A new method to characterize the metallic-oxide films for grayscale lithography

Abstract

In order to characterize the metallic-oxide grayscale films fabricated by laser direct writing (LDW) in indium film, a new method with micro-Raman spectroscopy and atomic force microscope (AFM) is proposed. Raman spectra exhibit the characteristic band of In₂O₃ centered at 490 cm⁻¹, in which the intensities increase with the decreasing optical density of the In-In₂O₃ grayscale films. The mapping information of Raman spectra shows that the signal intensities of the film in the same grayscale area are uniform. Combining with the information of In-In₂O₃ grayscale film from AFM, the quantitative relationship between the concentration of In₂O₃ and the Raman signal intensity is shown. Compared with the conventional methods, the resolution of micro-Raman scattering method is appropriate, and the scanning speed is proper to analyze the structure of metallic-oxide grayscale films.

Keywords

Atomic Force Microscope / Select Area Electron Diffraction / Raman Signal / Body Centered Cubic / Laser Direct Writing

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This work has been supported by the National Natural Science Foundation of China (Nos.11004152 and 11204213), the Program of Tianjin Municipal Education Commission (No.20090715), and the Tianjin Natural Science Foundation (No.12JCQNJC00800).