A 45-channel 100 GHz AWG based on Si nanowire waveguides

Abstract

A 45-channel 100 GHz arrayed waveguide grating (AWG) based on Si nanowire waveguides is designed, simulated and fabricated. Transfer function method is used in the spectrum simulation. The simulated results show that the central wavelength and channel spacing are 1 562.1 nm and 0.8 nm, respectively, which are in accord with the designed values, and the crosstalk is about −23 dB. The device is fabricated on silicon-on-insulator (SOI) substrate by deep ultraviolet lithography (DUV) and inductively coupled plasma (ICP) etching technologies. The 45-channel 100 GHz AWG exhibits insertion loss of 6.5 dB and crosstalk of −8 dB.

References

[1] WangJ, ShengZ, LiL. Optics Express, 2014, 22: 9395

[2] KimD J, LeeJ M, SongJ H. IEEE Photonics Technology Letters, 2008, 20: 1615

[3] YeT, FuY, QiaoL. Optics Express, 2014, 22: 31899

[4] PanP, AnJ, ZhangJ. Optics Communications, 2015, 355: 376

[5] DaiH-q, AnJ-m, WangY. Journal of Semiconductors, 2014, 35: 104010

[6] LiJ, AnJ-m, XiaJ-l, WangH-j, HuX-w. Optoelectronics Letters, 2005, 1: 131

[7] OrghiciR, BethmannK, ZywietzU. Optics Letters, 2016, 41: 3940

[8] XiaolongL, LiuhongM, YuanfeiA, WeihuaH. Journal of Semiconductors, 2017, 38: 024005

[9] SongW, XieK. Optoelectronics Letters, 2008, 4: 92

[10] ChengZ, YanG, NiW, ZhuD, NiH, LiJ, ChenS, LiuG. Journal of Semiconductors, 2016, 37: 055007

[11] BogaertsW, SelvarajaS K, DumonP. IEEE Journal of Selected Topics in Quantum Electronics, 2010, 16: 33

[12] YuanP, WuY, WangY, AnJ, HuX. Journal of Semiconductors, 2015, 36: 084005

[13] Fang Q, Song J and Zhang G, IEEE Photonics Technology Letters 21, 319 (2009).

[14] WuW, AnX, TanF, FengH, ChenY, LiuJ, ZhangX, HuangR. Journal of Semiconductors, 2015, 36: 114004

[15] FangQ, LiowT Y, SongJ F. Optics Express, 2010, 18: 5106

[16] PathakS, VanslembrouckM, DumonP. IEEE Photonics Technology Letters, 2014, 26: 718

[17] FangQ, LiF, LiuY. Optics Communications, 2006, 258: 155

[18] PathakS, VanslembrouckM, DumonP20Optics Express, 2012, B493

[19] KimD J, LeeJ M, SongJ H. IEEE Photonics Technology Letters, 2008, 20: 1615