Fabrication of sapphire rib waveguides using a femtosecond laser

Abstract

We demonstrate a method for fabricating sapphire rib waveguides with femtosecond laser micromachining technology. Finite difference beam propagation method (FD-BPM) is applied to design sapphire rib waveguides. We explore the process of etching on a sapphire substrate surface via direct laser ablation. Rib waveguides that satisfies the dimensions of our design were fabricated. Actual light propagation performance is tested, and with the cut-back method, the insertion loss of 2.9±0.5 dB/cm is measured.

References

[1] KurlovV N. Sapphire: Properties, Growth, and Applications, 2016, Oxford, Elsevier

[2] HunspergerR G. Integrated Optics: Theory and Technology, Springer, 1984,

[3] MillerS E. Bell System Technical Journal, 1969, 48: 2059

[4] ShiC, ZhangL, HongJ, ZhangF, PanS, HangY. Journal of Synthetic Crystals, 2015, 44: 2652

[5] BianX, ChenM, LiG. Laser & Optoelectronics Progress, 2016, 53: 051404

[6] ZhixiangC, XunyinG, WeiY, ZhilongS, YumeiY. Laser & Optoelectronics Progress, 2015, 52: 081403

[7] ZhouY, PanG, GongH, ShiX, ZouC. Colloids and Surfaces A: Physicochemical and Engineering Aspects, 2017, 513: 153

[8] KuoC-T, HsuL-H, HuangB-H, KuoH-C, LinC-C, ChengY-J. Applied Optics, 2016, 55: 7387

[9] WuD, MaP, LiuB, ZhangS, WangJ, LiJ. Journal of Semiconductors, 2016, 37: 104003

[10] KeWC, ChiangCY, SonW, LeeFW. Applied Surface Science, 2018, 456: 967

[11] SchafferC B, BrodeurA, MazurE. Measurement Science and Technology, 2001, 12: 1784

[12] JoglekarA P, LiuH, SpoonerG J, MeyhöferE, MourouG, HuntA J. Applied Physics B, 2003, 77: 25

[13] RickmanA G, ReedG T, NamavarF. Journal of Lightwave Technology, 1994, 12: 1771

[14] HuangC, ZhangG, LiuJ. Journal of Optoelectronics·Laser, 2002, 13: 20

[15] LadouceurF. Journal of Lightwave Technology, 1997, 15: 1020

[16] ChenK P, LiM J, LiM, GarnerS M, HuangS. Optics Express, 2015, 23: 22532

[17] MelchiorriM, DaldossoN, SbranaF, PavesiL, PuckerG, KompocholisC, BelluttiP, LuiA. Applied Physics Letters, 2005, 86: 121111

[18] DaldossoN, MelchiorriM, RiboliF, GirardiniM, PuckerG, CrivellariM, BelluttiP, LuiA, PavesiL. Journal of Lightwave Technology, 2004, 22: 1734

[19] LongdeW, TongZ, XiaoyangZ, RuozhouL, LuningW. Journal of Southeast University, 2013, 29: 152

[20] LeeD, YangM, HuangC, DaiJ. IEEE Photonics Technology Letters, 2014, 26: 2107

[21] TianZ, YuZ, LiuB, WangA. Optics Letters, 2016, 41: 195

[22] ZhangB, KahriziM. High-Temperature Bragg Grating Waveguide Sensor, International Conference on MEMS, NANO and Smart Systems, 400, 2003,