Fabrication of sapphire rib waveguides using a femtosecond laser

Jue Wang; Qing Tao; Chen Hu; Zhong-sheng Zhai; Jian Cheng; Dun Liu

doi:10.1007/s11801-019-8180-8

Optoelectronics Letters ›› 2019, Vol. 15 ›› Issue (3) : 190-194. DOI: 10.1007/s11801-019-8180-8

Article

Fabrication of sapphire rib waveguides using a femtosecond laser

Jue Wang¹ ,
Qing Tao¹^,² ,
Chen Hu¹ ,
Zhong-sheng Zhai¹^,² ,
Jian Cheng¹ ,
Dun Liu¹^,^f

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Abstract

We demonstrate a method for fabricating sapphire rib waveguides with femtosecond laser micromachining technology. Finite difference beam propagation method (FD-BPM) is applied to design sapphire rib waveguides. We explore the process of etching on a sapphire substrate surface via direct laser ablation. Rib waveguides that satisfies the dimensions of our design were fabricated. Actual light propagation performance is tested, and with the cut-back method, the insertion loss of 2.9±0.5 dB/cm is measured.

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Jue Wang, Qing Tao, Chen Hu, Zhong-sheng Zhai, Jian Cheng, Dun Liu. Fabrication of sapphire rib waveguides using a femtosecond laser. Optoelectronics Letters, 2019, 15(3): 190‒194 https://doi.org/10.1007/s11801-019-8180-8

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