Effect of nitrogen pressure on optical properties and microstructure of diamond-like carbon films grown by pulsed laser deposition

Abstract

The effect of nitrogen pressure on optical properties of hydrogen-free diamond-like carbon (DLC) films deposited by pulsed laser ablation graphite in different background pressures of nitrogen is reported. By varying nitrogen pressures from 0.05 to 15.00 Pa, the photoluminescence is gradually increased and optical transmittance is gradually decreased. Atomic force microscopy (AFM) is used to observe the surface morphology of the DLC films. The results indicate that the surface becomes unsmoothed and there are some globose particles on the films surface with the rise of nitrogen pressures. The microstructure of the films is characterized using Raman spectroscopy.

Keywords

Pulse Laser Deposition / Nitrogen Pressure / Optical Transmittance Spectrum / Pulse Laser Deposition System / Globose Particle

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