Single silicon waveguide MRR based Fano resonance in the whole spectral bands

Abstract

To improve the integration of Fano devices, we design a T-shaped waveguide coupling micro-ring resonator (MRR) structure to achieve a single cavity with Fano resonance in the whole spectral bands. The mathematical relationship between the phase factor, the coupling coefficient of the bus waveguide, and the Fano resonance slope extinction ratio (ER) is established. The electron beam exposure process is used to obtain a device with an insertion loss of ∼3 dB. The maximum ER of the Fano lineshape exceeds 15 dB, and the slope ratio (SR) is 251.3 dB/nm. This design improves the compactness of the Fano resonant device.

References

[1]	FanoU. Effects of configuration interaction on intensities and phase shifts[J]. Physical review, 1961, 124(6):1866
[2]	LideD R. A century of excellence in measurements, standards, and technology[M], 2017, Boston, Government Printing Office: 116-119
[3]	ZhaoC Y, ZhangL, ZhangC M. Compact SOI optimized slot microring coupled phase-shifted Bragg grating resonator for sensing[J]. Optics communications, 2018, 414: 212-216
[4]	ZhouX, ZhangL, ArmaniA M, et al.. On-chip biological and chemical sensing with reversed Fano lineshape enabled by embedded microring resonators[J]. IEEE journal of selected topics in quantum electronics, 2013, 20(3):35-44
[5]	PengF, WangZ, YuanG, et al.. High-sensitivity refractive index sensing based on Fano resonances in a photonic crystal cavity-coupled microring resonator[J]. IEEE photonics journal, 2018, 10(2):1-8
[6]	ZhangJ, LerouxX, Durán-ValdeiglesiasE, et al.. Generating Fano resonances in a single-waveguide silicon nanobeam cavity for efficient electro-optical modulation[J]. ACS photonics, 2018, 5(11):4229-4237
[7]	ChenS, ZhouG, ZhouL, et al.. High-linearity Fano resonance modulator using a microring-assisted Mach-Zehnder structure[J]. Journal of lightwave technology, 2020, 38(13):3395-3403
[8]	MengZ M, ChenC B, QinF. Theoretical investigation of integratable photonic crystal nanobeam all-optical switching with ultrafast response and ultralow switching energy[J]. Journal of physics D: applied physics, 2020, 53(20):205105
[9]	YuY, HeuckM, HuH, et al.. Fano resonance control in a photonic crystal structure and its application to ultrafast switching[J]. Applied physics letters, 2014, 105(6): 061117
[10]	ZhengS, CaoX, WangJ. Multimode Fano resonances for low-power mode switching[J]. Optics letters, 2020, 45(4): 1035-1038
[11]	LuY, XuL, YuY, et al.. Double-wavelength Fano resonance and enhanced coupled-resonator-induced transparency in a double-microcavity resonator system[J]. Journal of the optical society of America A, 2006, 23(7):1718-1721
[12]	GuL, FangL, FangH, et al.. Fano resonance line-shapes in a waveguide-microring structure enabled by an air-hole[J]. APL photonics, 2020, 5(1):016108
[13]	LuL, ZhuL, ZengZ, et al.. Fano resonance ion sensor enabled by 2D plasmonic sub-nanopores-material[J]. IEEE sensors journal, 2021, 21(13): 14776-14783
[14]	WerquinS. Optimizations of a ring resonator biosensor platform for applications in DNA detection[D], 2015, Ghent, Ghent University