A new method for measuring laser beam straightness error based on common-path compensation

Abstract

A novel method for laser beam straightness error measurements based on common-path compensation is proposed. The basic principle of the method is described and the math-model is established. Furthermore, the influence of laser beam drift on straightness error measurements is analyzed. The experimental results show that the measurement accuracy can be greatly improved by using the common-path compensation for laser beam drift.

Keywords

Laser Beam / Position Change / Linear Stage / Measurement Head / Mechanical Rotation

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