Traceable long range scanning tunneling microscopy
A. Weckenmann , J. Hoffmann
Optoelectronics Letters ›› 2008, Vol. 4 ›› Issue (1) : 49 -50.
Traceable long range scanning tunneling microscopy
Dimensionally correct and directly traceable measurement is not feasible with conventional scanning tunneling microscopy (STMs) due to severe hysteresis and non-linearity of the commonly applied piezo tube scanners and the very short range. By integrating a custom made probing system based on tunneling current measurement into a commercially available and laser-interferometrically position controlled positioning system, an STM with a principal measuring range of 25 mm × 25 mm × 5 mm and traceable position measurement has been set-up and tested.
| [1] |
|
| [2] |
|
| [3] |
G. Jäger, E. Manske, and T. Hausotte, Proceedings of 10th CIRP Conference on Computer Aided Tolerancing,(Erlangen, Germany),(2007), 26. |
| [4] |
A. Weckenmann, A. Schuler, and J. Hoffmann, Proceedings of 10th CIRP Conference on Computer Aided Tolerancing (Erlangen, Germany),(2007), 27. |
| [5] |
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