Biocompatible composite thin-film wearable piezoelectric pressure sensor for monitoring of physiological and muscle motions

Abstract

Whereas piezoelectric pressure sensors (PPSs) have been applied in the monitoring of human body movement and physiological parameters, they show inherent limitations in wearable applications, including toxicity, degradation, and brittleness. In this study, we develop safe, stable, and mechanically flexible composite thin films consisting of polyvinylidene fluoride (PVDF), BaTiO₃ nanoparticles (BTO-NPs), and textured aluminum nitride (AlN) thin film for the demonstration of wearable PPS with enhanced output performance and biocompatibility. The PPS made of BTO-NP-embedded-PVDF and AlN film on Cu foil is attached to different parts of human body to measure different output voltages depending on the physiological and physical stimulus. The simple bending (from breathing, chewing, and swallowing), joint motions (at wrist, elbow, and finger), and low- (from eyeball movement) and high-pressure applications (by squat, lunge, and walking) are measured. Our PVDF+BTO-NP/AlN-PPS (PBA-PPS) device has the potential for personal safety, healthcare, and activity monitoring applications with easy wearability.

Keywords

Wearable electronics / BaTiO₃-embedded PVDF / BaTiO₃/PVDF/AlN flexible piezoelectric pressure sensor / sputtered AlN thin films / human motion monitoring

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