Development of three-dimensional profiler for large field micro-surface topography measurement

Hong-xia Zhang; Yi-mo Zhang; Wen-cai Jing; Da-gong Jia; Cen Huang

doi:10.1007/s11801-009-8193-9

Optoelectronics Letters ›› 2009, Vol. 5 ›› Issue (4) : 292 -294. DOI: 10.1007/s11801-009-8193-9

Article

Development of three-dimensional profiler for large field micro-surface topography measurement

Hong-xia Zhang ¹^,²^,^a
, Yi-mo Zhang ¹^,²
, Wen-cai Jing ¹^,²
, Da-gong Jia ¹^,²
, Cen Huang ¹^,²

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Abstract

This paper presents a large field phase-shifting interference microscope for micro-surface topography measurement. A PZT is used as the Z-directional phase shifter. The interference microscope is the combination of the infinity tube microscope with the Mirau two-beam interferometer. Two-dimensional precision motorized stage is aligned as the scanning system in the X- and Y-direction to extend the test surface measurement range to 12.5 mm × 12.5 mm. The minimum displacement is 0.039 m and the overlapped proportion is 0.22. A fast stitching algorithm is proposed based on grid matching. According to the reflectivity of the core and the ferrule, the plate with the transmission/reflectivity ratio of 70/30 is selected to balance the interference intensity. The instrument is proved to be valid by actual measurement of the end surface of an optical fiber connector.

Keywords

Test Surface / Interference Microscope / Interference Imaging / Cube Beam Splitter / Illumination Part

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Hong-xia Zhang, Yi-mo Zhang, Wen-cai Jing, Da-gong Jia, Cen Huang. Development of three-dimensional profiler for large field micro-surface topography measurement. Optoelectronics Letters, 2009, 5(4): 292-294 DOI:10.1007/s11801-009-8193-9

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