for proximity-tactile interface and wireless perception. IEEE Sens J, 2022, 22(11): 10446-10453,
CrossRef Google scholar
[28]
Xu H, Gao L, Wang Y, et al.. Flexible waterproof piezoresistive pressure sensors with wide linear working range based on conductive fabrics. Nanomicro Lett, 2020, 12(1): 159,
CrossRef Google scholar
[29]
Liu X, Miao J, Fan Q, et al.. Recent progress on smart fiber and textile based wearable strain sensors: materials, fabrications and applications. Adv Fiber Mater, 2022, 4(3): 361-389,
CrossRef Google scholar
[30]
Ye X, Shi B, Li M, et al.. All-textile sensors for Boxing punch force and velocity detection. Nano Energy, 2022, 97: 107114,
CrossRef Google scholar
[31]
Jin J, Lee D, Im HG, et al.. Chitin nanofiber transparent paper for flexible green electronics. Adv Mater, 2016, 28(26): 5169-5175,
CrossRef Google scholar
[32]
Wang X, Liu Y, Liu X, et al.. Degradable gelatin-based supramolecular coating for green paper sizing. ACS Appl Mater Interfaces, 2021, 13(1): 1367-1376,
CrossRef Google scholar
[33]
Chen C, Zhao X, Chen Y, et al.. Reversible writing/re-writing polymeric paper in multiple environments. Adv Funct Materials, 2021, 31(37): 2104784,
CrossRef Google scholar
[34]
Sadri B, Goswami D, Sala de Medeiros M, et al.. Wearable and implantable epidermal paper-based electronics. ACS Appl Mater Interfaces, 2018, 10(37): 31061-31068,
CrossRef Google scholar
[35]
Aeby X, Poulin A, Siqueira G, et al.. Fully 3D printed and disposable paper supercapacitors. Adv Mater, 2021, 33(26): e2101328,
CrossRef Google scholar
[36]
Gong S, Schwalb W, Wang Y, et al.. A wearable and highly sensitive pressure sensor with ultrathin gold nanowires. Nat Commun, 2014, 5: 3132,
CrossRef Google scholar
[37]
Zhan Z, Lin R, Tran VT, et al.. Paper/carbon nanotube-based wearable pressure sensor for physiological signal acquisition and soft robotic skin. ACS Appl Mater Interfaces, 2017, 9(43): 37921-37928,
CrossRef Google scholar
[38]
Chen S, Song Y, Xu F. Flexible and highly sensitive resistive pressure sensor based on carbonized crepe paper with corrugated structure. ACS Appl Mater Interfaces, 2018, 10(40): 34646-34654,
CrossRef Google scholar
[39]
Zhao P, Zhang R, Tong Y, et al.. Shape-designable and reconfigurable all-paper sensor through the sandwich architecture for pressure/proximity detection. ACS Appl Mater Interfaces, 2021, 13(41): 49085-49095,
CrossRef Google scholar
[40]
Yuan L, Yao B, Hu B, et al.. Polypyrrole-coated paper for flexible solid-state energy storage. Energy Environ Sci, 2013, 6(2): 470-476,
CrossRef Google scholar
[41]
Liu YQ, Zhang YL, Jiao ZZ, et al.. Directly drawing high-performance capacitive sensors on copying tissues. Nanoscale, 2018, 10(36): 17002-17006,
CrossRef Google scholar
[42]
Lee C, Jug L, Meng E. High strain biocompatible polydimethylsiloxane-based conductive graphene and multiwalled carbon nanotube nanocomposite strain sensors. Appl Phys Lett, 2013, 102(18): 183511,
CrossRef Google scholar
[43]
Zhao X, Tong Y, Tang Q, et al.. Wafer-scale coplanar electrodes for 3D conformal organic single-crystal circuits. Adv Elect Materials, 2015, 1(12): 1500239,
CrossRef Google scholar
[44]
Shi H, Al-Rubaiai M, Holbrook CM, et al.. Screen-printed soft capacitive sensors for spatial mapping of both positive and negative pressures. Adv Funct Mater, 2019, 29(23): 1809116,
CrossRef Google scholar
[45]
Park H, Kim JW, Hong SY, et al.. Microporous polypyrrole-coated graphene foam for high-performance multifunctional sensors and flexible supercapacitors. Adv Funct Materials, 2018, 28(33): 1707013,
CrossRef Google scholar
[46]
Khan S, Dang W, Lorenzelli L, et al.. Flexible pressure sensors based on screen-printed P(VDF-TrFE) and P(VDF-TrFE)/MWCNTs. IEEE Trans Semicond Manuf, 2015, 28(4): 486-493,
CrossRef Google scholar
[47]
Zhao P, Zhang R, Tong Y, et al.. Strain-discriminable pressure/proximity sensing of transparent stretchable electronic skin based on PEDOT: PSS/SWCNT electrodes. ACS Appl Mater Interfaces, 2020, 12(49): 55083-55093,
CrossRef Google scholar
[48]
Yao S, Zhu Y. Wearable multifunctional sensors using printed stretchable conductors made of silver nanowires. Nanoscale, 2014, 6(4): 2345-2352,
CrossRef Google scholar
[49]
Hua Q, Sun J, Liu H, et al.. Skin-inspired highly stretchable and conformable matrix networks for multifunctional sensing. Nat Commun, 2018, 9(1): 244,
CrossRef Google scholar
[50]
Sarwar MS, Dobashi Y, Preston C, et al.. Bend, stretch, and touch: locating a finger on an actively deformed transparent sensor array. Sci Adv, 2017, 3(3): e1602200,
CrossRef Google scholar
[51]
Bu D, Li SQ, Sang YM, et al.. High transparency flexible sensor for pressure and proximity sensing. Mod Phys Lett B, 2018, 32(32): 1850394,
CrossRef Google scholar
[52]
Gao D, Wang J, Ai K, et al.. Inkjet-printed iontronics for transparent, elastic, and strain-insensitive touch sensing matrix. Adv Intell Syst, 2020, 2(7): 2000088,
CrossRef Google scholar
[53]
Dai Y, Chen J, Tian W, et al.. A PVDF/Au/PEN multifunctional flexible human-machine interface for multidimensional sensing and energy harvesting for the Internet of Things. IEEE Sens J, 2020, 20(14): 7556-7568,
CrossRef Google scholar
[54]
Dai Y, Gao S. A flexible multi-functional smart skin for force, touch position, proximity, and humidity sensing for humanoid robots. IEEE Sens J, 2021, 21(23): 26355-26363,
CrossRef Google scholar
[55]
Melcher J, Yang D, Arlt G. Dielectric effects of moisture in polyimide. IEEE Trans Electr Insul, 1989, 24(1): 31-38,
CrossRef Google scholar
[56]
Ben-Yasharand G, Ya’akobovitz A. Electronic skin with embedded carbon nanotubes proximity sensors. IEEE Trans Electron Devices, 2021, 68(8): 4098-4103,
CrossRef Google scholar
[57]
Zheng K, Gu F, Wei H, et al.. Flexible, permeable, and recyclable liquid-metal-based transient circuit enables contact/noncontact sensing for wearable human-machine interaction. Small Methods, 2023, 7(4): e2201534,
CrossRef Google scholar
[58]
Zhang R, Hummelgård M, Örtegren J, et al.. The triboelectricity of the human body. Nano Energy, 2021, 86: 106041,
CrossRef Google scholar
[59]
Dong K, Peng X, Wang ZL. Fiber/fabric-based piezoelectric and triboelectric nanogenerators for flexible/stretchable and wearable electronics and artificial intelligence. Adv Mater, 2020, 32(5): e1902549,
CrossRef Google scholar
[60]
Chalmers GK. The lodestone and the understanding of matter in seventeenth century England. Philos Sci, 1937, 4(1): 75-95,
CrossRef Google scholar
[61]
Henniker J. Triboelectricity in polymers. Nature, 1962, 196(4853): 474,
CrossRef Google scholar
[62]
Davies DK. Charge generation on dielectric surfaces. J Phys D: Appl Phys, 1969, 2(11): 1533-1537,
CrossRef Google scholar
[63]
Wang ZL. Self-powered nanosensors and nanosystems. Adv Mater, 2012, 24(2): 280-285,
CrossRef Google scholar
[64]
Wang S, Lin L, Xie Y, et al.. Sliding-triboelectric nanogenerators based on in-plane charge-separation mechanism. Nano Lett, 2013, 13(5): 2226-2233,
CrossRef Google scholar
[65]
Wang S, Xie Y, Niu S, et al.. Freestanding triboelectric-layer-based nanogenerators for harvesting energy from a moving object or human motion in contact and non-contact modes. Adv Mater, 2014, 26(18): 2818-2824,
CrossRef Google scholar
[66]
Yang Y, Zhang H, Chen J, et al.. Single-electrode-based sliding triboelectric nanogenerator for self-powered displacement vector sensor system. ACS Nano, 2013, 7(8): 7342-7351,
CrossRef Google scholar
[67]
Ren Z, Nie J, Shao J, et al.. Fully elastic and metal-free tactile sensors for detecting both normal and tangential forces based on triboelectric nanogenerators. Adv Funct Materials, 2018, 28(31): 1802989,
CrossRef Google scholar
[68]
Wang F, Ren Z, Nie J, et al.. Self-powered sensor based on bionic antennae arrays and triboelectric nanogenerator for identifying noncontact motions. Adv Mater Technol, 2020, 5(1): 1900789,
CrossRef Google scholar
[69]
Anaya DV, Zhan K, Tao L, et al.. Contactless tracking of humans using non-contact triboelectric sensing technology: enabling new assistive applications for the elderly and the visually impaired. Nano Energy, 2021, 90: 106486,
CrossRef Google scholar
[70]
Shrestha K, Sharma S, Pradhan GB, et al.. A siloxene/ecoflex nanocomposite-based triboelectric nanogenerator with enhanced charge retention by MoS2/LIG for self-powered touchless sensor applications. Adv Funct Mater, 2022, 32(27): 2113005,
CrossRef Google scholar
[71]
Tu S, Jiang Q, Zhang X, et al.. Large dielectric constant enhancement in MXene percolative polymer composites. ACS Nano, 2018, 12(4): 3369-3377,
CrossRef Google scholar
[72]
Guo ZH, Wang HL, Shao J, et al.. Bioinspired soft electroreceptors for artificial precontact somatosensation. Sci Adv, 2022, 8(21): eabo5201,
CrossRef Google scholar
[73]
Zhang S, Wang Y, Yao X, et al.. Stretchable electrets: nanoparticle-elastomer composites. Nano Lett, 2020, 20(6): 4580-4587,
CrossRef Google scholar
[74]
Lai YC, Deng J, Liu R, et al.. Actively perceiving and responsive soft robots enabled by self-powered, highly extensible, and highly sensitive triboelectric proximity- and pressure-sensing skins. Adv Mater, 2018, 30(28): e1801114,
CrossRef Google scholar
[75]
Helseth LE. Triboelectric proximity and contact detection using soft planar spiral electrodes. Smart Mater Struct, 2019, 28(9): 095009,
CrossRef Google scholar
[76]
Wang H, Tang Q, Zhao X, et al.. Ultrasensitive flexible proximity sensor based on organic crystal for location detection. ACS Appl Mater Interfaces, 2018, 10(3): 2785-2792,
CrossRef Google scholar
[77]
Reyes-Martinez MA, Crosby AJ, Briseno AL. Rubrene crystal field-effect mobility modulation via conducting channel wrinkling. Nat Commun, 2015, 6: 6948,
CrossRef Google scholar
[78]
Wu Y, Chew AR, Rojas GA, et al.. Strain effects on the work function of an organic semiconductor. Nat Commun, 2016, 7: 10270,
CrossRef Google scholar
[79]
Yao Y, Dong H, Hu W. Charge transport in organic and polymeric semiconductors for flexible and stretchable devices. Adv Mater, 2016, 28(22): 4513-4523,
CrossRef Google scholar
[80]
Reyes-Martinez MA, Ramasubramaniam A, Briseno AL, et al.. The intrinsic mechanical properties of rubrene single crystals. Adv Mater, 2012, 24(41): 5548-5552,
CrossRef Google scholar
[81]
Wang ZL. Triboelectric nanogenerators as new energy technology for self-powered systems and as active mechanical and chemical sensors. ACS Nano, 2013, 7(11): 9533-9557,
CrossRef Google scholar
[82]
Meng B, Tang W, Too ZH, et al.. A transparent single-friction-surface triboelectric generator and self-powered touch sensor. Energy Environ Sci, 2013, 6(11): 3235-3240,
CrossRef Google scholar
[83]
Chen X, Song Y, Su Z, et al.. Flexible fiber-based hybrid nanogenerator for biomechanical energy harvesting and physiological monitoring. Nano Energy, 2017, 38: 43-50,
CrossRef Google scholar
[84]
Ma M, Zhang Z, Liao Q, et al.. Self-powered artificial electronic skin for high-resolution pressure sensing. Nano Energy, 2017, 32: 389-396,
CrossRef Google scholar
[85]
Wang H, Tong Y, Zhao X, et al.. Ultrasensitive charged object detection based on rubrene crystal sensor. IEEE Trans Electron Devices, 2019, 66(7): 3139-3143,
CrossRef Google scholar
[86]
Lv G, Wang H, Tong Y, et al.. Flexible, conformable organic semiconductor proximity sensor array for electronic skin. Adv Mater Interfaces, 2020, 7(16): 2000306,
CrossRef Google scholar
[87]
Za'aba NK, Morrison JJ, Taylor DM. Effect of relative humidity and temperature on the stability of DNTT transistors: a density of states investigation. Org Electron, 2017, 45: 174-181,
CrossRef Google scholar
[88]
Liu W, Niu Y, Chen Q, et al.. High-performance proximity sensors with nanogroove-template-enhanced extended-gate field-effect transistor configuration. Adv Electr Mater, 2019, 5(12): 1900586,
CrossRef Google scholar
[89]
Shoji I, Wada H, Uto K, et al.. Visualizing quasi-static electric fields with flexible and printed organic transistors. Adv Mater Technol, 2021, 6(12): 2100723,
CrossRef Google scholar
[90]
Matsui H, Takeda Y, Tokito S. Flexible and printed organic transistors: from materials to integrated circuits. Org Electron, 2019, 75: 105432,
CrossRef Google scholar
[91]
Shiwaku R, Matsui H, Hayasaka K, et al.. Printed organic inverter circuits with ultralow operating voltages. Adv Elect Materials, 2017, 3(5): 1600557,
CrossRef Google scholar
[92]
Kedambaimoole V, Kumar N, Shirhatti V, et al.. Reduced graphene oxide tattoo as wearable proximity sensor. Adv Elect Materials, 2021, 7(4): 2001214,
CrossRef Google scholar
[93]
Eda G, Fanchini G, Chhowalla M. Large-area ultrathin films of reduced graphene oxide as a transparent and flexible electronic material. Nat Nanotechnol, 2008, 3(5): 270-274,
CrossRef Google scholar
[94]
Zhao GD, Zhao L, Wang HT, et al.. Flexible, conformal composite proximity sensor for detection of conductor and insulator. Chin J Anal Chem, 2022, 50(1): 20-23,
CrossRef Google scholar

Accesses

Citations

Detail

Sections
Recommended

/