Polarization analysis of an asymmetrically etched rib waveguide coupler for sensing applications

Abstract

Deeply etched rib waveguides on silicon on insulator platform were not addressed well in research publications. We have analyzed single mode condition and polarization independence of a deeply etched rib waveguide (DE-RW) structure from biosensing perspective. With this rib structure, an asymmetrically etched integrated optic directional coupler has been numerically modeled to have the same coupling length for quasi-TE and TM modes. The coupling coefficients with the glucose solution as an upper cladding were calculated using a full vector mode solver, and the bulk refractive index sensitivity of the sensor was found as 28.305×10⁻²/RIU for a fundamental quasi-TE mode.

Keywords

Silicon on insulator (SOI) / deeply etched rib waveguide / asymmetrically etched / directional coupler / biosensor

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