Effects of electrodes on resistance switching characteristics of TiO₂ for flexible memory

Abstract

Flexible TiO₂ memory devices are fabricated on a plastic substrate at room temperature. The metal-insulator-metal (MIM) structure is grown on polyimide (PI). Several metals with different ductilities, such as Al, W, Cu and Ag, are selected as electrode. The test results show that the samples have stable resistive switching behaviors, and the electric characteristics can stay stable even after the radius of substrate is bent up to 10 mm. After 10³ times of substrate bending, the memory cells with W as bottom electrode on PI still show stable resistive switching characteristics and low switching voltages. The set voltage and reset voltage can be as low as 0.9 V and 0.3 V, respectively.

Keywords

Memory Device / Bottom Electrode / Resistive Switching / High Resistance State / Resistive Random Access Memory

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