Micro-displace sensor based on self-mixing interference of the fiber laser with phase modulation

Hui Hao , Dongmei Guo , Ming Wang , Wei Xia , Xiaoqi Ni

Photonic Sensors ›› 2013, Vol. 4 ›› Issue (4) : 379 -384.

PDF
Photonic Sensors ›› 2013, Vol. 4 ›› Issue (4) : 379 -384. DOI: 10.1007/s13320-014-0208-x
Article

Micro-displace sensor based on self-mixing interference of the fiber laser with phase modulation

Author information +
History +
PDF

Abstract

Micro-displacement measurement based on self-mixing interference using a fiber laser system was demonstrated. The sinusoidal phase modulation technique was introduced into the fiber laser self-mixing interference measurement system to improve the measurement resolution. The phase could be demodulated by the Fourier analysis method. Error sources were evaluated in detail, and the system was experimentally applied to reconstruct the motion of a high-precision commercial piezoelectric ceramic transducer (PZT). The displacement measurement resolution was well beyond a half-wavelength. It provides a practical solution for displacement measurement based on all optical-fiber sensing applications with high precision.

Keywords

Self-mixing interference / micro-displacement sensing / phase modulation / fiber laser

Cite this article

Download citation ▾
Hui Hao, Dongmei Guo, Ming Wang, Wei Xia, Xiaoqi Ni. Micro-displace sensor based on self-mixing interference of the fiber laser with phase modulation. Photonic Sensors, 2013, 4(4): 379-384 DOI:10.1007/s13320-014-0208-x

登录浏览全文

4963

注册一个新账户 忘记密码

References

[1]

Hansen H N, Carneiro K, Haitjema H, Chiffre L D. Dimensional micro and nano metrology. Cirp Annals — Manufacturing Technology, 2006, 55(2): 721-743.

[2]

Martinussen H, Aksnes A, Engan H E. Wide frequency range measurements of absolute phase and amplitude of vibrations in micro- and nano-structures by optical interferometry. Optics Express, 2007, 15(18): 11370-11384.

[3]

Chassagne L, Wakim M, Xu S, Topçu S, Ruaux P, Juncar P, . A 2D nano-positioning system with sub-nanometric repeatability over the millimetre displacement range. Measurement Science and Technology, 2007, 18(11): 185-191.

[4]

Li G, LI Y, Yang K, Liu M. Fiber-optic displacement sensor based on the DBR fiber laser. Photonic Sensors, 2014, 4(1): 43-47.

[5]

B. Bodermann, E. Buhr, G. Ehret, F. Scholze, and M. Wurm, “Optical metrology of micro- and nano-structures at PTB: status and future developments,” in Ninth International Symposium on Laser Metrology, Bellingham, October 3, 2008.

[6]

Wang W M, Boyle W J O, Grattan K T V, Palmer A W. Self-mixing interference in a diode laser: experimental observations and theoretical analysis. Applied Optics, 1993, 32(9): 1551-1558.

[7]

Giuliani G, Norgia M, Donati S, Bosch T. Laser diode self-mixing technique for sensing applications. Journal of Optics A: Pure and Applied Optics, 2002, 4(6): s283-s294.

[8]

Giuliani G, Bozzi-cietra S, Donati S. Self-mixing laser diode vibrometer. Measurement Science and Technology, 2003, 14(1): 24-32.

[9]

Han D, Wang M, Zhou J. Self-mixing speckle in an erbium-doped fiber ring laser and its application to velocity sensing. IEEE Photonics Technology Letters, 2007, 19(18): 1398-1400.

[10]

Lu L, Cao Z, Dai J, Xu F, Yu B. Self-mixing signal in Er3+-Yb3+ codoped distributed Bragg reflector fiber laser for remote sensing applications up to 20 km. IEEE Photonics Technology Letters, 2012, 24(5): 392-394.

[11]

Dai X, Wang M, Zhao Y, Zhou J. Self-mixing interference in fiber ring laser and its application for vibration measurement. Optics Express, 2009, 17(19): 16543-16548.

[12]

Zhao Y, Wang M, Zhou J, Dai X. Self-mixing interference in fiber ring laser with parallel dual-channel. IEEE Photonics Technology Letters, 2009, 21(13): 863-865.

[13]

Lu H, Wang M, Dai X, Guo W. All-fiber self-mixing interferometer based on DFB laser and phase modulating technique. IEEE Photonics Technology Letters, 2011, 23(4): 221-223.

[14]

Sasaki O, Okazaki H. Sinusoidal phase modulating interferometry for surface profile measurement. Applied Optics, 1986, 25(18): 3137-3140.

[15]

Guo D, Wang M, Tan S. Self-mixing interferometer based on sinusoidal phase modulating technique. Optics Express, 2005, 13(5): 1537-1543.

[16]

Lu L, Yang J, Zhao Y, Du Z, Yu B. Self-mixing interference in an all-fiberized configuration Er3+-Yb3+ codoped distributed Bragg reflector laser for vibration measurement. Current Applied Physics, 2012, 12(3): 659-662.

[17]

Dai X, Wang M, Zhao Y, Zhou J. Self-mixing interference in fiber ring laser and its application for vibration measurement. Optics Express, 2009, 17(19): 16543-16548.

[18]

Sasaki O, Okazaki H. Analysis of measurement accuracy in sinusoidal phase modulating interferometry. Applied Optics, 1986, 25(18): 3152-3158.

[19]

Ovryn B, Andrews J H. Phase-shifted laser feedback interferometry. Optics Letters, 1998, 23(14): 1078-1080.

AI Summary AI Mindmap
PDF

153

Accesses

0

Citation

Detail

Sections
Recommended

AI思维导图

/