Optical properties of an Er³⁺-doped phosphate glass waveguide formed by single-energy H⁺ ion implantation

Abstract

In this work, we report the fabrication of an optical waveguide by single-energy H⁺ ion implantation in the Er³⁺-doped phosphate glass. The ion implantation conditions are with energy of 0.4 MeV and a fluence of 8.0×10¹⁶ ions/cm². The dark mode spectrum of the waveguide structure was measured by the prism coupling experiment. The refractive index change along with the penetration depth was fitted by using the reflectivity calculation method (RCM). Finally, the calculated near-field light intensity distribution shows superior waveguide properties, which demonstrates its promising potentials for compact optical integrated devices.

References

[1] ZhangM, WangC, RebecaC, Shams-AnsariA, LoncarM. Optica, 2017, 4: 1536

[2] RíosC, StegmaierM, HosseiniP, WangD, SchererT, Wright CD, BhaskaranH, Pernice WolframH P. Nature Photonics, 2015, 9: 725

[3] WangL, Haunhorst ChristianE, Volk MartinF, ChenF, KipD. Optics Express, 2015, 23: 30188

[4] MaL-N, TanY, Ghorbani-AslM, BoettgerR, KretschmerS, ZhouS, HuangZ, KrasheninnikovA V, ChenF. Nanoscale, 2017, 9: 11027

[5] WangX-L, ChenF, WangK-M, LuQ-M, ShenD-Y, NieR. Applied Physics Letters, 2004, 85: 1457

[6] HuH, RickenR, SohlerW. Applied Physics B, 2010, 98: 677

[7] TervonenA, HonkanenS, West BrianR. Optical Engineering, 2011, 50: 071107

[8] TanY, ZhangC, ChenF, LiuQ F, JaqueD, LuQ-M. Applied Physics B, 2011, 103: 837

[9] ChenF, Vázquez deJ R A. Laser and Photonics Reviews, 2014, 8: 251

[10] ChenF. Laser and Photonics Reviews, 2012, 6: 622

[11] VázquezG V, ValienteR, Gómez-SalcesS, Flores-RomeroE, RickardsJ, Trejo-LunaR. Optics and Laser Technology, 2016, 79: 132

[12] BányászI, ZolnaiZ, FriedM, BerneschiS, PelliS, Nunzi-ContiG. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2014, 326: 81

[13] TanY, ChenF, WangL, WangK-M, LuQ-M. Journal of the Korean Physical Society, 2008, 52: S80

[14] WangY, ShenY, ZhengR-L, ShenJ-P, GuoH-T, LiuC-X. Results in Physics, 2018, 10: 200

[15] WangY, ShenX-L, ZhengR-L, GuoH-T, LvP, LiuC-X. Journal of the Korean Physical Society, 2018, 72: 765

[16] Bradley JonathanD B, PollnauM. Laser and Photonics Reviews, 2011, 5: 368

[17] DesirenaH, De la RosaE, Diaz-TorresL A, KumarG A. Optical Materials, 2006, 28: 560

[18] ChenC, HeR-Y, TanY, WangB, AkhmadalievS, ZhouS-Q, Javier RV D A, HuL-L, ChenF. Optical Materials, 2016, 51: 185

[19] LiuC-X, ShenX-L, GuoH-T, Li WeiN, WeiW. Optik, 2017, 131: 132

[20] Ziegler J. F., SRIM-The Stopping and Range of Ions in Matter, https://doi.org/www.srim.org.

[21] ChandlerP J, LamaF L. Optica Acta, 1986, 33: 127

[22] Rsoft Design Group, Computer software BeamPROP ver sion 8.0, https://doi.org/www.rsoftdesign.com.

[23] TanY, Aldana Vázquez de JavierR, ChenF. Optical Engineering, 2014, 53: 107109

[24] WangQ-Y, LiX-H, ZhangJ-Y. Optik, 2018, 164: 721

This work has been supported by the National Natural Science Foundation of China (Nos.11405041 and 61505084), and the Natural Science Foundation of Jiangsu Province (No.BK2015084).