Optical properties of an Er³⁺-doped phosphate glass waveguide formed by single-energy H⁺ ion implantation

Abstract

In this work, we report the fabrication of an optical waveguide by single-energy H⁺ ion implantation in the Er³⁺-doped phosphate glass. The ion implantation conditions are with energy of 0.4 MeV and a fluence of 8.0×10¹⁶ ions/cm². The dark mode spectrum of the waveguide structure was measured by the prism coupling experiment. The refractive index change along with the penetration depth was fitted by using the reflectivity calculation method (RCM). Finally, the calculated near-field light intensity distribution shows superior waveguide properties, which demonstrates its promising potentials for compact optical integrated devices.

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