A slot microring sensor with feedback spiral waveguide for trace gas CH4 sensing in mid-infrared region

Kai-he Xie; Xin Zhang; Xiao-wei Zhang; Han Jin; Jia-wen Jian

doi:10.1007/s11801-019-8107-4

Optoelectronics Letters ›› : 1 -5. DOI: 10.1007/s11801-019-8107-4

Optoelectronics Letters

A slot microring sensor with feedback spiral waveguide for trace gas CH₄ sensing in mid-infrared region

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Abstract

In this paper, a slot microring resonator with a piece of spiral feedback waveguide for CH₄ sensing application is proposed. This sensor is based on silicon-on-insulator (SOI) substrate and with the operation wavelength in mid-infrared region. To reach high sensitivity and good selectivity, slot cross section and spiral feedback waveguide are carefully tailored. The sensor shows ppb-scale trace gas sensing potential and is easy to be packaged in integrated photonics circuits. Calculation results show that the sensitivity reaches 1.4×10^-2 dB/ppm and the detection limit achieves 700 ppb in the case of L_spiral=100L_r.

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Kai-he Xie, Xin Zhang, Xiao-wei Zhang, Han Jin, Jia-wen Jian. A slot microring sensor with feedback spiral waveguide for trace gas CH₄ sensing in mid-infrared region. Optoelectronics Letters 1-5 DOI:10.1007/s11801-019-8107-4

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