Fabrication and characterization of NEMS

Abstract

We proposed a called “nano-fabrication based on MEMS technology” approach to realize the typical nano-electromechanical structures, such as integrated nano probe, ultrathin cantilever, silicon nano wire, and doubly clamped nano beam, to demonstrate the feasibility and advantages. We also introduced the characterization of nano structures based on laser vibrometer and piezoresistive effect, the latter method was first time applied to investigate a doubly daped nanobeam with a thickness of about 200 nm.

References

[1] ClelandA. N., RoukesM. L.. Appl. Phys. Lett., 1996, 69: 2653

[2] NakajimaA., FutatsugiT., KosemuraK., FukanoT., YokoyamaN.. Appl. Phys. Lett., 1997, 70: 1742

[3] ZankovychS., HoffmannT., SteekampJ., BruchJ.-U., Sotomayor TorresC.M.. Nanotechnol., 2001, 12: 91

[4] ReyntjensS., PuersR.. J. Micromech. Microeng., 2001, 11: 287

[5] OyabuN., CustanceO., YiI., SugawaraY., MoritaS.. Phys. Rev. Lett., 2003, 90: 176

[6] DruckerJ.. IEEE J. Quantum Electron., 2002, 38: 975

[7] WangY., LiX., LiT., YangH., JiaoJ.. IEEE Sensor Journal, 2006, 6: 686

[8] YangZ. X., et al.. Microelectron. J., 2004, 35: 479

[9] LiX. X.. Appl. Phys. Lett., 2003, 83: 3081

[10] LiuW.. Chinese J. of Semiconductors, 2006, 27: 1645

[11] DuttaD., LeightonD.T.Jr. Microfluid Nanofluid, 2006, 2: 275

[12] ClelandA. N., RoukesM. L.. Appl. Phys. Lett., 1996, 69: 2653

[13] CarrD. W., EvoyS., SekaricL., CraigheadH.G., ParpiaJ.M.. Appl. Phys. Lett., 1999, 75: 920

[14] YangJ., OnoT., EsashiM.. Sens. Actuators A, 2000, 82: 102

[15] BaoM.MiddelhoekS.. Micro Mechanical Transducers—Pressure Sensors, Accelerometers and Gyroscopes, 2000, New York, ELSEVIER

[16] BroughtonJ. Q., MeliC. A., VashishtaP., KaliaK.. Phys. Rev. B, 1997, 56: 611