Roll angle of autocollimator measurement method based on hollow cube corner reflector

Abstract

In this paper, a method of measuring roll angle with hollow cube corner reflector (HCCR) is proposed. Firstly, the space coordinate vector relationship between the mirror and the autocollimator is established by using the Euler rotation relationship, and the structure of the HCCR is designed. Secondly, through the actual measurement of the HCCR reflector’s angle sensitivity, the specific formula of roll angle measurement is obtained. The experimental results show that the method can be used to measure the roll angle, and the maximum root mean square (RMS) error is 15″ in the range of 350″, and the repeatability of the experiment is better than 2.7″. On the basis of retaining the traditional autocollimator, the plane mirror is replaced with HCCR, which realizes the measurement of the roll angle of the autocollimator. This method does not change the internal structure of the autocollimator system, and there is no process error caused by special processing technology, so as to retain the autocollimator’s own long measurement distance, high measurement accuracy, high system stability, and large range of measurement performance, and it can also be used in industrial production.

References

[1] GaoW, KimS W, BosseH, et al.. Measurement technologies for precision positioning[J]. CIRP annals, 2015, 64(2):773-796

[2] GillmerS R, YuX Z, WangC, et al.. Robust high-dynamic-range optical roll sensing[J]. Optics letters, 2015, 40(11):2497-2500

[3] ZhuF, TanJ B, CuiJ W. Common-path design criteria for laser datum based measurement of small angle deviations and laser autocollimation method in compliance with the criteria with high accuracy and stability[J]. Optics express, 2013, 21(9):11391-11403

[4] D’AmbrosioV, SpagnoloN, DelR L, et al.. Photonic polarization gears for ultra-sensitive angular measurements[J]. Nature communications, 2013, 4(1):222-229

[5] CuiC X, FengQ B, ZhangB, et al.. System for simultaneously measuring 6DOF geometric motion errors using a polarization maintaining fiber-coupled dual-frequency laser[J]. Optics express, 2016, 24(6):6735-6748

[6] SergeevS A, MeshalkinA Y, IovuM S. Diffraction structures formed by two crossed superimposed diffraction gratings[J]. Surface engineering and applied electrochemistry, 2021, 57(2):207-216

[7] HsuC C, ChenH, TsengH Y, et al.. High displacement resolution encoder by using triple grating combination interferometer[J]. Optics and laser technology, 2018, 105: 221-228

[8] HuangJ H, WangZ, GaoJ M, et al.. Modeling and analysis of phase fluctuation in a high-precision roll angle measurement based on a heterodyne interferometer[J]. Sensors, 2016, 16(8):1214

[9] GeckelerR D, KranzO, JustA, et al.. A novel approach for extending autocollimator calibration from plane to spatial angles[J]. Advanced optical technologies, 2012, 1(6): 427-439

[10] RenW R, CuiJ W, TanJ B. A novel enhanced roll-angle measurement system based on a transmission grating autocollimator[J]. IEEE access, 2019, 7: 120929-120936

[11] ZhaiY S, FengQ B, ZhangB. A simple roll measurement method based on a rectangular-prism[J]. Optics and laser technology, 2011, 44(4):839-843

[12] QiJ Y, WangZ, HuangJ H, et al.. Heterodyne interferometer with two parallel-polarized input beams for high-resolution roll angle measurement[J]. Optics express, 2019, 27(10):13820-13830

[13] CaiY D, YangB H, FanK C. Robust roll angular error measurement system for precision machines[J]. Optics express, 2019, 27(6):8027-8036

[14] RenW R, CuiJ W, TanJ B. Parallel beam generation method for a high-precision roll angle measurement with a long working distance[J]. Optics express, 2020, 28(23):34489-34500

[15] LiR P, ZhenY, DiK, et al.. Three-degree-of-freedom autocollimator with large angle-measurement range[J]. Measurement science and technology, 2021, 32(11): 115005