Micro-optical structures formed by a mask moving method

Abstract

An unique mask moving method is developed for forming effective micro-optical structures with continuous profile. The mechanism for forming different micro-optical profiles is disclosed, and the designed approach for binary moving mask is described. Finally some eoncrete micro-optical components with typical microstructures are presented for demonstrating the validity of the method.

References

[1] Dante D’Amato and Robert Centamore, SPIE, (1991), 1544 (1991), 166.

[2] KwoD., DamasG., ZmekW.. SPIE, 1991, 1544: 66

[3] MotamediM.E., WuM. C., PisterK.S.J.. Opt. Eng., 1997, 36: 1282

[4] VolkelR., HerzigH. P., NussbaumP.. Opt. Eng., 1996, 35: 3323

[5] DuC., DongX., QiuC., DengQ., ZhouC.. Optical Engineering, 2004, 43: 2595

[6] Xiaochung Dong, Chunlei Du, Changtao Wang, Qiling Deng, Yudong Zhang, and Xiangang Luo, Applied Physics Letter, 89 (2006), 261105.