Sub-micrometer-thick and low-loss Ge₂₀Sb₁₅Se₆₅ rib waveguides for nonlinear optical devices

Abstract

We report the fabrication and optical properties of sub-micrometer-thick Ge₂₀Sb₁₅Se₆₅ chalcogenide rib waveguides. The radio-frequency (RF) magnetron sputtering method is used to deposit 0.83 μm-thick films. A protective layer of SU-8 is employed to prevent the attack of the alkaline developer, and CHF₃ is used as the etching plasma for reactive ion etching (RIE). Finally, the resulted rib waveguides with smooth sidewalls and vertical pattern profiles are rendered. The propagation losses for 4 μm-wide waveguides are measured to be 0.7 dB/cm for transverse electric (TE) modes and 0.68 dB/cm for transverse magnetic (TM) modes at 1 550 nm via the cutback method.

Keywords

Atomic Layer Deposition / Transverse Magnetic / Transverse Electric / Bulk Glass / Transverse Magnetic Mode

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