Fabrication of ordered micro- and nano-scale patterns based on optical discs and nanoimprint

Hui-jing Guo , Xiao-liang Zhang , Xiao-chun Li

Optoelectronics Letters ›› : 241 -244.

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Optoelectronics Letters ›› : 241 -244. DOI: 10.1007/s11801-016-6097-z
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Fabrication of ordered micro- and nano-scale patterns based on optical discs and nanoimprint

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Abstract

A simple method to fabricate one-dimensional (1-D) and two-dimensional (2-D) ordered micro- and nano-scale patterns is developed based on the original masters from optical discs, using nanoimprint technology and soft stamps. Polydimethylsiloxane (PDMS) was used to replicate the negative image of the 1-D grating pattern on the masters of CD-R, DVD-R and BD-R optical discs, respectively, and then the 1-D pattern on one of the PDMS stamps was transferred to a blank polycarbonate (PC) substrate by nanoimprint. The 2-D ordered patterns were fabricated by the second imprinting using another PDMS stamp. Different 2-D periodic patterns were obtained depending on the PDMS stamps and the angle between the two times of imprints. This method may provide a way for the fabrication of complex 2-D patterns using simple 1-D masters.

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Hui-jing Guo, Xiao-liang Zhang, Xiao-chun Li. Fabrication of ordered micro- and nano-scale patterns based on optical discs and nanoimprint. Optoelectronics Letters 241-244 DOI:10.1007/s11801-016-6097-z

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