Study of a displacement sensor based on transmission varied-line-space phase grating

Abstract

A displacement sensor based on transmission varied-line-space (VLS) phase gratings is proposed. The relationship between the properties of the sensor and the parameters of VLS is discussed. Compared with the displacement sensor manufactured by the reflective VLS grating, this type of sensor contains a grating with simpler structure and high diffraction efficiency. It also has good stability with the change of temperature.

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