Thermal conductivity hydrogen sensor: From fundamental principles to smart gas sensing applications

Fanfan Ke , Zipeng Wu , Ling Yin , Zhaofang Cheng , Minggang Xia

Thermo-X ›› 2026, Vol. 2 ›› Issue (2) : 202605

PDF (10699KB)
Thermo-X ›› 2026, Vol. 2 ›› Issue (2) :202605 DOI: 10.70401/tx.2026.0017
Review
research-article
Thermal conductivity hydrogen sensor: From fundamental principles to smart gas sensing applications
Author information +
History +
PDF (10699KB)

Abstract

Hydrogen is widely recognized as the leading green energy carrier of the 21st century, owing to its diverse production pathways, high combustion energy density, and environmentally benign byproduct: water. However, its wide flammability range (4-75 vol.% in air) and extremely low minimum ignition energy (0.02 mJ) pose significant safety risks across the entire lifecycle of production, storage, transportation, and utilization, necessitating real-time monitoring through highly reliable sensing technologies. Among various hydrogen detection methods, thermal conductivity sensors have attracted considerable attention due to their oxygen-independent operation, broad measuring range, mechanical robustness, and long service lifespan. Despite growing research interest, there remains a notable lack of comprehensive review articles specifically dedicated to thermal conductivity hydrogen sensors (TCHSs) that consolidate the current state of knowledge and guide future research directions. This paper presents a systematic analysis of the working principles and operating modes of TCHSs, introduces key performance parameters, and reviews theoretical models describing the effective thermal conductivity of gas mixtures. The discussion covers representative sensor architectures, gas inlet configurations, and critical environmental factors influencing sensor performance. Furthermore, recent advances and emerging trends are examined, with particular emphasis on smart gas sensing technologies enabled by sensor integration and advanced machine learning algorithms. This study aims to serve as a comprehensive academic reference, offering a clear and structured framework for researchers, particularly those newly entering the field of hydrogen sensing.

Keywords

Thermal conductivity hydrogen sensor / sensing principle / operating mode / structural design / smart gas sensing applications

Cite this article

Download citation ▾
Fanfan Ke, Zipeng Wu, Ling Yin, Zhaofang Cheng, Minggang Xia. Thermal conductivity hydrogen sensor: From fundamental principles to smart gas sensing applications. Thermo-X, 2026, 2 (2) : 202605 DOI:10.70401/tx.2026.0017

登录浏览全文

4963

注册一个新账户 忘记密码

References

[1]

Darmadi I, Nugroho FAA, Langhammer C. High-performance nanostructured palladium-based hydrogen sensors-current limitations and strategies for their mitigation. ACS Sens. 2020; 5(11):3306-3327.

[2]

Dutta S. Review on solar hydrogen: Its prospects and limitations. Energy Fuels. 2021; 35(15):11613-11639.

[3]

Edwards PP, Kuznetsov VL, David WIF. Hydrogen energy. Phil Trans R Soc A. 2007; 365(1853):1043-1056.

[4]

Germscheidt RL, Moreira DEB, Yoshimura RG, Gasbarro NP, Datti E, dos Santos PL, et al. Hydrogen environmental benefits depend on the way of production: An overview of the main processes production and challenges by 2050. Adv Energy Sustain Res. 2021; 2(10):2100093.

[5]

Staffell I, Scamman D, Velazquez Abad A, Balcombe P, Dodds PE, Ekins P, et al. The role of hydrogen and fuel cells in the global energy system. Energy Environ Sci. 2019; 12(2):463-491.

[6]

Pan A, Liu J, Liu Z, Yang Y, Yang X, Zhang M. Application of hydrogen energy and review of current conditions. IOP Conf Ser Earth Environ Sci. 2020; 526(1):012124.

[7]

Abe JO, Popoola API, Ajenifuja E, Popoola OM. Hydrogen energy, economy and storage: Review and recommendation. Int J Hydrog Energy. 2019; 44(29):15072-15086.

[8]

Wang C, Zhao L, Qu J, Xiao Y, Deng J, Shu CM. Minireview on the leakage ignition and flame propagation characteristics of hydrogen: Advances and perspectives. Energy Fuels. 2023; 37(8):5653-5666.

[9]

Urs KMB, Sahoo K, Bhat N, Kamble V. Complementary metal oxide semiconductor-compatible top-down fabrication of a Ni/NiO nanobeam room temperature hydrogen sensor device. ACS Appl Electron Mater. 2022; 4(1):87-91.

[10]

Wu Z, Zhang X, Chen L, Lou Q, Zong D, Deng K, et al. Ultra-low-power, extremely stable, highly linear-response thermal conductivity sensor based on a suspended device with single bare Pt nanowire. ACS Sens. 2024; 9(9):4721-4730.

[11]

Harumoto T, Fujiki H, Shi J, Nakamura Y. Extremely simple structure hydrogen gas sensor based on single metallic thin-wire under sweep heating. Int J Hydrog Energy. 2022; 47(80):34291-34298.

[12]

Simon I, Arndt M. Thermal and gas-sensing properties of a micromachined thermal conductivity sensor for the detection of hydrogen in automotive applications. Sens Actuat A Phys. 2002;97-98:104-108.

[13]

Berndt D, Muggli J, Wittwer F, Langer C, Heinrich S, Knittel T, et al. MEMS-based thermal conductivity sensor for hydrogen gas detection in automotive applications. Sens Actuat A Phys. 2020; 305:111670.

[14]

Xie D, Zhang Y, He D, Yang Y, Liu R, Xing C, et al. A high heat transfer efficiency MEMS thermal conductivity gas sensor with bridge structure for hydrogen detection. In: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS); 2024 Jan 21-25; Austin, USA. Piscataway: IEEE; 2024. p. 879-882.

[15]

Harumoto T, Shi J, Nakamura Y, Fujiki H. Enhanced hydrogen gas detectability of sweep heating thin-wire thermal conductivity detector. Sens Actuat A Phys. 2023; 358:114446.

[16]

Zhang D, Sun YE, Jiang C, Zhang Y. Room temperature hydrogen gas sensor based on palladium decorated tin oxide/molybdenum disulfide ternary hybrid via hydrothermal route. Sens Actuat B Chem. 2017; 242:15-24.

[17]

Wang C, Jin J, Li Y, Ding W, Dai M. Design and fabrication of a MEMS-based gas sensor containing WO3 sensitive layer for detection of NO2. J Micro/Nanolith MEMS MOEMS. 2017; 16(1):015002.

[18]

Chen Y, Li M, Yan W, Zhuang X, Ng KW, Cheng X. Sensitive and low-power metal oxide gas sensors with a low-cost microelectromechanical heater. ACS Omega. 2021; 6(2):1216-1222.

[19]

Elshaer A, Ecoffey S, Jaouad A, Monfray S, Drouin D. CMOS compatible hydrogen sensor using platinum gate and ALD-aluminum oxide. Sensors. 2024; 24(10):3020.

[20]

Ma E, Xu Z, Sun A, Yang S, Jiang J. High-performance hydrogen gas sensor based on Pd-doped MoS2/Si heterojunction. Sensors. 2025; 25(15):4753.

[21]

Björnsson L, Hörnsten EG, Mattiasson B. Utilization of a palladium-metal oxide semiconductor (Pd-MOS) sensor for on-line monitoring of dissolved hydrogen in anaerobic digestion. Biotechnol Bioeng. 2001; 73(1):35-43.

[22]

Korotcenkov G, Han SD, Stetter JR. Review of electrochemical hydrogen sensors. Chem Rev. 2009; 109(3):1402-1433.

[23]

Zhi Z, Gao W, Yang J, Geng C, Yang B, Tian C, et al. Amperometric hydrogen gas sensor based on Pt/C/Nafion electrode and ionic electrolyte. Sens Actuat B Chem. 2022; 367:132137.

[24]

Jo MS, Kim KH, Lee JS, Kim SH, Yoo JY, Choi KW, et al. Ultrafast (∼0.6 s), robust, and highly linear hydrogen detection up to 10% using fully suspended pure Pd nanowire. ACS Nano. 2023; 17(23):23649-23658.

[25]

Hwang BJ, Liu YC, Chen YL. Characteristics of Pt/Nafion® electrodes prepared by a Takenata-Torikai method in sensing hydrogen. Mater Chem Phys. 2001; 69(1-3):267-273.

[26]

Huang Z, Yang W, Zhang Y, Yin J, Sun X, Sun J, et al. Miniaturized electrochemical gas sensor with a functional nanocomposite and thin ionic liquid interface for highly sensitive and rapid detection of hydrogen. Anal Chem. 2024; 96(45):17960-17968.

[27]

Rîmbu GA, Pîslaru-Dănescu L, Zărnescu GC, Ștefănescu CA, Iordoc M, Teișanu AA, et al. Electrochemical sensor for hydrogen leakage detection at room temperature. Sensors. 2025; 25(1):264.

[28]

Jang W, Park JS, Lee KW, Roh Y. Methane and hydrogen sensing properties of catalytic combustion type single-chip micro gas sensors with two different Pt film thicknesses for heaters. Micro Nano Syst Lett. 2018; 6(1):7.

[29]

Lee EB, Hwang IS, Cha JH, Lee HJ, Lee WB, Pak JJ, et al. Micromachined catalytic combustible hydrogen gas sensor. Sens Actuat B Chem. 2011; 153(2):392-397.

[30]

Del Orbe DV, Yang H, Cho I, Park J, Choi J, Han SW, et al. Low-power thermocatalytic hydrogen sensor based on electrodeposited cauliflower-like nanostructured Pt black. Sens Actuat B Chem. 2021; 329:129129.

[31]

Zhang H, Jia H, Ni Z, Li M, Chen Y, Xu P, et al. 1ppm-detectable hydrogen gas sensors by using highly sensitive P+/N+ single-crystalline silicon thermopiles. Microsyst Nanoeng. 2023; 9:29.

[32]

Theodoridis A, Andersson C, Nilsson S, Fritzsche J, Langhammer C. A catalytic-plasmonic Pt nanoparticle sensor for hydrogen detection in high-humidity environments. ACS Sens. 2025; 10(11):8983-8994.

[33]

Liu X, Dong H, Xia S. Micromachined catalytic combustion type gas sensor for hydrogen detection. Micro Nano Lett. 2013; 8(10):668-671.

[34]

Nugroho FAA, Darmadi I, Cusinato L, Susarrey-Arce A, Schreuders H, Bannenberg LJ, et al. Metal-polymer hybrid nanomaterials for plasmonic ultrafast hydrogen detection. Nat Mater. 2019; 18(5):489-495.

[35]

Sirbuly DJ, Létant SE, Ratto TV. Hydrogen sensing with subwavelength optical waveguides via porous silsesquioxane-palladium nanocomposites. Adv Mater. 2008; 20(24):4724-4727.

[36]

Han H, Baik S, Xu B, Seo J, Lee S, Shin S, et al. Bioinspired geometry-switchable Janus nanofibers for eye-readable H2 sensors. Adv Funct Mater. 2017; 27(29):1701618.

[37]

Wong JY, Schell M. Zero drift NDIR gas sensors. Sens Rev. 2011; 31(1):70-77.

[38]

Vincent TA, Gardner JW. A low cost MEMS based NDIR system for the monitoring of carbon dioxide in breath analysis at ppm levels. Sens Actuat B Chem. 2016; 236:954-964.

[39]

Kulikova DP, Sgibnev YM, Yankovskii GM, Chubchev ED, Lotkov ES, Ezenkova DA, et al. Optical hydrogen sensing with high-Q guided-mode resonance of Al2O3/WO3/Pd nanostructure. Sci Rep. 2023; 13(1):890.

[40]

Avetisov V, Bjoroey O, Wang J, Geiser P, Paulsen KG. Hydrogen sensor based on tunable diode laser absorption spectroscopy. Sensors. 2019; 19(23):5313.

[41]

Foorginezhad S, Mohseni-Dargah M, Falahati Z, Abbassi R, Razmjou A, Asadnia M. Sensing advancement towards safety assessment of hydrogen fuel cell vehicles. J Power Sources. 2021; 489:229450.

[42]

Hübert T, Boon-Brett L, Black G, Banach U. Hydrogen sensors-A review. Sens Actuat B Chem. 2011; 157(2):329-352.

[43]

Zhang C, Wang T, Zhang G, Gao R, Gao C, Wang Z, et al. Rational design and fabrication of MEMS gas sensors with long-term stability: A comprehensive review. Adv Sci. 2025; 12(39):e11555.

[44]

Chaparia M Deepak, Choubey RK, Dwivedi UK. Metal oxide semiconductors for gas sensors: A comprehensive review of materials, mechanisms, and performance. Mater Sci Semicond Process. 2026; 204:110280.

[45]

Ramaiyan K, Tsui LK, Brosha EL, Kreller C, Stetter JR, Russ T, et al. Recent developments in sensor technologies for enabling the hydrogen economy. ECS Sens Plus. 2023; 2(4):045601.

[46]

Salimian F, Hemmati A, Ghaemi A. A review of nanostructured carbon dioxide sensors based on electrical and thermal conductivity. Results Eng. 2025; 26:105633.

[47]

Wang C, Yang J, Li J, Luo C, Xu X, Qian F. Solid-state electrochemical hydrogen sensors: A review. Int J Hydrog Energy. 2023; 48(80):31377-31391.

[48]

Yu Y, Hu Z, Lien SY, Yu Y, Gao P. Self-powered thermoelectric hydrogen sensors based on low-cost bismuth sulfide thin films: Quick response at room temperature. ACS Appl Mater Interfaces. 2022; 14(42):47696-47705.

[49]

Crucello J, de Oliveira AM, Sampaio NMFM, Hantao LW. Miniaturized systems for gas chromatography: Developments in sample preparation and instrumentation. J Chromatogr A. 2022; 1685:463603.

[50]

Ejeian F, Azadi S, Razmjou A, Orooji Y, Kottapalli A, Ebrahimi Warkiani M, et al. Design and applications of MEMS flow sensors: A review. Sens Actuat A Phys. 2019; 295:483-502.

[51]

U.S. Department of Energy. Fuel Cell Technologies Program multi-year research, development, and demonstration plan:section 3.7 hydrogen safety, codes and standards[Internet]. Washington (DC): U.S. Department of Energy; 2015. Available from: https://www.energy.gov/sites/default/files/2015/06/f23/fcto_myrdd_safety_codes.pdf

[52]

Gardner ELW, Gardner JW, Udrea F. Micromachined thermal gas sensors: A review. Sensors. 2023; 23(2):681.

[53]

Clausius R. LXXI. On the conduction of heat by gases. Lond Edinb Dublin Philos Mag J Sci. 1862; 23(157):512-534.

[54]

Lindsay AL, Bromley LA. Thermal conductivity of gas mixtures. Ind Eng Chem. 1950; 42(8):1508-1511.

[55]

Li J, Zhao H, Wang Y, Zhou Y. Approaches for selectivity improvement of conductometric gas sensors: An overview. Sens Diagn. 2024; 3(3):336-353.

[56]

Feng S, Farha F, Li Q, Wan Y, Xu Y, Zhang T, et al. Review on smart gas sensing technology. Sensors. 2019; 19(17):3760.

[57]

Boon-Brett L, Black G, Moretto P, Bousek J. A comparison of test methods for the measurement of hydrogen sensor response and recovery times. Int J Hydrog Energy. 2010; 35(14):7652-7663.

[58]

Palmer PE, Weaver ER. Thermal conductivity method for the analysis of gases. J Frankl Inst. 1924; 197(4):554-555.

[59]

Zhang Y, Xie D, Yang Y, Xing C, Chen D, Xu L. High heat transfer efficiency MEMS thermal conductivity gas sensor for hydrogen. IEEE Sens J. 2024; 24(19):29678-29686.

[60]

Cho W, Yoo J, Kwak JH, Shin H. Suspended 1D nanoheaters for ultralow-power thermal conductivity detector-type gas sensors fabricated via a simple four-step wafer-scale process. Sens Actuat B Chem. 2025; 443:138283.

[61]

Mahdavifar A, Navaei M, Hesketh PJ, Findlay M, Stetter JR, Hunter GW. Transient thermal response of micro-thermal conductivity detector (µTCD) for the identification of gas mixtures: An ultra-fast and low power method. Microsyst Nanoeng. 2015; 1:15025.

[62]

Cheng C, Fan W, Cao J, Ryu SG, Ji J, Grigoropoulos CP, et al. Heat transfer across the interface between nanoscale solids and gas. ACS Nano. 2011; 5(12):10102-10107.

[63]

Wang J, Liu Y, Zhou H, Wang Y, Wu M, Huang G, et al. Thermal conductivity gas sensor with enhanced flow-rate independence. Sensors. 2022; 22(4):1308.

[64]

Feng F, Tian B, Hou L, Yu Z, Zhou H, Ge X, et al. 2017 June 18-22; Kaohsiung, Taiwan. High sensitive micro thermal conductivity detector with sandwich structure. 2017 19th international conference on solid-state sensors, actuators and microsystems (TRANSDUCERS); Piscataway: IEEE; 2017. p.1433-1436.

[65]

Hayashi Y, Yamazaki H, Masunishi K, Ono D, Saito T, Nakamura N, et al. Integrated hybrid MEMS hydrogen sensor with high sensitivity and high dynamic range. Electr Eng Jpn. 2021; 214(2):e23317.

[66]

Xie Y, Karamati A, Wang X. Transient electro-thermal technique for measuring the thermal diffusivity/conductivity of 1D/2D materials: From mm down to atomic scale thickness. Thermo X. 2025; 1(1).

[67]

Healy JJ, de Groot JJ, Kestin J. The theory of the transient hot-wire method for measuring thermal conductivity. Phys B+C. 1976; 82(2):392-408.

[68]

Cho W, Kim T, Shin H. Thermal conductivity detector (TCD)-type gas sensor based on a batch-fabricated 1D nanoheater for ultra-low power consumption. Sens Actuat B Chem. 2022; 371:132541.

[69]

Akasaka S, Terumoto K, Kanno I. 2024 Oct 20-23; Kobe, Temperature dependence of accuracy of thermal conductivity hydrogen sensor. In: 2024 ieee sensors; 2024 Oct 20-23; Kobe, Japan. Piscataway: IEEE; 2024. p. 1-4.

[70]

Kato T, Tanaka T, Uchida K. Detection of PPB-level H2S concentrations in exhaled breath using Au nanosheet sensors with small variability, high selectivity, and long-term stability. ACS Sens. 2024; 9(2):708-716.

[71]

Cruz D, Chang J, Showalter S, Gelbard F, Manginell R, Blain M. Microfabricated thermal conductivity detector for the micro-ChemLab™. Sens Actuat B Chem. 2007; 121(2):414-422.

[72]

Thompson D, Zhu L, Mittapally R, Sadat S, Xing Z, McArdle P, et al. Hundred-fold enhancement in far-field radiative heat transfer over the blackbody limit. Nature. 2018; 561(7722):216-221.

[73]

Salihoglu H, Nam W, Traverso L, Segovia M, Venuthurumilli PK, Liu W, et al. Near-field thermal radiation between two plates with sub-10 nm vacuum separation. Nano Lett. 2020; 20(8):6091-6096.

[74]

Rousseau E, Siria A, Jourdan G, Volz S, Comin F, Chevrier J, et al. Radiative heat transfer at the nanoscale. Nat Photonics. 2009; 3:514-517.

[75]

Zhukov VP, Pätz M. On thermal conductivity of gas mixtures containing hydrogen. Heat Mass Transf. 2017; 53(6):2219-2222.

[76]

Weaver ER, Palmer PE, Frantz HW, Ledig PG, Pickering SF. Automatic methods of gas analysis depending upon thermal conductivity. J Ind Eng Chem. 1920; 12(4):359-366.

[77]

Weber S. Theoretische und experimentelle untersuchungen über die Wärmeleitfähigkeit von gasgemischen. Ann Der Phys. 1917; 359(23):481-502.

[78]

Mathur S, Tondon PK, Saxena SC. Thermal conductivity of binary, ternary and quaternary mixtures of rare gases. Mol Phys. 1967; 12(6):569-579.

[79]

Udoetok ES. Thermal conductivity of binary mixtures of gases. Front Heat Mass Transf. 2013; 4(2):1-5.

[80]

Zhukov VP. Computational fluid dynamics simulations of a GO2/GH2 single element combustor. J Propuls Power. 2015; 31(6):1707-1714.

[81]

Gray P, Holland S, Maczek AOS. Thermal conductivities of binary gaseous mixtures of hydrogen, deuterium, oxygen and nitrous oxide. Trans Faraday Soc. 1969; 65:1032.

[82]

Mason EA, Saxena SC. Approximate formula for the thermal conductivity of gas mixtures. Phys Fluids. 1958; 1(5):361-369.

[83]

Poling BE, Prausnitz JM, O'Connell JP. The Properties of Gases and Liquids. 5nd ed. New York: McGraw-Hill; 2000.

[84]

Chung TH, Ajlan M, Lee LL, Starling KE. Generalized multiparameter correlation for nonpolar and polar fluid transport properties. Ind Eng Chem Res. 1988; 27(4):671-679.

[85]

Hirschfelder JO, Bird RB, Spotz EL. The transport properties for non-polar gases. J Chem Phys. 1948; 16(10):968-981.

[86]

Curtiss CF, Hirschfelder JO. Transport properties of multicomponent gas mixtures. J Chem Phys. 1949; 17(6):550-555.

[87]

Emperhoff S, Eberl M, Dwertmann T, Wöllenstein J. On the influence of humidity on a thermal conductivity sensor for the detection of hydrogen. Sensors. 2024; 24(9):2697.

[88]

Sheoran J, Kumar R. Design and Characteristics of various types of gas sensors for hydrogen sulfide gas detection - A Review. J Phys Conf Ser. 2022; 2267(1):012008.

[89]

Chu SY, Wu MJ, Yeh TH, Lee CT, Lee HY. Sensing mechanism and characterization of NO2 gas sensors using gold-black NP-decorated Ga2O3 nanorod sensing membranes. ACS Sens. 2024; 9(1):118-125.

[90]

Bhati VS, Kumar M, Banerjee R. Gas sensing performance of 2D nanomaterials/metal oxide nanocomposites: A review. J Mater Chem C. 2021; 9(28):8776-8808.

[91]

Ménil F, Susbielles M, Debéda H, Lucat C, Tardy P. Evidence of a correlation between the non-linearity of chemical sensors and the asymmetry of their response and recovery curves. Sens Actuat B Chem. 2005; 106(1):407-423.

[92]

Gerblinger J, Meixner H. Fast oxygen sensors based on sputtered strontium titanate. Sens Actuat B Chem. 1991; 4(1-2):99-102.

[93]

Tobias P, Mårtensson P, Göras A, Lundström I, Lloyd Spetz A. Moving gas outlets for the evaluation of fast gas sensors. Sens Actuat B Chem. 1999; 58(1-3):389-393.

[94]

Sawaguchi N, Nishibori M, Tajima K, Shin W, Izu N, Murayama N, et al. Practical test methods for hydrogen gas sensor response characterization. Electrochemistry. 2006; 74(4):315-320.

[95]

Hoffmann M, Wienecke M, Ciudin R. MEMS-based hydrogen sensors:A state of the art review. In:2023 International Interdisciplinary PhD Workshop (IIPhDW); 2023 May 3-5; Wismar, Germany. Piscataway: IEEE; 2023. p. 1-4.

[96]

Kaanta BC, Chen H, Lambertus G, Steinecker WH, Zhdaneev O, Zhang X. High sensitivity micro-thermal conductivity detector for gas chromatography. In: 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems; 2009 Jan 25-29; Sorrento, Italy. Piscataway: IEEE; 2009. p. 264-267.

[97]

Jayaraj MK. Nanostructured metal oxides and devices: Optical and electrical properties. Singapore: Springer; 2020.

[98]

International Organization for Standardization. ISO 26142:2010:Hydrogen detection apparatus—Stationary applications [Internet]. Geneva (CH): International Organization for Standardization; 2010. Avaliable from: https://cdn.standards.iteh.ai/samples/52319/a5cab00c94b942dd831df4fc3b2d0956/ISO-26142-2010.pdf

[99]

Yan M, Tylczak J, Yu Y, Panagakos G, Ohodnicki P. Multi-component optical sensing of high temperature gas streams using functional oxide integrated silica based optical fiber sensors. Sens Actuat B Chem. 2018; 255:357-365.

[100]

Faleh R, Othman M, Kachouri A, Aguir K. Recognition of O 3 concentration using WO3 gas sensor and principal component analysis. In:2014 1st International Conference on Advanced Technologies for Signal and Image Processing (ATSIP); 2014 March 17-19; Sousse, Tunisia. Piscataway: IEEE; 2014. p. 322-327.

[101]

Tomchenko AA, Harmer GP, Marquis BT, Allen JW. Semiconducting metal oxide sensor array for the selective detection of combustion gases. Sens Actuat B Chem. 2003; 93(1-3):126-134.

[102]

Zhao X, Du L, Xing X, Li Z, Tian Y, Chen X, et al. Decorating Pd-Au nanodots around porous In2O3 nanocubes for tolerant H2 sensing against switching response and H2S poisoning. Small. 2024; 20(32):e2311840.

[103]

International Union of Pure and Applied Chemistry. Commission on spectrochemical and other optical procedures for analysis. Pure Appl Chem. 1976; 45(2):99-103.

[104]

Chai H, Zheng Z, Liu K, Xu J, Wu K, Luo Y, et al. Stability of metal oxide semiconductor gas sensors: A review. IEEE Sens J. 2022; 22(6):5470-5481.

[105]

Swager TM, Pioch TN, Feng H, Bergman HM, Luo SL, Valenza JJ II. Critical sensing modalities for hydrogen: Technical needs and status of the field to support a changing energy landscape. ACS Sens. 2024; 9(5):2205-2227.

[106]

Daynes HA, Shakespear GA. The theory of the katharometer. Proc R Soc Lond Ser A Contain Pap a Math Phys Character. 1920; 97(685):273-286.

[107]

Minter CC. The thermal conductivity method of gas analysis. J Chem Educ. 1946; 23(5):237.

[108]

Gomi H, Yoshino T. Resistivity, Seebeck coefficient, and thermal conductivity of platinum at high pressure and temperature. Phys Rev B. 2019; 100(21):214302.

[109]

Ibbs TL, Hirst AA. The thermal conductivity of gas mixtures. Proc A. 1929; 123(791):134-142.

[110]

Browning BL. Gas analysis by measurement of the thermal conductivity [dissertation]. Rolla(MO): Missouri School of Mines and Metallurgy; 1931. Avaliable from: https://scholarsmine.mst.edu/professional_theses/308/

[111]

Choi KW, Jo MS, Lee JS, Yoo JY, Yoon JB. Perfectly aligned, air-suspended nanowire array heater and its application in an always-on gas sensor. Adv Funct Mater. 2020; 30(39):2004448.

[112]

Chen H, Min X, Hui Y, Qin W, Zhang B, Yao Y, et al. Colloidal oxide nanoparticle inks for micrometer-resolution additive manufacturing of three-dimensional gas sensors. Mater Horiz. 2022; 9(2):764-771.

[113]

Gardner JW, Varadan VK, Awadelkarim OO. Microsensors, MEMS, and smart devices. Hoboken: John Wiley & Sons; 2001.

[114]

Han YF, Sun YZ, Wang M, Liu Q, Tao R. Products of sensors and MEMS. In: Wang Y, Chi MH, Lou JJ, Chen CZ. editors. Handbook of integrated circuit industry. Singapore: Springer; 2024. p. 357-381.

[115]

Liu Y, Ping M, Han J, Cheng X, Qin H, Wang W. Neural network methods in the development of MEMS sensors. Micromachines. 2024; 15(11):1368.

[116]

Petersen K. Silicon as a mechanical material. MRS Online Proc Libr. 1986; 76(1):99-110.

[117]

van Putten AFP. An integrated silicon double bridge anemometer. Sens Actuat. 1983; 4:387-396.

[118]

Narayanan S, Alfeeli B, Agah M. Two-port static coated micro gas chromatography column with an embedded thermal conductivity detector. IEEE Sens J. 2012; 12(6):1893-1900.

[119]

Chen X, Wong CKY, Yuan CA, Zhang G. Nanowire-based gas sensors. Sens Actuat B Chem. 2013; 177:178-195.

[120]

Chen B, Ma S, Zhu Y, Li W, Zhao B, Feng F. A micro thermal conductivity detector with diffusion channels suppressing the effect of forced convection. Microchem J. 2025; 208:112521.

[121]

Tan T, Sun J, Chen T, Zhang X, Zhu X. Fabrication of thermal conductivity detector based on MEMS for monitoring dissolved gases in power transformer. Sensors. 2019; 20(1):106.

[122]

Wang C, Jiao B, Liu X, Zhao C, Wu G, Liu R. Design of thermal conductivity gas sensor with silicon cap. In: 2023 IEEE 16th international conference on electronic measurement & instruments (ICEMI); 2023 August 9-11; Harbin, China. Piscataway: IEEE; IEEE 2023. p. 204-208.

[123]

Cheng L, Chen Y, Jiang T, Wang J, Li X, Xu P. A study on micropillar fin-integrated thermal conductivity sensor for hydrogen response speed enhancement and flow rate interference suppression. IEEE Trans Electron Devices. 2025; 72(6):3347-3351.

[124]

Kaanta BC, Chen H, Zhang X. A monolithically fabricated gas chromatography separation column with an integrated high sensitivity thermal conductivity detector. J Micromech Microeng. 2010; 20(5):055016.

[125]

de Graaf G, Prouza AA, Ghaderi M, Wolffenbuttel RF. Micro thermal conductivity detector with flow compensation using a dual MEMS device. Sens Actuat A Phys. 2016; 249:186-198.

[126]

Leonardi SG, Bonavita A, Donato N, Neri G. Development of a hydrogen dual sensor for fuel cell applications. Int J Hydrog Energy. 2018; 43(26):11896-11902.

[127]

Zou Z, Zhang H, Sun Y, Gao Y, Dou L. A thermal conductivity sensor based on mixed carbon material modification for hydrogen detection. Rev Sci Instrum. 2022; 93(3):035001.

[128]

Cho W, Yoo J, Kwak JH, Shin H. Eco-friendly fabrication of suspended 1D nanoheaters for ultralow power TCD-type gas sensors. In: 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS); 2025 Jan 19-23; Kaohsiung, Taiwan. Piscataway: IEEE; 2025. p. 885-887.

[129]

Struk D, Shirke A, Mahdavifar A, Hesketh PJ, Stetter JR. Investigating time-resolved response of micro thermal conductivity sensor under various modes of operation. Sens Actuat B Chem. 2018; 254:771-777.

[130]

Dong L, Xu Z, Xuan W, Yan H, Liu C, Zhao WS, et al. A characterization of the performance of gas sensor based on heater in different gas flow rate environments. IEEE Trans Ind Inf. 2020; 16(10):6281-6290.

[131]

Sun J, Chen T, Tan T, Wang D, Zhu X, Zhang X, et al. Fabrication and characterization of a novel micro-thermal conductivity detector for monitoring small-molecule gases. IEEE Sens J. 2020; 20(19):11115-11121.

[132]

Kestin J, Wakeham WA. Calculation of the influence of density on the thermal conductivity of gaseous mixtures. Ber Bunsenges Phys Chem. 1980; 84(8):762-769.

[133]

Bokhoven C, Dijkstra A. Effect of carrier gas on the sensitivity of thermal conductivity detectors. Nature. 1960; 186:793-794.

[134]

Holman JP. Heat Transfer. 9th ed. Boston: McGraw-Hill International Book Company; 2002.

[135]

Rothman AJ. Thermal Conductivity of Gases at High Temperatures [Internet]. Berkeley (CA): University of California Radiation Laboratory; 1954.Available from: https://escholarship.org/content/qt6vv328pc/qt6vv328pc.pdf?t=p0vhgm

[136]

Zhang H, Shen B, Hu W, Liu X. Research on a fast-response thermal conductivity sensor based on carbon nanotube modification. Sensors. 2018; 18(7):2191.

[137]

Kimura M, Manaka J, Satoh S, Takano S, Igarashi N, Nagai K. Application of the air-bridge microheater to gas detection. Sens Actuat B Chem. 1995; 25(1-3):857-860.

[138]

Arndt M. Micromachined thermal conductivity hydrogen detector for automotive applications. In: SENSORS, 2002 IEEE; 2002 June 12-14; Orlando, USA. Piscataway: IEEE; 2002. p. 1571-1575.

[139]

Dinh T, Nguyen T, Phan HP, Dau V, Dao D, Nguyen NT. Physical sensors: Thermal sensors. Encycl Sens Biosens. 2023; 1:20-33.

[140]

Lotfi A, Navaei M, Hesketh PJ. A platinum cantilever-based thermal conductivity detector for ammonia sensing using the 3-omega technique. ECS J Solid State Sci Technol. 2019; 8(6):Q126-Q133.

[141]

Mahdavifar A, Aguilar R, Peng Z, Hesketh PJ, Findlay M, Stetter JR, et al. Simulation and fabrication of an ultra-low power miniature microbridge thermal conductivity gas sensor. J Electrochem Soc. 2014; 161(4):B55-B61.

[142]

Kuo JTW, Yu L, Meng E. Micromachined thermal flow sensors: A review. Micromachines. 2012; 3(3):550-573.

[143]

Kaanta BC, Jonca AJ, Chen H, Zhang X. Temperature distribution on thermal conductivity detectors for flow rate insensitivity. Sens Actuat A Phys. 2011; 167(2):146-151.

[144]

Qin Y, Gianchandani YB. A fully electronic microfabricated gas chromatograph with complementary capacitive detectors for indoor pollutants. Microsyst Nanoeng. 2016; 2:15049.

[145]

Zhao B, Feng F, Tian B, Yu Z, Li X. Micro thermal conductivity detector based on SOI substrate with low detection limit. Sens Actuat B Chem. 2020; 308:127682.

[146]

Rastrello F, Placidi P, Scorzoni A, Cozzani E, Messina M, Elmi I, et al. Thermal conductivity detector for gas chromatography: Very wide gain range acquisition system and experimental measurements. IEEE Trans Instrum Meas. 2013; 62(5):974-981.

[147]

Reyes Romero DF, Kogan K, Cubukcu AS, Urban GA. Simultaneous flow and thermal conductivity measurement of gases utilizing a calorimetric flow sensor. Sens Actuat A Phys. 2013; 203:225-233.

[148]

Reyes-Romero DF, Cubukcu AS, Urban GA. Measurement and simulation of the frequency response of a thermal flow sensor at different flow speeds. Sens Actuat A Phys. 2013; 189:168-176.

[149]

Wu H, Grabarnik S, Emadi A, de Graaf G, Wolffenbuttel RF. Characterization of thermal cross-talk in a MEMS-based thermopile detector array. J Micromech Microeng. 2009; 19(7):074022.

[150]

Lafferty JM. Foundations of Vacuum Science and Technology. New York: John Wiley & Sons, Inc; 1998.

[151]

Incropera FP, DeWitt DP. Introduction to Heat Transfer. New York: John Wiley & Sons, Inc; 2002.

[152]

Langmuir I. The convection and conduction of heat in gases. Trans Am Inst Electr Eng. 1912; 1:1229-1240.

[153]

Brody I, Kőrösy F. Convection and conduction of heat in gases. J Appl Phys. 1939; 10(8):584-596.

[154]

Dickins BG. The effect of accommodation on heat conduction through gases. Proc A. 1934; 143(850):517-540.

[155]

Clifford AA, Gray P, Johns AI, Scott AC, Watson JTR. Thermal conductivities of argon, nitrogen and hydrogen between 300 and 400 K and up to 25 MPa. J Chem Soc Faraday Trans. 1981; 77(11):2679.

[156]

Moroe S, Woodfield PL, Kimura K, Kohno M, Fukai J, Fujii M, et al. Measurements of hydrogen thermal conductivity at high pressure and high temperature. Int J Thermophys. 2011; 32(9):1887.

[157]

Akimoto Y, Wang P, Kurui Y, Fujiwara N, Hiramatsu N, Ishibashi F, et al. Real-time sensing technology of mixed gas concentrations using multiple micromachined thermal conductivity detectors. Elect Comm Japan. 2025; 108:e12473.

[158]

Azadi Kenari S, Wiegerink RJ, Veltkamp HW, Sanders RGP, Lötters JC. Thermal flow meter with integrated thermal conductivity sensor. Micromachines. 2023; 14(7):1280.

[159]

Yu Y, Cao X, Li C, Zhou M, Liu T, Liu J, et al. A review of machine learning-assisted gas sensor arrays in medical diagnosis. Biosensors. 2025; 15(8):548.

[160]

Savio KT, Mishra A, Pandey AK, Singh SK, Sajana S, Adak C, et al. Data-driven approach toward the quantification of gases in a complex mixture using a non-selective single metal oxide gas sensor. ACS Sens. 2026.

[161]

Pradyumn , Barman PB, Sil A Hazra SK. Recent advancement in selective gas sensors and role of machine learning. J Alloys Compd. 2025; 1030:180757.

[162]

Stetter JR. Introduction:experimental methods in chemical sensor and sensor array evaluation and development. In: Ryan MA, Shevade AV, Taylor CJ, Homer ML, Blanco M, Stetter JR, editors. Computational methods for sensor material selection. New York: Springer; 2010. p. 3-46.

[163]

Herbeck-Tazibt J, Djeziri MA, Fiorido T, Seguin JL. Review of hydrogen sensors in aerobic and anaerobic environments coupled with artificial intelligence tools. Sensors. 2025; 25(22):6936.

[164]

Ghorbani B, Vijayaraghavan K. Developing a virtual hydrogen sensor for detecting fuel starvation in solid oxide fuel cells using different machine learning algorithms. Int J Hydrog Energy. 2020; 45(51):27730-27744.

[165]

Pandey V, Kumar A, Bharath SP, Auti CB, Kumar P, Gupta A, et al. Real-time hydrogen monitoring via Pd/g-C3N4 functionalized HEMT sensor with IoT connectivity and machine learning forecasting. Sens Actuat B Chem. 2026; 450:139217.

[166]

Karker N, Dharmalingam G, Carpenter MA. Thermal energy harvesting plasmonic based chemical sensors. ACS Nano. 2014; 8(10):10953-10962.

[167]

Luo W, Zheng Y, Liu Y, Li M. Identification of H2 and NH3 gases using calorimetric signals and transient response through machine learning. J Semicond. 2026; 47(2):022303.

[168]

Wang YT, Zou QK, Wang ZX, Jin T, Guo X. Intelligent early detection of lithium-ion battery thermal runaway via H₂/CO sensor arrays and signal processing algorithms. Sens Actuat B Chem. 2026; 451:139337.

[169]

Yaqoob U, Younis MI. Chemical gas sensors: Recent developments, challenges, and the potential of machine learning: A review. Sensors. 2021; 21(8):2877.

[170]

Zhang A, Zhang Y, Cheng W, Li X, Chen K, Li F, et al. Dual-gas sensing via SnO2-TiO2 heterojunction on MXene: Machine learning-enhanced selectivity and sensitivity for hydrogen and ammonia detection. Sens Actuat B Chem. 2025; 429:137340.

[171]

Luo W, Dai F, Liu Y, Wang X, Li M. Pulse-driven MEMS gas sensor combined with machine learning for selective gas identification. Microsyst Nanoeng. 2025; 11:72.

[172]

Li L, Zhou L, Chen Y, Chen X, Guo L, Zhang W, et al. Precision hydrogen detection in mixed atmospheres using temperature-modulated PdAu-In2O3 sensor arrays and machine learning algorithms. Chem Eng J. 2025; 520:165633.

[173]

Wu M, Wu Z, Chen H, Wu Z, Zhang P, Qi L, et al. A high-precision hydrogen sensor array based on Pt-modified SnO2 for suppressing humidity and oxygen interference. Chemosensors. 2025; 13(8):294.

[174]

Tang W, Chen Z, Song Z, Wang C, Wan ZA, Chan CLJ, et al. Microheater integrated nanotube array gas sensor for parts-per-trillion level gas detection and single sensor-based gas discrimination. ACS Nano. 2022; 16(7):10968-10978.

[175]

Zappa D, Kaur N, Moumen A, Comini E. Metal oxide nanowire-based sensor array for hydrogen detection. Micromachines. 2023; 14(11):2124.

[176]

Kim KH, Jo MS, Kim SH, Kim B, Kang J, Yoon JB, et al. Long-term reliable wireless H2 gas sensor via repeatable thermal refreshing of palladium nanowire. Nat Commun. 2024; 15:8761.

[177]

Strelcov E, Lilach Y, Kolmakov A. Gas sensor based on metal-insulator transition in VO2 nanowire thermistor. Nano Lett. 2009; 9(6):2322-2326.

[178]

Liu Q, Yao J, Wu Y, Wang Y, Ding G. Two operating modes of palladium film hydrogen sensor based on suspended micro hotplate. Int J Hydrog Energy. 2019; 44(21):11259-11265.

[179]

Li Z, Chen G, Guan J, Huang C, Gao Z, Chen X, et al. Confined graphitization of cellulose polymorphs enables high-performance piezoresistive electronics. Chem Eng J. 2025; 523:168681.

[180]

Choudhary M, Shrivastav A, Sinha AK, Chawla AK, Avasthi DK, Saravanan K, et al. Emerging nanomaterials for hydrogen sensing: Mechanisms and prospects. Int J Hydrog Energy. 2024; 77:557-574.

PDF (10699KB)

0

Accesses

0

Citation

Detail

Sections
Recommended

/