Flexible tactile sensor with an embedded-hair-in-elastomer structure for normal and shear stress sensing

Abstract

Endowing robots with multi-directional tactile sensing capabilities has long been a challenging task in the field of flexible electronics and intelligent robots. This paper reports a highly sensitive, flexible tactile sensor with an embedded-hair-in-elastomer structure, which is capable of decoupling normal stress and shear stress. The flexible tactile sensor is fabricated on a thin polyimide substrate and consists of four self-bending piezoresistive cantilevers in a cross-shaped configuration, which are embedded in an elastomer. The sensor can decouple the tactile information into a normal stress and a shear stress with simple summation and differencing algorithms, and the measurement error is kept within 3%. Moreover, the sensitivity and detection threshold of the sensor can be adjusted by simply changing the elastic material. As a demonstration, the flexible tactile sensor is integrated into a robotic manipulator to precisely estimate the weight of the grasped objects, which shows great potential for application in robotic systems.

Keywords

Tactile sensor / piezoresistive cantilever / flexible sensor / intelligent robot

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