Silicon waveguide-based single cavity Fano resonance temperature sensor

Abstract

A compact Fano resonant temperature sensor composed of a micro-ring resonator (MRR) coupled double-T-shaped waveguide is developed. The coupling gap and coefficient of the device are optimized by the finite difference time domain (FDTD) method. The maximum slope ratio (SR) of the MRR-coupled single-T-shaped waveguide is −2.13 dB/nm. The SR of the double-T-shaped waveguide is −49.69 dB/nm which is 23 times that of the single-T-shaped waveguide. The simulation results show that the temperature sensitivity of optical intensity decreases with increasing temperature in the range from 303.6 K to 343.8 K. The wavelength-temperature sensitivity of the double-T-shaped waveguide microring is 76.5 pm/K. After introducing the double-T-shaped waveguide structure, the device’s performance is greatly improved, and the double-T-shaped waveguide has a good application prospect as a temperature sensor.

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