Study of a novel pressure sensor based on optical microring resonator

Xin Li; Shi-liang Guo; Zhi-quan Li; Ming Yang

doi:10.1007/s11801-014-4010-1

Optoelectronics Letters ›› 2014, Vol. 10 ›› Issue (3) : 188-190. DOI: 10.1007/s11801-014-4010-1

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Study of a novel pressure sensor based on optical microring resonator

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Abstract

We propose a novel pressure sensor based on the combination of the ring resonator with two straight waveguides and a two-end fixed beam. The principle of this device is acquiring the system static pressure by monitoring the changes in the transmission wavelength shift of the ring resonator with double waveguides. The numerical results show that the sensitivity of the system is up to 49.3 pm/kPa while the pressure range is 0-300 kPa. The thickness of the fixed beam is an important factor which impacts the sensitivity of the system. This device can provide support for fabricating high sensitivity and low cost micro pressure sensors.

Keywords

Pressure Sensor / Fiber Bragg Grating / Ring Resonator / Effective Refractive Index / Resonant Wavelength

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Xin Li, Shi-liang Guo, Zhi-quan Li, Ming Yang. Study of a novel pressure sensor based on optical microring resonator. Optoelectronics Letters, 2014, 10(3): 188‒190 https://doi.org/10.1007/s11801-014-4010-1

References

Publishing order | Descend order by publishing year | Descend order by cited within

[1]	WangW, WuN, TianY. Optics Express, 2010, 18: 9006 CrossRef Google scholar

[2]	FuH Y, WuC, TseM L V. Applied Optics, 2010, 49: 2639 CrossRef Google scholar

[3]	FengJ, ZhaoY, LiS. IEEE Photonics Journal, 2010, 2: 292 CrossRef Google scholar

[4]	AbeysingheD C, DasguptaS, BoydJ T. IEEE Photonics Technology Letters, 2001, 13: 993 CrossRef Google scholar

[5]	ZhangY, FengD, LiuZ. IEEE Photonics Technology Letters, 2001, 13: 618 CrossRef Google scholar

[6]	WangW, WuN, TianY. Optics Express, 2009, 17: 16613 CrossRef Google scholar

[7]	BaeH, ZhangX M, LiuH. Optics Letters, 2010, 35: 1701 CrossRef Google scholar

[8]	WangQ, ZhangL, SunC S, YuQ X. IEEE Sensors Journal, 2008, 8: 1879 CrossRef Google scholar

[9]	Fanz, YunB, Hug. Journal of Optoelectronics·Laser, 2012, 23: 1727

[10]	BarriosC A. Analytical and Bioanalytical Chemistry, 2012, 403: 1467 CrossRef Google scholar

[11]	ZhaoX, TsaiJ M, CaiH. Optics Express, 2012, 20: 8535 CrossRef Google scholar

[12]	BipinB. IEEE Sensors Journal, 2007, 7: 1759 CrossRef Google scholar

[13]	BholaB, SongH C, TazawaH. IEEE Photonics Technology Letters, 2005, 17: 867 CrossRef Google scholar

[14]	KiyatI, KocabasC, AydinliA. Journal of Micromechanics and Microengineering, 2004, 14: 374 CrossRef Google scholar

[15]	YuW, XuZ, Yun-JiangR. IEEE Photonics Technology Letters, 2009, 21: 1547 CrossRef Google scholar

[16]	WangW, HaoY. Journal of Transducer Technology, 2003, 22: 30

[17]	HeS, Daid. Micro-Nano Photonic Integration, 2010, Beijing, Science Press: 156

[18]	LiJ. Journal of Optoelectronics·Laser, 2012, 23: 2446

This work has been supported by the National Natural Science Foundation of China (No.6172044), and the Natural Science Foundation of Hebei Province (No.F2012203204).