Advances in micro/nano-engineered flexible sensor arrays for intelligent human-machine interaction

Shiyi Wang , Xiaoliang Chen , Sheng Li , Bai Sun , Xiaoming Chen , Hongmiao Tian , Chunhui Wang , Xiangming Li , Jinyou Shao

Soft Science ›› 2025, Vol. 5 ›› Issue (3) : 28

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Soft Science ›› 2025, Vol. 5 ›› Issue (3) :28 DOI: 10.20517/ss.2025.11
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Advances in micro/nano-engineered flexible sensor arrays for intelligent human-machine interaction

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Abstract

Flexible pressure sensor arrays have emerged as a key enabling technology in the era of the Internet of Things and artificial intelligence, offering real-time, distributed, and multidimensional sensing capabilities. The micro/nano-engineered sensor arrays, composed of numerous integrated sensing units, show tremendous potential in human-machine interactions. However, meeting the increasing demands for high-resolution, high-performance area sensing presents critical challenges, including the fabrication of high-density arrays, mitigation of signal crosstalk, and the integrated optimization of sensing performance. This paper briefly summarizes and reviews the existing research strategies of flexible sensor arrays, from high-density sensor array manufacturing technology, anti-crosstalk design of multi-pixel units, performance control methods for sensing units, to intelligent human-machine interaction applications. Finally, a future outlook is proposed in light of the current state to promote the wider application of sensing arrays in human-machine interactions.

Keywords

Flexible sensor array / high density / anti-crosstalk / sensitivity / ultra-wide range

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Shiyi Wang, Xiaoliang Chen, Sheng Li, Bai Sun, Xiaoming Chen, Hongmiao Tian, Chunhui Wang, Xiangming Li, Jinyou Shao. Advances in micro/nano-engineered flexible sensor arrays for intelligent human-machine interaction. Soft Science, 2025, 5(3): 28 DOI:10.20517/ss.2025.11

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References

[1]

Luo Y,Ahn JH.Technology roadmap for flexible sensors.ACS Nano2023;17:5211-95 PMCID:PMC11223676

[2]

Lin L,Wang S.Triboelectric active sensor array for self-powered static and dynamic pressure detection and tactile imaging.ACS Nano2013;7:8266-74

[3]

Xu R,Sun J.A flexible, conductive and simple pressure sensor prepared by electroless silver plated polyester fabric.Colloids Surf A Physicochem Eng Asp2019;578:123554

[4]

Cai J,Li Z.Flexible temperature sensors constructed with fiber materials.Adv Maters Technol2022;7:2101182

[5]

Lazarova K,Ivanova S,Babeva T.Flexible and transparent polymer-based optical humidity sensor.Sensors2021;21:3674 PMCID:PMC8198816

[6]

Delipinar T,Gohar MS.Fabrication and materials integration of flexible humidity sensors for emerging applications.ACS Omega2021;6:8744-53 PMCID:PMC8028014

[7]

Yuan Z,Pan C.Flexible sliding sensor for simultaneous monitoring deformation and displacement on a robotic hand/arm.Nano Energy2020;73:104764

[8]

Xu L,Duan G.Micro/nano gas sensors: a new strategy towards in-situ wafer-level fabrication of high-performance gas sensing chips.Sci Rep2015;5:10507 PMCID:PMC5377049

[9]

Ansari HR,Shokrollahi H.Flexible/wearable resistive gas sensors based on 2D materials.J Mater Chem C2023;11:6528-49

[10]

Cui X,Tu S.An overview of flexible sensors from ionic liquid-based gels.TrAC Trends Anal Chem2024;174:117662

[11]

Li B,Li M.High-sensitivity and energy-efficient chloride ion sensors based on flexible printed carbon nanotube thin-film transistors for wearable electronics.Talanta2024;276:126285

[12]

Stekolshchikova AA,Orlova OY,Skorb EV.Thin and flexible ion sensors based on polyelectrolyte multilayers assembled onto the carbon adhesive tape.ACS Omega2019;4:15421-7 PMCID:PMC6761682

[13]

Qin J,Zeng Y,Tang D.Recent advances in flexible sensors: from sensing materials to detection modes.TrAC Trends Anal Chem2024;181:118027

[14]

Wu P,Yao X,He Y.Recyclable conductive nanoclay for direct in situ printing flexible electronics.Mater Horiz2021;8:2006-17

[15]

Jin T,Li L.Triboelectric nanogenerator sensors for soft robotics aiming at digital twin applications.Nat Commun2020;11:5381 PMCID:PMC7585441

[16]

Yao G,Li J.Self-activated electrical stimulation for effective hair regeneration via a wearable omnidirectional pulse generator.ACS Nano2019;13:12345-56 PMCID:PMC6881522

[17]

Invernizzi F,Patrini M,Mustarelli P.Energy harvesting from human motion: materials and techniques.Chem Soc Rev2016;45:5455-73

[18]

Xiong W,Guo D.Bio-inspired, intelligent flexible sensing skin for multifunctional flying perception.Nano Energy2021;90:106550

[19]

Qiu L,Wang Y,Shi W.A mechatronic smart skin of flight vehicle structures for impact monitoring of light weight and low-power consumption.Mech Syst Signal Process2020;144:106829

[20]

Huang YA,Xiong WN.Flexible smart sensing skin for “Fly-by-Feel” morphing aircraft.Sci China Technol Sci2022;65:1-29

[21]

Tao J,Li L.Real-time pressure mapping smart insole system based on a controllable vertical pore dielectric layer.Microsyst Nanoeng2020;6:62 PMCID:PMC8433384

[22]

Liu T,Gao F.Multichannel flexible pulse perception array for intelligent disease diagnosis system.ACS Nano2023;17:5673-85 PMCID:PMC10062340

[23]

Formica D.Smart sensors for healthcare and medical applications.Sensors2021;21:543 PMCID:PMC7828709

[24]

Oh H,Yip M.Scalable tactile sensor arrays on flexible substrates with high spatiotemporal resolution enabling slip and grip for closed-loop robotics.Sci Adv2020;6:eabd7795 PMCID:PMC7673764

[25]

Ra Y,Cho S,Choi D.Scalable batch fabrication of flexible, transparent and self-triggered tactile sensor array based on triboelectric effect.Int J of Precis Eng Manuf-Green Tech2021;8:519-31

[26]

Park M,Chen X,Kim MS.MoS2-based tactile sensor for electronic skin applications.Adv Mater2016;28:2556-62

[27]

Shi J,Cheng Y.Embedment of sensing elements for robust, highly sensitive, and cross-talk-free iontronic skins for robotics applications.Sci Adv2023;9:eadf8831 PMCID:PMC9984179

[28]

Tian X,Wu Z.High-resolution carbon-based tactile sensor array for dynamic pulse imaging.Adv Funct Mater2024;34:2406022

[29]

Mei S,Zhao J.High-density, highly sensitive sensor array of spiky carbon nanospheres for strain field mapping.Nat Commun2024;15:3752 PMCID:PMC11069524

[30]

Tang, Y., L. Wang, S. Zhang, et al. Flexible active-matrix tactile sensor arrays with high density of 4096 pixels/cm2 and in-array sensitivity of 51 kPa-1. In 2024 IEEE International Electron Devices Meeting (IEDM), San Francisco, CA, USA, December 7-11, 2024; IEEE: New York, USA, 2025; pp 1-4.

[31]

Li Y,Chen Y,Zhao N.Crosstalk-free, high-resolution pressure sensor arrays enabled by high-throughput laser manufacturing.Adv Mater2022;34:e2200517

[32]

Chen X,Chen Y.Biomimetic contact behavior inspired tactile sensing array with programmable microdomes pattern by scalable and consistent fabrication.Adv Sci2024;11:e2408082 PMCID:PMC11578381

[33]

Luo H,Li S.Bioinspired suspended sensing membrane array with modulable wedged-conductive channels for crosstalk-free and high-resolution detection.Adv Sci2024;11:e2403645 PMCID:PMC11267273

[34]

Hu S,Zhu W.Sub-millimeter scale 3D integration strategy enables ultrahigh-density and ultralow-crosstalk flexible tactile sensor array for robotic E-skin application.Chem Eng J2024;502:157950

[35]

Zhang Y,He J.Localizing strain via micro-cage structure for stretchable pressure sensor arrays with ultralow spatial crosstalk.Nat Commun2023;14:1252 PMCID:PMC9988987

[36]

Li G,Zhang X.Filiform papillae-inspired wearable pressure sensor with high sensitivity and wide detection range.Adv Funct Mater2025;35:2414465

[37]

Luo Y,Tian H.Gecko-inspired slant hierarchical microstructure-based ultrasensitive iontronic pressure sensor for intelligent interaction.Research2022;2022:9852138 PMCID:PMC9275085

[38]

Chen R,Wang J.Nonlinearity synergy: an elegant strategy for realizing high-sensitivity and wide-linear-range pressure sensing.Nat Commun2023;14:6641 PMCID:PMC10589270

[39]

Xiang Q,Tang T.All-carbon piezoresistive sensor: enhanced sensitivity and wide linear range via multiscale design for wearable applications.Adv Funct Mater2025;35:2418706

[40]

Gao W,Kiriya D,Javey A.Flexible electronics toward wearable sensing.Acc Chem Res2019;52:523-33

[41]

Zhang B,Lei Q.Electrohydrodynamic printing of sub-microscale fibrous architectures with improved cell adhesion capacity.Virtual Phys Prototyp2020;15:62-74

[42]

Cui X,Zhang X.Flexible pressure sensors via engineering microstructures for wearable human-machine interaction and health monitoring applications.iScience2022;25:104148 PMCID:PMC8991382

[43]

Ismail SNA,Mohammad Haniff MAS,May Z.Wearable two-dimensional nanomaterial-based flexible sensors for blood pressure monitoring: a review.Nanomaterials2023;13:852 PMCID:PMC10005058

[44]

Jin Y,He Y.Flexible pressure sensors enhanced by 3D-printed microstructures.Adv Mater2025:e2500076

[45]

Seesaard T.Flexible and stretchable pressure sensors: from basic principles to state-of-the-art applications.Micromachines2023;14:1638 PMCID:PMC10456594

[46]

Kim K,Cho JY.Transparent and flexible piezoelectric sensor for detecting human movement with a boron nitride nanosheet (BNNS).Nano Energy2018;54:91-8

[47]

Kim M,Oh Y.Flexible and multi-directional piezoelectric energy harvester for self-powered human motion sensor.Smart Mater Struct2018;27:035001

[48]

Pi Z,Wen C,Wu D.Flexible piezoelectric nanogenerator made of poly(vinylidenefluoride-co-trifluoroethylene) (PVDF-TrFE) thin film.Nano Energy2014;7:33-41

[49]

Huang Y,Li Y,Wu Y.Flexible piezoelectric sensor based on PAN/MXene/PDA@ZnO composite film for human health and motion detection with fast response and highly sensitive.Chem Eng J2024;488:150997

[50]

Ma M,Zhao Z.Self-powered flexible antibacterial tactile sensor based on triboelectric-piezoelectric-pyroelectric multi-effect coupling mechanism.Nano Energy2019;66:104105

[51]

Wang C,Wang H,Yin Z.Advanced carbon for flexible and wearable electronics.Adv Mater2019;31:e1801072

[52]

Kim S,Lee TI.Wearable, ultrawide-range, and bending-insensitive pressure sensor based on carbon nanotube network-coated porous elastomer sponges for human interface and healthcare devices.ACS Appl Mater Interfaces2019;11:23639-48

[53]

Lu Y,Sun X.Highly sensitive wearable 3D piezoresistive pressure sensors based on graphene coated isotropic non-woven substrate.Compos Part A Appl Sci Manuf2019;117:202-10

[54]

Zhang Y,Zhao L.Flexible self-powered integrated sensing system with 3d periodic ordered black phosphorus@MXene thin-films.Adv Mater2021;33:e2007890

[55]

Wang JC,Lu YJ,Wei KC.Characterization of piezoresistive PEDOT:PSS pressure sensors with inter-digitated and cross-point electrode structures.Sensors2015;15:818-31 PMCID:PMC4327051

[56]

Lv B,Liu C.A highly sensitive piezoresistive pressure sensor based on graphene oxide/polypyrrole@polyurethane sponge.Sensors2020;20:1219 PMCID:PMC7070241

[57]

Wang L,Wang X.PDMS/MWCNT-based tactile sensor array with coplanar electrodes for crosstalk suppression.Microsyst Nanoeng2016;2:16065 PMCID:PMC6444708

[58]

Yang L,Filipe CDM.Development of a highly sensitive, broad-range hierarchically structured reduced graphene oxide/polyHIPE foam for pressure sensing.ACS Appl Mater Interfaces2019;11:4318-27

[59]

Guo J,Guo C.In-situ real-time monitoring of muscle energetics with soft neural-mechanical wearable sensing.Soft Sci2025;5:20

[60]

Hwang J,Yang H.Fabrication of hierarchically porous structured PDMS composites and their application as a flexible capacitive pressure sensor.Compos Part B Eng2021;211:108607

[61]

Park S,Vosgueritchian M.Stretchable energy-harvesting tactile electronic skin capable of differentiating multiple mechanical stimuli modes.Adv Mater2014;26:7324-32

[62]

He F,Gong H.Stretchable, biocompatible, and multifunctional silk fibroin-based hydrogels toward wearable strain/pressure sensors and triboelectric nanogenerators.ACS Appl Mater Interfaces2020;12:6442-50

[63]

Huang J,Yu J.A universal and arbitrary tactile interactive system based on self-powered optical communication.Nano Energy2020;69:104419

[64]

Wang HL,Li HY,Zhu G.Large-area integrated triboelectric sensor array for wireless static and dynamic pressure detection and mapping.Small2020;16:e1906352

[65]

Peng F,Chen R.Vertically aligned polymer microfibril array for self-powered sensing.Nano Energy2024;124:109440

[66]

Ye G,Wang X.Multimodal integrated flexible electronic skin for physiological perception and contactless kinematics pattern recognition.Nano Energy2023;113:108580

[67]

Mu Y,Shi W.Crosstalk-free hybrid integrated multimodal sensor for human temperature, humidity, and pressure monitoring.Cell Rep Phys Sci2024;5:102223

[68]

Yang R,Tiwari N,Li T.Multimodal sensors with decoupled sensing mechanisms.Adv Sci2022;9:e2202470 PMCID:PMC9475538

[69]

Zhang C,Li B.Flexible multimodal sensing system based on a vertical stacking strategy for efficiently decoupling multiple signals.Nano Lett2024;24:3186-95

[70]

An BW,Ji S,Park JU.Transparent and flexible fingerprint sensor array with multiplexed detection of tactile pressure and skin temperature.Nat Commun2018;9:2458 PMCID:PMC6030134

[71]

Liu W,Jiang X.Dynamic keystroke-password recognition based on piezoelectric-triboelectric coupling sensor array with crosstalk-free for authentication system.Nano Energy2025;136:110667

[72]

Shi M,Chen H.Self-powered analogue smart skin.ACS nano2016;10:4083-91

[73]

Wang S,Zhu H.Intrinsically stretchable electronics with ultrahigh deformability to monitor dynamically moving organs.Sci Adv2022;8:eabl5511 PMCID:PMC8967218

[74]

Lin W,Peng G,Hu H.Skin-inspired piezoelectric tactile sensor array with crosstalk-free row+column electrodes for spatiotemporally distinguishing diverse stimuli.Adv Sci2021;8:2002817 PMCID:PMC7856889

[75]

Shi X,Jiang H,Guo X.High-density force and temperature sensing skin using micropillar array with image sensor.Adv Intell Syst2021;3:2000280

[76]

Park J,Hong J.Giant tunneling piezoresistance of composite elastomers with interlocked microdome arrays for ultrasensitive and multimodal electronic skins.ACS Nano2014;8:4689-97

[77]

Niu H,Li H.Micropyramid array bimodal electronic skin for intelligent material and surface shape perception based on capacitive sensing.Adv Sci2024;11:e2305528 PMCID:PMC10797442

[78]

Hua Q,Liu H.Skin-inspired highly stretchable and conformable matrix networks for multifunctional sensing.Nat Commun2018;9:244 PMCID:PMC5770430

[79]

Yan J,Cao Y.Bioinspired cilia-based electronic skin for multimodal mechanical sensing via additive manufacturing.Soft Sci2025;5:22

[80]

Quan Y,Xiao L.Highly sensitive and stable flexible pressure sensors with micro-structured electrodes.J Alloys Compd2017;699:824-31

[81]

Shuai X,Zeng W.Highly sensitive flexible pressure sensor based on silver nanowires-embedded polydimethylsiloxane electrode with microarray structure.ACS Appl Mater Interfaces2017;9:26314-24

[82]

Huang Y,Li Y,Feng W.Elastomeric polymers for conductive layers of flexible sensors: materials, fabrication, performance, and applications.Aggregate2023;4:e319

[83]

Gao C,Liu S,Zhang Y.Fully degradable chitosan-based triboelectric nanogenerators applying in disposable medical products for information transfer.Nano Energy2023;117:108876

[84]

Yang JC,Oh J.Microstructured porous pyramid-based ultrahigh sensitive pressure sensor insensitive to strain and temperature.ACS Appl Mater Interfaces2019;11:19472-80

[85]

Cui M,Guan Y.Fabrication of high precision grating patterns with a compliant nanomanipulator-based femtosecond laser direct writing system.Precis Eng2022;78:60-9

[86]

Chen X,Yuan M.A dual-functional graphene-based self-alarm health-monitoring E-skin.Adv Funct Mater2019;29:1904706

[87]

Wei Y,Jiang G.A wearable skinlike ultra-sensitive artificial graphene throat.ACS Nano2019;13:8639-47

[88]

Yuan Y,Li X.Laser photonic-reduction stamping for graphene-based micro-supercapacitors ultrafast fabrication.Nat Commun2020;11:6185 PMCID:PMC7712890

[89]

Kim D,Jin IK.Direct-laser-patterned friction layer for the output enhancement of a triboelectric nanogenerator.Nano Energy2017;35:379-86

[90]

Yan Z,Xia Y.Flexible high-resolution triboelectric sensor array based on patterned laser-induced graphene for self-powered real-time tactile sensing.Adv Funct Mater2021;31:2100709

[91]

Shao JY,Li XM,Wang CH.Nanoimprint lithography for the manufacturing of flexible electronics.Sci China Technol Sci2019;62:175-98

[92]

Ouyang Q,Chen H.Machine learning-coupled tactile recognition with high spatiotemporal resolution based on cross-striped nanocarbon piezoresistive sensor array.Biosens Bioelectron2024;246:115873

[93]

Zhao W,Li Z.Flexible pressure sensor arrays with high sensitivity and high density based on spinous microstructures for carved patterns recognition.Adv Funct Mater2025;35:2417238

[94]

Liu Y,Wang X.Passive radiative cooling enables improved performance in wearable thermoelectric generators.Small2022;18:2106875

[95]

Kang SJ,Jeong C.Avoiding heating interference and guided thermal conduction in stretchable devices using thermal conductive composite islands.Nano Res2021;14:3253-9

[96]

Peng Y,Liu B.Integrated cooling (i-Cool) textile of heat conduction and sweat transportation for personal perspiration management.Nat Commun2021;12:6122 PMCID:PMC8531342

[97]

Lee S,Kim CY.Beyond human touch perception: an adaptive robotic skin based on gallium microgranules for pressure sensory augmentation.Adv Mater2022;34:e2204805

[98]

Jung Y,Yoon Y,Lee J.Soft multi-modal thermoelectric skin for dual functionality of underwater energy harvesting and thermoregulation.Nano Energy2022;95:107002

[99]

Lee J,Lee W.Stretchable skin-like cooling/heating device for reconstruction of artificial thermal sensation in virtual reality.Adv Funct Mater2020;30:1909171

[100]

Jung Y,Kim T,Lee J.Functional materials and innovative strategies for wearable thermal management applications.Nanomicro Lett2023;15:160 PMCID:PMC10310690

[101]

Dong S,Wang Q.Fabrication of high-resolution, wide-range and low-crosstalk capacitive pressure sensing array for medical diagnosis.Mater Des2023;235:112439

[102]

Li J,Wu M.Thin, soft, 3D printing enabled crosstalk minimized triboelectric nanogenerator arrays for tactile sensing.Fundam Res2023;3:111-7 PMCID:PMC11197812

[103]

Zhou B,Hu K.Matrix-addressed crosstalk-free self-powered pressure sensor array based on electrospun isolated PVDF-TrFE cells.Sens Actuators A Phys2022;347:113993

[104]

Yuan Y,Zheng W.Bending and stretching-insensitive, crosstalk-free, flexible pressure sensor arrays for human-machine interactions.Adv Mater Technol2024;9:2301615

[105]

Liu K,Huang C.Flexible bioinspired healable antibacterial electronics for intelligent human-machine interaction sensing.Adv Sci2024;11:e2305672 PMCID:PMC10933681

[106]

Hu F,Liu R.Top-down architecture of magnetized micro-cilia and conductive micro-domes as fully bionic electronic skin for de-coupled multidimensional tactile perception.Mater Horiz2025;12:418-33

[107]

Zhang J,Mo J.Finger-inspired rigid-soft hybrid tactile sensor with superior sensitivity at high frequency.Nat Commun2022;13:5076 PMCID:PMC9422944

[108]

Wu J,Lu X.Ultrastretchable and stable strain sensors based on antifreezing and self-healing ionic organohydrogels for human motion monitoring.ACS Appl Mater Interfaces2019;11:9405-14

[109]

Li Y,Sun T,Yue W.A perceptual and interactive integration strategy toward telemedicine healthcare based on electroluminescent display and triboelectric sensing 3D stacked device.Adv Funct Mater2024;34:2402356

[110]

Sundaram S,Li Y,Torralba A.Learning the signatures of the human grasp using a scalable tactile glove.Nature2019;569:698-702

[111]

Li S,Li X.Bioinspired robot skin with mechanically gated electron channels for sliding tactile perception.Sci Adv2022;8:eade0720 PMCID:PMC10936060

[112]

Xiong WN,Yang ZX,Huang YA.Conformable, programmable and step-linear sensor array for large-range wind pressure measurement on curved surface.Sci China Technol Sci2020;63:2073-81

[113]

Chen X,Zhang J.Conformal in situ strain monitoring enabled with transfer-printed ultrathin customized-crack sensing network.Device2025;100728

[114]

Li S,Ma W.Monitoring blood pressure and cardiac function without positioning via a deep learning-assisted strain sensor array.Sci Adv2023;9:eadh0615 PMCID:PMC10421034

[115]

He S,Wang Y,He G.CuO/TiO2/MXene-based sensor and SMS-TENG array integrated inspection robots for self-powered ethanol detection and alarm at room temperature.ACS Sens2024;9:1188-98

[116]

Luo L,Ding Q.In situ structural densification of hydrogel network and its interface with electrodes for high-performance multimodal artificial skin.ACS Nano2024;18:15754-68

[117]

Lee S,Wang Y.An ultrasoft nanomesh strain sensor with extreme mechanical durability against friction for on-skin applications.Device2025;3:100559

[118]

Gao J,Xu L,Bi H.Transparent multifunctional cellulose-based conductive hydrogel for wearable strain sensors and arrays.Carbohydr Polym2024;329:121784

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