An ammonia gas sensor with two chambers based on U-bending microring resonator

Abstract

A compact ammonia gas sensor with two gas chambers is proposed in this paper, whose core sensing device is a U-bending microring resonator. The waveguides of ring part and feedback part in this resonator are made of silicon on insulator (SOI) ridge waveguide covered with ZnO nanocrystals which are sensitive to ammonia gas. The sensor can measure two groups of gas samples simultaneously. By computer simulation, we obtain the clear sensitivity curves of two gas chambers in ammonia sensor when the gas concentration increases from 0 to 4‰. The gas concentrations in two chambers can be obtained from one output spectrum, which significantly reduces the material and time consumption.

Keywords

Surface Acoustic Wave / Effective Index / Ring Resonator / Output Spectrum / Resonant Wavelength

References

[1] TimmerB, OlthuisW, Van de bergA. Sensors and Actuators B, 2005, 107: 666

[2] KohlD. Journal Physics, 2001, D34: R125

[3] HuangY, TaoS. Journal of Sensor Technology, 2011, 1: 29

[4] HuangY, TaoS. Journal of Sensor Technology, 2011, 1: 29

[5] PrasadAK, GoumaP I, KubinskiD J, VisserJ H, SoltisR E, SchmitzP J. Thin Solid Films, 2003, 436: 46

[6] SetkusA, GaldikasA, MironasA, StrazdieneV, ŠimkienI, AncutienI, JanickisV, KačiulisS, MattognoG, IngoG M. Sensors and Actuators B, 2001, 78: 208

[7] ShenC, HsuC, HwangR, JengJ. Sensors and Actuators B: Chemical, 2007, 122: 457

[8] JiangH, WuY. Journal of Optoelectronics ·Laser, 2011, 22: 813

[9] JiangH, WuY. Journal of Optoelectronics ·Laser, 2011, 22: 813

[10] OrghiciR, LützowP, BurgmeierJ, KochJ, HeidrichH, SchadeW, WelschoffN, WaldvogelS. Sensors, 2010, 10: 6788

[11] OrghiciR, LützowP, BurgmeierJ, KochJ, HeidrichH, SchadeW, WelschoffN, WaldvogelS. Sensors, 2010, 10: 6788

[12] YeboN A, LommensP, HensZ, BaetsR. Optics Express, 2010, 18: 11859

[13] YeboN A, BogaertsW, HensZ, BaetsR. IEEE Photonics Technology Letters, 2011, 23: 1505

[14] YeboN A, BogaertsW, HensZ, BaetsR. IEEE Photonics Technology Letters, 2011, 23: 1505

[15] FanZ, YunB, HuG. Journal of Optoelectronics·Laser, 2012, 23: 1727

[16] FanZ, YunB, HuG. Journal of Optoelectronics·Laser, 2012, 23: 1727

[17] LuY, FuX, ChuD, WenW, YaoJ. Optics Comuunications, 2011, 284: 476

[18] LuY, FuX, ChuD, WenW, YaoJ. Optics Comuunications, 2011, 284: 476

[19] ZhouL, PoonA W. Optics Express, 2007, 15: 9194

[20] LuY, HaoC, LuB. Optic Communications, 2012, 285: 4567

[21] LuY, HaoC, LuB. Optic Communications, 2012, 285: 4567

[22] ForleoA, FranciosoL, CaponeS, SicilianoP, LommensP, HenzZ. Sensor Actuators B Chemical, 2010, 146: 111

[23] LommensP, ThourhoutD V, SmetP F, PoelmanD, HensZ. Nanotechnology, 2008, 19: 245301